Wafer-scale functional circuits based on two dimensional semiconductors with fabrication optimized by machine learning
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DOI: 10.1038/s41467-021-26230-x
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- Maosong Xie & Yueyang Jia & Chen Nie & Zuheng Liu & Alvin Tang & Shiquan Fan & Xiaoyao Liang & Li Jiang & Zhezhi He & Rui Yang, 2023. "Monolithic 3D integration of 2D transistors and vertical RRAMs in 1T–4R structure for high-density memory," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
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