IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v15y2024i1d10.1038_s41467-024-54218-w.html
   My bibliography  Save this article

High performance Si-MoS2 heterogeneous embedded DRAM

Author

Listed:
  • Kai Xiao

    (Fudan University)

  • Jing Wan

    (Fudan University)

  • Hui Xie

    (Fudan University)

  • Yuxuan Zhu

    (Fudan University)

  • Tian Tian

    (Fudan University)

  • Wei Zhang

    (Fudan University)

  • Yingxin Chen

    (Fudan University)

  • Jinshu Zhang

    (Fudan University)

  • Lihui Zhou

    (School of Chemistry & Molecular Engineering, East China University of Science and Technology)

  • Sheng Dai

    (School of Chemistry & Molecular Engineering, East China University of Science and Technology)

  • Zihan Xu

    (Shenzhen Sixcarbon Technology)

  • Wenzhong Bao

    (Fudan University)

  • Peng Zhou

    (Fudan University)

Abstract

Embedded Dynamic RAM (eDRAM) has become a key solution for large-capacity cache in high-performance processors. A heterogeneous two transistor capacitorless eDRAM (2T-eDRAM) that combines silicon and molybdenum disulfide (MoS2) is reported to address the short retention issue in conventional gain cell (GC) eDRAMs meanwhile eliminate the pillar capacitor in one transistor and one capacitor (1T1C) eDRAMs. The MoS2 write transistor with low OFF current (IOFF) enables long data retention, while the Si read transistor offers high drive current and logic compatibility. This combination enhances data retention by 1000 times and sense margin by 100 times respectively compared to full Si and MoS2 counterparts. A three-dimensional (3D) design stacking MoS2 on Si is demonstrated with back-end-of-line (BEOL) process to double integration density. With 6000 s data retention, 35 μA/μm sense margin, 5 ns access speeds, 3D integration and CMOS logic compatibility, this Si-MoS2 eDRAM marks a significant advancement in memory technology.

