IDEAS home Printed from https://ideas.repec.org/a/eee/energy/v28y2003i8p895-907.html
   My bibliography  Save this article

Power consumption of semiconductor fabs in Taiwan

Author

Listed:
  • Hu, S.-C.
  • Chuah, Y.K.

Abstract

This paper reports and analyzes power consumption for nine representative semiconductor fabs in Taiwan. The power consumption data were obtained by surveys and site visits. Analysis results indicate that the average power consumption for the fabs is 2.18 kW/m2 and the average cooling load is 0.434 RT/m2. The average power consumption per unit product (wafer) area is 1.432 kWh/cm2, which is consistent with the data (3.1 kWh/cm2 in 1983 to 1.41 kWh/cm2 in 1995) reported by the US Department of Commerce and Dataquest. The facility system consumes the most of the power consumption (about 56.6%) of the semiconductor fabs. Process tools are the next largest power consuming item, accounting for 40.4% of the power consumed in the fabs. A facility system includes the chiller plant, makeup air, recirculation air, exhaust air, gases, compressed dry air, process cooling water, vacuum and ultra-pure water systems. The power consumption of the different facility components is analyzed and compared.

Suggested Citation

  • Hu, S.-C. & Chuah, Y.K., 2003. "Power consumption of semiconductor fabs in Taiwan," Energy, Elsevier, vol. 28(8), pages 895-907.
    • Handle: RePEc:eee:energy:v:28:y:2003:i:8:p:895-907
    DOI: 10.1016/S0360-5442(03)00008-2
    as

    Download full text from publisher

    File URL: http://www.sciencedirect.com/science/article/pii/S0360544203000082
    Download Restriction: Full text for ScienceDirect subscribers only
    File URL: https://libkey.io/10.1016/S0360-5442(03)00008-2?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Min-Suk Jo & Jang-Hoon Shin & Won-Jun Kim & Jae-Weon Jeong, 2017. "Energy-Saving Benefits of Adiabatic Humidification in the Air Conditioning Systems of Semiconductor Cleanrooms," Energies, MDPI, vol. 10(11), pages 1-23, November.
    2. Lee, Chien-Chiang & Chang, Chun-Ping, 2007. "The impact of energy consumption on economic growth: Evidence from linear and nonlinear models in Taiwan," Energy, Elsevier, vol. 32(12), pages 2282-2294.
    3. Gao, Wei & Feng, Xiao, 2017. "The power target of a fluid machinery network in a circulating water system," Applied Energy, Elsevier, vol. 205(C), pages 847-854.
    4. Chang, Yung-Chung & Chan, Tien-Shun & Lee, Wen-Shing, 2010. "Economic dispatch of chiller plant by gradient method for saving energy," Applied Energy, Elsevier, vol. 87(4), pages 1096-1101, April.
    5. Cheng-Kuang Chang & Tee Lin & Shih-Cheng Hu & Ben-Ran Fu & Jung-Sheng Hsu, 2016. "Various Energy-Saving Approaches to a TFT-LCD Panel Fab," Sustainability, MDPI, vol. 8(9), pages 1-10, September.
    6. Chang, Cheng-Kuang & Hu, Shih-Cheng & Liu, Vincent & Chan, David Yi-Liang & Huang, Chin-Yi & Weng, Ling-Chia, 2012. "Specific energy consumption of dynamic random access memory module supply chain in Taiwan," Energy, Elsevier, vol. 41(1), pages 508-513.
    7. Xu, Tengfang & Flapper, Joris & Kramer, Klaas Jan, 2009. "Characterization of energy use and performance of global cheese processing," Energy, Elsevier, vol. 34(11), pages 1993-2000.
    8. Hu, Shih-Cheng & Xu, Tengfang & Chaung, Tony & Chan, David Y.-L., 2010. "Characterization of energy use in 300 mm DRAM (Dynamic Random Access Memory) wafer fabrication plants (fabs) in Taiwan," Energy, Elsevier, vol. 35(9), pages 3788-3792.
    9. Xu, Tengfang & Flapper, Joris, 2009. "Energy use and implications for efficiency strategies in global fluid-milk processing industry," Energy Policy, Elsevier, vol. 37(12), pages 5334-5341, December.
    10. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2024. "A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance," Energy, Elsevier, vol. 286(C).
    11. Foo, Dominic C.Y. & Ng, Denny K.S. & Leong, Malwynn K.Y. & Chew, Irene M.L. & Subramaniam, Mahendran & Aziz, Ramlan & Lee, Jui-Yuan, 2014. "Targeting and design of chilled water network," Applied Energy, Elsevier, vol. 134(C), pages 589-599.
    12. Chang, Yung-Chung, 2006. "An innovative approach for demand side management—optimal chiller loading by simulated annealing," Energy, Elsevier, vol. 31(12), pages 1883-1896.
    13. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2022. "A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones," Energy, Elsevier, vol. 261(PA).
    14. Armin Ibitz, 2020. "Assessing Taiwan’s endeavors towards a circular economy: the electronics sector," Asia Europe Journal, Springer, vol. 18(4), pages 493-510, December.
    15. Mieczysław Porowski & Monika Jakubiak, 2022. "Energy-Optimal Structures of HVAC System for Cleanrooms as a Function of Key Constant Parameters and External Climate," Energies, MDPI, vol. 15(1), pages 1-41, January.
    16. Chang, Yung-Chung & Chen, Wu-Hsing, 2009. "Optimal chilled water temperature calculation of multiple chiller systems using Hopfield neural network for saving energy," Energy, Elsevier, vol. 34(4), pages 448-456.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:eee:energy:v:28:y:2003:i:8:p:895-907. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Catherine Liu (email available below). General contact details of provider: http://www.journals.elsevier.com/energy .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.