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General synthesis of two-dimensional van der Waals heterostructure arrays

Author

Listed:
  • Jia Li

    (Hunan University)

  • Xiangdong Yang

    (Hunan University)

  • Yang Liu

    (University of California, Los Angeles)

  • Bolong Huang

    (The Hong Kong Polytechnic University)

  • Ruixia Wu

    (Hunan University)

  • Zhengwei Zhang

    (Hunan University)

  • Bei Zhao

    (Hunan University)

  • Huifang Ma

    (Hunan University)

  • Weiqi Dang

    (Hunan University)

  • Zheng Wei

    (Beijing National Laboratory for Condensed Matter Physics Institute of Physics, Chinese Academy of Sciences)

  • Kai Wang

    (Tianjin University of Technology)

  • Zhaoyang Lin

    (University of California, Los Angeles)

  • Xingxu Yan

    (University of California, Irvine)

  • Mingzi Sun

    (The Hong Kong Polytechnic University)

  • Bo Li

    (Hunan University
    Hunan University)

  • Xiaoqing Pan

    (University of California, Irvine
    University of California, Irvine)

  • Jun Luo

    (Tianjin University of Technology)

  • Guangyu Zhang

    (Beijing National Laboratory for Condensed Matter Physics Institute of Physics, Chinese Academy of Sciences)

  • Yuan Liu

    (Hunan University
    Hunan University)

  • Yu Huang

    (University of California, Los Angeles)

  • Xidong Duan

    (Hunan University)

  • Xiangfeng Duan

    (University of California, Los Angeles)

Abstract

Two-dimensional van der Waals heterostructures (vdWHs) have attracted considerable interest1–4. However, most vdWHs reported so far are created by an arduous micromechanical exfoliation and manual restacking process5, which—although versatile for proof-of-concept demonstrations6–16 and fundamental studies17–30—is clearly not scalable for practical technologies. Here we report a general synthetic strategy for two-dimensional vdWH arrays between metallic transition-metal dichalcogenides (m-TMDs) and semiconducting TMDs (s-TMDs). By selectively patterning nucleation sites on monolayer or bilayer s-TMDs, we precisely control the nucleation and growth of diverse m-TMDs with designable periodic arrangements and tunable lateral dimensions at the predesignated spatial locations, producing a series of vdWH arrays, including VSe2/WSe2, NiTe2/WSe2, CoTe2/WSe2, NbTe2/WSe2, VS2/WSe2, VSe2/MoS2 and VSe2/WS2. Systematic scanning transmission electron microscopy studies reveal nearly ideal vdW interfaces with widely tunable moiré superlattices. With the atomically clean vdW interface, we further show that the m-TMDs function as highly reliable synthetic vdW contacts for the underlying WSe2 with excellent device performance and yield, delivering a high ON-current density of up to 900 microamperes per micrometre in bilayer WSe2 transistors. This general synthesis of diverse two-dimensional vdWH arrays provides a versatile material platform for exploring exotic physics and promises a scalable pathway to high-performance devices.

Suggested Citation

  • Jia Li & Xiangdong Yang & Yang Liu & Bolong Huang & Ruixia Wu & Zhengwei Zhang & Bei Zhao & Huifang Ma & Weiqi Dang & Zheng Wei & Kai Wang & Zhaoyang Lin & Xingxu Yan & Mingzi Sun & Bo Li & Xiaoqing P, 2020. "General synthesis of two-dimensional van der Waals heterostructure arrays," Nature, Nature, vol. 579(7799), pages 368-374, March.
  • Handle: RePEc:nat:nature:v:579:y:2020:i:7799:d:10.1038_s41586-020-2098-y
    DOI: 10.1038/s41586-020-2098-y
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    Cited by:

    1. Teng Ma & Hao Chen & Kunihiro Yananose & Xin Zhou & Lin Wang & Runlai Li & Ziyu Zhu & Zhenyue Wu & Qing-Hua Xu & Jaejun Yu & Cheng Wei Qiu & Alessandro Stroppa & Kian Ping Loh, 2022. "Growth of bilayer MoTe2 single crystals with strong non-linear Hall effect," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    2. Xiang Xu & Yunxin Chen & Pengbin Liu & Hao Luo & Zexin Li & Dongyan Li & Haoyun Wang & Xingyu Song & Jinsong Wu & Xing Zhou & Tianyou Zhai, 2024. "General synthesis of ionic-electronic coupled two-dimensional materials," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    3. Xiaowei Guo & Erhong Song & Wei Zhao & Shumao Xu & Wenli Zhao & Yongjiu Lei & Yuqiang Fang & Jianjun Liu & Fuqiang Huang, 2022. "Charge self-regulation in 1T'''-MoS2 structure with rich S vacancies for enhanced hydrogen evolution activity," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    4. Guowen Yuan & Weilin Liu & Xianlei Huang & Zihao Wan & Chao Wang & Bing Yao & Wenjie Sun & Hang Zheng & Kehan Yang & Zhenjia Zhou & Yuefeng Nie & Jie Xu & Libo Gao, 2023. "Stacking transfer of wafer-scale graphene-based van der Waals superlattices," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    5. Xinyu Chen & Yufeng Xie & Yaochen Sheng & Hongwei Tang & Zeming Wang & Yu Wang & Yin Wang & Fuyou Liao & Jingyi Ma & Xiaojiao Guo & Ling Tong & Hanqi Liu & Hao Liu & Tianxiang Wu & Jiaxin Cao & Sitong, 2021. "Wafer-scale functional circuits based on two dimensional semiconductors with fabrication optimized by machine learning," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    6. Seunguk Song & Aram Yoon & Jong-Kwon Ha & Jihoon Yang & Sora Jang & Chloe Leblanc & Jaewon Wang & Yeoseon Sim & Deep Jariwala & Seung Kyu Min & Zonghoon Lee & Soon-Yong Kwon, 2022. "Atomic transistors based on seamless lateral metal-semiconductor junctions with a sub-1-nm transfer length," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    7. Jun Zhou & Guitao Zhang & Wenhui Wang & Qian Chen & Weiwei Zhao & Hongwei Liu & Bei Zhao & Zhenhua Ni & Junpeng Lu, 2024. "Phase-engineered synthesis of atomically thin te single crystals with high on-state currents," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    8. Seunguk Song & Aram Yoon & Sora Jang & Jason Lynch & Jihoon Yang & Juwon Han & Myeonggi Choe & Young Ho Jin & Cindy Yueli Chen & Yeryun Cheon & Jinsung Kwak & Changwook Jeong & Hyeonsik Cheong & Deep , 2023. "Fabrication of p-type 2D single-crystalline transistor arrays with Fermi-level-tuned van der Waals semimetal electrodes," Nature Communications, Nature, vol. 14(1), pages 1-14, December.
    9. Ruoxin Wang & Jianhao Qian & Xiaofang Chen & Ze-Xian Low & Yu Chen & Hongyu Ma & Heng-An Wu & Cara M. Doherty & Durga Acharya & Zongli Xie & Matthew R. Hill & Wei Shen & Fengchao Wang & Huanting Wang, 2023. "Pyro-layered heterostructured nanosheet membrane for hydrogen separation," Nature Communications, Nature, vol. 14(1), pages 1-10, December.

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