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Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography

Author

Listed:
  • Zehao Dong

    (Tsinghua University)

  • Yang Zhang

    (Tsinghua University)

  • Chun-Chien Chiu

    (National Cheng Kung University)

  • Sicheng Lu

    (Tsinghua University)

  • Jianbing Zhang

    (Tsinghua University)

  • Yu-Chen Liu

    (National Cheng Kung University)

  • Suya Liu

    (ThermoFisher Scientific)

  • Jan-Chi Yang

    (National Cheng Kung University
    National Cheng Kung University)

  • Pu Yu

    (Tsinghua University)

  • Yayu Wang

    (Tsinghua University
    Frontier Science Center for Quantum Information
    Hefei National Laboratory)

  • Zhen Chen

    (Chinese Academy of Sciences
    University of Chinese Academy of Sciences)

Abstract

Real-space, three-dimensional imaging of atomic structures in materials science is a critical yet challenging task. Although scanning transmission electron microscopy has achieved sub-angstrom lateral resolution through techniques like electron ptychography, depth resolution remains limited to only 2 to 3 nanometers using single-projection setups. Attaining better depth resolution often requires large sample tilt angles and numerous projections, as demonstrated in atomic electron tomography. Here, we introduce an extension of multislice electron ptychography, which couples only a few small-angle projections to improve depth resolution by more than threefold, reaching the sub-nanometer scale and potentially approaching the atomic level. This technique maintains high resolving power for both light and heavy atoms, significantly enhancing the detection of individual dopants. We experimentally demonstrate three-dimensional visualization of dilute praseodymium dopants in a brownmillerite oxide, Ca2Co2O5, along with the accompanying lattice distortions. This approach can be implemented on widely available transmission electron microscopes equipped with hybrid pixel detectors, with data processing achievable using high-performance computing systems.

Suggested Citation

  • Zehao Dong & Yang Zhang & Chun-Chien Chiu & Sicheng Lu & Jianbing Zhang & Yu-Chen Liu & Suya Liu & Jan-Chi Yang & Pu Yu & Yayu Wang & Zhen Chen, 2025. "Sub-nanometer depth resolution and single dopant visualization achieved by tilt-coupled multislice electron ptychography," Nature Communications, Nature, vol. 16(1), pages 1-10, December.
  • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-56499-1
    DOI: 10.1038/s41467-025-56499-1
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