Suggested Citation

  • Kai Xiao & Jing Wan & Hui Xie & Yuxuan Zhu & Tian Tian & Wei Zhang & Yingxin Chen & Jinshu Zhang & Lihui Zhou & Sheng Dai & Zihan Xu & Wenzhong Bao & Peng Zhou, 2024. "High performance Si-MoS2 heterogeneous embedded DRAM," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-54218-w
    DOI: 10.1038/s41467-024-54218-w
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-024-54218-w
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-024-54218-w?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Lei Liu & Taotao Li & Liang Ma & Weisheng Li & Si Gao & Wenjie Sun & Ruikang Dong & Xilu Zou & Dongxu Fan & Liangwei Shao & Chenyi Gu & Ningxuan Dai & Zhihao Yu & Xiaoqing Chen & Xuecou Tu & Yuefeng N, 2022. "Uniform nucleation and epitaxy of bilayer molybdenum disulfide on sapphire," Nature, Nature, vol. 605(7908), pages 69-75, May.
    2. Yuan Liu & Xidong Duan & Hyeon-Jin Shin & Seongjun Park & Yu Huang & Xiangfeng Duan, 2021. "Promises and prospects of two-dimensional transistors," Nature, Nature, vol. 591(7848), pages 43-53, March.
    3. Deji Akinwande & Cedric Huyghebaert & Ching-Hua Wang & Martha I. Serna & Stijn Goossens & Lain-Jong Li & H.-S. Philip Wong & Frank H. L. Koppens, 2019. "Graphene and two-dimensional materials for silicon technology," Nature, Nature, vol. 573(7775), pages 507-518, September.
    4. Fan Wu & He Tian & Yang Shen & Zhan Hou & Jie Ren & Guangyang Gou & Yabin Sun & Yi Yang & Tian-Ling Ren, 2022. "Vertical MoS2 transistors with sub-1-nm gate lengths," Nature, Nature, vol. 603(7900), pages 259-264, March.
    5. Pin-Chun Shen & Cong Su & Yuxuan Lin & Ang-Sheng Chou & Chao-Ching Cheng & Ji-Hoon Park & Ming-Hui Chiu & Ang-Yu Lu & Hao-Ling Tang & Mohammad Mahdi Tavakoli & Gregory Pitner & Xiang Ji & Zhengyang Ca, 2021. "Ultralow contact resistance between semimetal and monolayer semiconductors," Nature, Nature, vol. 593(7858), pages 211-217, May.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Lingan Kong & Ruixia Wu & Yang Chen & Ying Huangfu & Liting Liu & Wei Li & Donglin Lu & Quanyang Tao & Wenjing Song & Wanying Li & Zheyi Lu & Xiao Liu & Yunxin Li & Zhiwei Li & Wei Tong & Shuimei Ding, 2023. "Wafer-scale and universal van der Waals metal semiconductor contact," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    2. Yu Pan & Tao Jian & Pingfan Gu & Yiwen Song & Qi Wang & Bo Han & Yuqia Ran & Zemin Pan & Yanping Li & Wanjin Xu & Peng Gao & Chendong Zhang & Jun He & Xiaolong Xu & Yu Ye, 2024. "Precise p-type and n-type doping of two-dimensional semiconductors for monolithic integrated circuits," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    3. Lu Li & Qinqin Wang & Fanfan Wu & Qiaoling Xu & Jinpeng Tian & Zhiheng Huang & Qinghe Wang & Xuan Zhao & Qinghua Zhang & Qinkai Fan & Xiuzhen Li & Yalin Peng & Yangkun Zhang & Kunshan Ji & Aomiao Zhi , 2024. "Epitaxy of wafer-scale single-crystal MoS2 monolayer via buffer layer control," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    4. Liting Liu & Yang Chen & Long Chen & Biao Xie & Guoli Li & Lingan Kong & Quanyang Tao & Zhiwei Li & Xiaokun Yang & Zheyi Lu & Likuan Ma & Donglin Lu & Xiangdong Yang & Yuan Liu, 2024. "Ultrashort vertical-channel MoS2 transistor using a self-aligned contact," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    5. Xingchen Pang & Yang Wang & Yuyan Zhu & Zhenhan Zhang & Du Xiang & Xun Ge & Haoqi Wu & Yongbo Jiang & Zizheng Liu & Xiaoxian Liu & Chunsen Liu & Weida Hu & Peng Zhou, 2024. "Non-volatile rippled-assisted optoelectronic array for all-day motion detection and recognition," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    6. Mengshi Yu & Congwei Tan & Yuling Yin & Junchuan Tang & Xiaoyin Gao & Hongtao Liu & Feng Ding & Hailin Peng, 2024. "Integrated 2D multi-fin field-effect transistors," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    7. Maosong Xie & Yueyang Jia & Chen Nie & Zuheng Liu & Alvin Tang & Shiquan Fan & Xiaoyao Liang & Li Jiang & Zhezhi He & Rui Yang, 2023. "Monolithic 3D integration of 2D transistors and vertical RRAMs in 1T–4R structure for high-density memory," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    