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Various Energy-Saving Approaches to a TFT-LCD Panel Fab

Author

Listed:
  • Cheng-Kuang Chang

    (Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)

  • Tee Lin

    (Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)

  • Shih-Cheng Hu

    (Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)

  • Ben-Ran Fu

    (Department of Mechanical Engineering, Ming Chi University of Technology, New Taipei City 24301, Taiwan)

  • Jung-Sheng Hsu

    (Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taipei 10608, Taiwan)

Abstract

This study employs the developed simulation software for the energy use of the high-tech fabrication plant (hereafter referred as a fab) to examine six energy-saving approaches for the make-up air unit (MAU) of a TFT-LCD (thin-film transistor liquid-crystal display) fab. The studied approaches include: (1) Approach 1: adjust the set point of dry bulb temperature and relative humidity in the cleanroom; (2) Approach 2: lower the flow rate of supply air volume in the MAU; (3) Approach 3: use a draw-through type instead of push through type MAU; (4) Approach 4: combine the two stage cooling coils in MAU to a single stage coil; (5) Approach 5: reduce the original MAU exit temperature from 16.5 °C to 14.5 °C; and (6) Approach 6: avoid an excessive increase in pressure drop over the filter by replacing the HEPA filter more frequently. The simulated results are further compared to the measured data of the studied TFT-LCD fab in Taiwan. The simulated results showed that Approach 1 exhibits more significant influence on annual power consumption than the other approaches. The advantage/disadvantage of each approach is elaborated. The impact of the six approaches on the annual power consumption of the fab is also discussed.

Suggested Citation

  • Cheng-Kuang Chang & Tee Lin & Shih-Cheng Hu & Ben-Ran Fu & Jung-Sheng Hsu, 2016. "Various Energy-Saving Approaches to a TFT-LCD Panel Fab," Sustainability, MDPI, vol. 8(9), pages 1-10, September.
    • Handle: RePEc:gam:jsusta:v:8:y:2016:i:9:p:907-:d:77641
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    References listed on IDEAS

    as
    1. Ven-Shing Wang & Cheng-Fong Sie & Ta-Yuan Chang & Keh-Ping Chao, 2016. "The Evaluation of Energy Conservation Performance on Electricity: A Case Study of the TFT-LCD Optronics Industry," Energies, MDPI, vol. 9(3), pages 1-12, March.
    2. Hu, S.-C. & Chuah, Y.K., 2003. "Power consumption of semiconductor fabs in Taiwan," Energy, Elsevier, vol. 28(8), pages 895-907.
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    Cited by:

    1. Wang, Kung-Jeng & Lin, Chiuhsiang Joe & Dagne, Teshome Bekele & Woldegiorgis, Bereket Haile, 2022. "Bilayer stochastic optimization model for smart energy conservation systems," Energy, Elsevier, vol. 247(C).
    2. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2022. "A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones," Energy, Elsevier, vol. 261(PA).

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