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A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones

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  • Zhao, Wenxuan
  • Li, Hangxin
  • Wang, Shengwei

Abstract

The strict requirements on temperature, humidity and particle concentration cause cleanrooms to consume enormous energy today, with global power consumption at the same magnitude of data centers. As the most energy-intensive representative, the high-tech cleanroom consumes nearly three times as much energy as the data center, but receives far less attention. Proper design and control of air-conditioning systems for high-tech cleanrooms are key issues to reduce their energy use while ensuring the required built environment. In this study, the existing alternative air-conditioning systems for high-tech cleanrooms are categorized into three typical types according to decoupling degree. Their energy and economic performance, and applicable situations are systematically assessed and analyzed under the full range of climatic conditions using the EnergyPlus/Matlab platform. Results show that the “fully decoupled” MAU (make-up air handling unit) +DCC (dry cooling coil) +FFU (fan filter unit) system is the most energy-efficient and cost-efficient system, which can achieve 39.2–79.6% energy savings compared with the conventional coupled systems. This system also presents higher energy-saving potential in hot and mild climates, with short dynamic payback periods (<0.7 year) for retrofitting existing coupled systems. Besides, guidance and recommendations for system/site selections of large-scale high-tech manufacturing fabs are provided.

Suggested Citation

  • Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2022. "A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones," Energy, Elsevier, vol. 261(PA).
    • Handle: RePEc:eee:energy:v:261:y:2022:i:pa:s0360544222021697
    DOI: 10.1016/j.energy.2022.125284
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    References listed on IDEAS

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    Cited by:

    1. Zhao, Wenxuan & Li, Hangxin & Wang, Shengwei, 2024. "A generic design optimization framework for semiconductor cleanroom air-conditioning systems integrating heat recovery and free cooling for enhanced energy performance," Energy, Elsevier, vol. 286(C).
    2. Cai, Rong-Rong & Zhang, Li-Zhi, 2023. "Progress and perspective of polymer electret-based PM2.5 filtration: Efficiencies, regeneration, and energy implications," Energy, Elsevier, vol. 283(C).

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