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Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms

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  • Min-Suk Jo

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Jang-Hoon Shin

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Won-Jun Kim

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

  • Jae-Weon Jeong

    (Department of Architectural Engineering, College of Engineering, Hanyang University, 222 Wangsimni-Ro, Seongdong-Gu, Seoul 04763, Korea)

Abstract

This paper aimed to evaluate the applicability of adiabatic humidification in the heating, ventilation, and air conditioning (HVAC) systems of semiconductor cleanrooms. Accurate temperature and humidity control are essential in semiconductor cleanrooms and high energy consumption steam humidification is commonly used. Therefore, we propose an adiabatic humidification system employing a pressurized water atomizer to reduce the energy consumption. The annual energy consumption of three different HVAC systems were analyzed to evaluate the applicability of adiabatic humidification. The studied cases were as follows: (1) CASE 1: a make-up air unit (MAU) with a steam humidifier, a dry cooling coil (DCC), and a fan filter unit (FFU); (2) CASE 2: a MAU with the pressurized water atomizer, a DCC, and a FFU; and (3) CASE 3: a MAU, a DCC, and a FFU, and the pressurized water atomizer installed in the return duct. The energy saving potential of adiabatic humidification over steam humidification has been proved, with savings of 8% and 23% in CASE 2 and CASE 3 compared to CASE 1, respectively. Furthermore, the pressurized water atomizer installed in the return duct exhibits greater energy saving effect than when installed in the MAU.

Suggested Citation

  • Min-Suk Jo & Jang-Hoon Shin & Won-Jun Kim & Jae-Weon Jeong, 2017. "Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms," Energies, MDPI, vol. 10(11), pages 1-23, November.
    • Handle: RePEc:gam:jeners:v:10:y:2017:i:11:p:1774-:d:117475
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    References listed on IDEAS

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    1. Hu, S.-C. & Chuah, Y.K., 2003. "Power consumption of semiconductor fabs in Taiwan," Energy, Elsevier, vol. 28(8), pages 895-907.
    2. Duk Joon Park & Ki Hyung Yu & Yong Sang Yoon & Kee Han Kim & Sun Sook Kim, 2015. "Analysis of a Building Energy Efficiency Certification System in Korea," Sustainability, MDPI, vol. 7(12), pages 1-22, December.
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    Cited by:

    1. Zhuang, Chaoqun & Wang, Shengwei & Shan, Kui, 2019. "Probabilistic optimal design of cleanroom air-conditioning systems facilitating optimal ventilation control under uncertainties," Applied Energy, Elsevier, vol. 253(C), pages 1-1.
    2. Wang, Kung-Jeng & Lin, Chiuhsiang Joe & Dagne, Teshome Bekele & Woldegiorgis, Bereket Haile, 2022. "Bilayer stochastic optimization model for smart energy conservation systems," Energy, Elsevier, vol. 247(C).
    3. Soo-Jin Lee & Hansol Lim & Jae-Weon Jeong, 2021. "Energy Benefit of Liquid Desiccant-Assisted Humidification in Buildings during Winter Operation," Energies, MDPI, vol. 14(5), pages 1-24, March.
    4. Hsin-Chieh Wu & Horng-Ren Tsai & Tin-Chih Toly Chen & Keng-Wei Hsu, 2021. "Energy-Efficient Production Planning Using a Two-Stage Fuzzy Approach," Mathematics, MDPI, vol. 9(10), pages 1-17, May.

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