8. Yikai Zheng & Harikrishnan Ravichandran & Thomas F. Schranghamer & Nicholas Trainor & Joan M. Redwing & Saptarshi Das, 2022. "Hardware implementation of Bayesian network based on two-dimensional memtransistors," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    9. Xuanzhang Li & Yang Wei & Zhijie Wang & Ya Kong & Yipeng Su & Gaotian Lu & Zhen Mei & Yi Su & Guangqi Zhang & Jianhua Xiao & Liang Liang & Jia Li & Qunqing Li & Jin Zhang & Shoushan Fan & Yuegang Zhan, 2023. "One-dimensional semimetal contacts to two-dimensional semiconductors," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    10. Chengjian He & Chuan Xu & Chen Chen & Jinmeng Tong & Tianya Zhou & Su Sun & Zhibo Liu & Hui-Ming Cheng & Wencai Ren, 2024. "Unusually high thermal conductivity in suspended monolayer MoSi2N4," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    11. Yaoqiang Zhou & Lei Tong & Zefeng Chen & Li Tao & Yue Pang & Jian-Bin Xu, 2023. "Contact-engineered reconfigurable two-dimensional Schottky junction field-effect transistor with low leakage currents," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    12. Xiaodong Zhang & Chenxi Huang & Zeyu Li & Jun Fu & Jiaran Tian & Zhuping Ouyang & Yuliang Yang & Xiang Shao & Yulei Han & Zhenhua Qiao & Hualing Zeng, 2024. "Reliable wafer-scale integration of two-dimensional materials and metal electrodes with van der Waals contacts," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    13. Guangdi Feng & Yifei Liu & Qiuxiang Zhu & Zhenyu Feng & Shengwen Luo & Cuijie Qin & Luqiu Chen & Yu Xu & Haonan Wang & Muhammad Zubair & Ke Qu & Chang Yang & Shenglan Hao & Fangyu Yue & Chungang Duan , 2024. "Giant tunnel electroresistance through a Van der Waals junction by external ferroelectric polarization," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    14. Xin Gao & Liming Zheng & Fang Luo & Jun Qian & Jingyue Wang & Mingzhi Yan & Wendong Wang & Qinci Wu & Junchuan Tang & Yisen Cao & Congwei Tan & Jilin Tang & Mengjian Zhu & Yani Wang & Yanglizhi Li & L, 2022. "Integrated wafer-scale ultra-flat graphene by gradient surface energy modulation," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    15. Jun Zhou & Guitao Zhang & Wenhui Wang & Qian Chen & Weiwei Zhao & Hongwei Liu & Bei Zhao & Zhenhua Ni & Junpeng Lu, 2024. "Phase-engineered synthesis of atomically thin te single crystals with high on-state currents," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    16. Xia Liu & Berke Erbas & Ana Conde-Rubio & Norma Rivano & Zhenyu Wang & Jin Jiang & Siiri Bienz & Naresh Kumar & Thibault Sohier & Marcos Penedo & Mitali Banerjee & Georg Fantner & Renato Zenobi & Nico, 2024. "Deterministic grayscale nanotopography to engineer mobilities in strained MoS2 FETs," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    17. Jun Yu & Han Wang & Fuwei Zhuge & Zirui Chen & Man Hu & Xiang Xu & Yuhui He & Ying Ma & Xiangshui Miao & Tianyou Zhai, 2023. "Simultaneously ultrafast and robust two-dimensional flash memory devices based on phase-engineered edge contacts," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    18. Seunguk Song & Aram Yoon & Sora Jang & Jason Lynch & Jihoon Yang & Juwon Han & Myeonggi Choe & Young Ho Jin & Cindy Yueli Chen & Yeryun Cheon & Jinsung Kwak & Changwook Jeong & Hyeonsik Cheong & Deep , 2023. "Fabrication of p-type 2D single-crystalline transistor arrays with Fermi-level-tuned van der Waals semimetal electrodes," Nature Communications, Nature, vol. 14(1), pages 1-14, December.
    19. Max C. Lemme & Deji Akinwande & Cedric Huyghebaert & Christoph Stampfer, 2022. "2D materials for future heterogeneous electronics," Nature Communications, Nature, vol. 13(1), pages 1-5, December.
    20. Lutao Li & Junjie Yao & Juntong Zhu & Yuan Chen & Chen Wang & Zhicheng Zhou & Guoxiang Zhao & Sihan Zhang & Ruonan Wang & Jiating Li & Xiangyi Wang & Zheng Lu & Lingbo Xiao & Qiang Zhang & Guifu Zou, 2023. "Colloid driven low supersaturation crystallization for atomically thin Bismuth halide perovskite," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-54218-w. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.