A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance
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DOI: 10.1016/j.energy.2023.129600
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- Yu, Azhi & Ye, Qing & Li, Jinlong & Li, Xinhao & Wang, Yao & Rui, Qingqing, 2024. "Economic, environmental, energy, exergy (4E) analysis and simulated annealing algorithm optimization of dividing-wall column-intensified heterogeneous azeotropic pressure-swing distillation process," Energy, Elsevier, vol. 296(C).
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Keywords
Semiconductor manufacturing; Cleanroom air-conditioning system; Design optimization; Energy efficiency; Free cooling;All these keywords.
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