Wafer-scale and universal van der Waals metal semiconductor contact
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DOI: 10.1038/s41467-023-36715-6
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- Yuan Liu & Xidong Duan & Hyeon-Jin Shin & Seongjun Park & Yu Huang & Xiangfeng Duan, 2021. "Promises and prospects of two-dimensional transistors," Nature, Nature, vol. 591(7848), pages 43-53, March.
- Deji Akinwande & Cedric Huyghebaert & Ching-Hua Wang & Martha I. Serna & Stijn Goossens & Lain-Jong Li & H.-S. Philip Wong & Frank H. L. Koppens, 2019. "Graphene and two-dimensional materials for silicon technology," Nature, Nature, vol. 573(7775), pages 507-518, September.
- Yuan Liu & Jian Guo & Enbo Zhu & Lei Liao & Sung-Joon Lee & Mengning Ding & Imran Shakir & Vincent Gambin & Yu Huang & Xiangfeng Duan, 2018. "Approaching the Schottky–Mott limit in van der Waals metal–semiconductor junctions," Nature, Nature, vol. 557(7707), pages 696-700, May.
- Fan Wu & He Tian & Yang Shen & Zhan Hou & Jie Ren & Guangyang Gou & Yabin Sun & Yi Yang & Tian-Ling Ren, 2022. "Vertical MoS2 transistors with sub-1-nm gate lengths," Nature, Nature, vol. 603(7900), pages 259-264, March.
- Yan Wang & Jong Chan Kim & Ryan J. Wu & Jenny Martinez & Xiuju Song & Jieun Yang & Fang Zhao & Andre Mkhoyan & Hu Young Jeong & Manish Chhowalla, 2019. "Van der Waals contacts between three-dimensional metals and two-dimensional semiconductors," Nature, Nature, vol. 568(7750), pages 70-74, April.
- Pin-Chun Shen & Cong Su & Yuxuan Lin & Ang-Sheng Chou & Chao-Ching Cheng & Ji-Hoon Park & Ming-Hui Chiu & Ang-Yu Lu & Hao-Ling Tang & Mohammad Mahdi Tavakoli & Gregory Pitner & Xiang Ji & Zhengyang Ca, 2021. "Ultralow contact resistance between semimetal and monolayer semiconductors," Nature, Nature, vol. 593(7858), pages 211-217, May.
- Lingan Kong & Xiaodong Zhang & Quanyang Tao & Mingliang Zhang & Weiqi Dang & Zhiwei Li & Liping Feng & Lei Liao & Xiangfeng Duan & Yuan Liu, 2020. "Doping-free complementary WSe2 circuit via van der Waals metal integration," Nature Communications, Nature, vol. 11(1), pages 1-7, December.
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- Yangshuang Bian & Mingliang Zhu & Chengyu Wang & Kai Liu & Wenkang Shi & Zhiheng Zhu & Mingcong Qin & Fan Zhang & Zhiyuan Zhao & Hanlin Wang & Yunqi Liu & Yunlong Guo, 2024. "A detachable interface for stable low-voltage stretchable transistor arrays and high-resolution X-ray imaging," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
- Xiaodong Zhang & Chenxi Huang & Zeyu Li & Jun Fu & Jiaran Tian & Zhuping Ouyang & Yuliang Yang & Xiang Shao & Yulei Han & Zhenhua Qiao & Hualing Zeng, 2024. "Reliable wafer-scale integration of two-dimensional materials and metal electrodes with van der Waals contacts," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
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