IDEAS home Printed from https://ideas.repec.org/a/nat/nature/v605y2022i7908d10.1038_s41586-022-04523-5.html
   My bibliography  Save this article

Uniform nucleation and epitaxy of bilayer molybdenum disulfide on sapphire

Author

Listed:
  • Lei Liu

    (Nanjing University)

  • Taotao Li

    (Nanjing University)

  • Liang Ma

    (Southeast University)

  • Weisheng Li

    (Nanjing University)

  • Si Gao

    (Nanjing University)

  • Wenjie Sun

    (Nanjing University)

  • Ruikang Dong

    (Southeast University)

  • Xilu Zou

    (Nanjing University)

  • Dongxu Fan

    (Nanjing University)

  • Liangwei Shao

    (Nanjing University)

  • Chenyi Gu

    (Nanjing University)

  • Ningxuan Dai

    (Nanjing University)

  • Zhihao Yu

    (Nanjing University of Posts and Telecommunications)

  • Xiaoqing Chen

    (Northwestern Polytechnical University)

  • Xuecou Tu

    (Nanjing University)

  • Yuefeng Nie

    (Nanjing University)

  • Peng Wang

    (Nanjing University)

  • Jinlan Wang

    (Southeast University)

  • Yi Shi

    (Nanjing University)

  • Xinran Wang

    (Nanjing University)

Abstract

Two-dimensional transition-metal dichalcogenides (TMDs) are of interest for beyond-silicon electronics1,2. It has been suggested that bilayer TMDs, which combine good electrostatic control, smaller bandgap and higher mobility than monolayers, could potentially provide improvements in the energy-delay product of transistors3–5. However, despite advances in the growth of monolayer TMDs6–14, the controlled epitaxial growth of multilayers remains a challenge15. Here we report the uniform nucleation (>99%) of bilayer molybdenum disulfide (MoS2) on c-plane sapphire. In particular, we engineer the atomic terrace height on c-plane sapphire to enable an edge-nucleation mechanism and the coalescence of MoS2 domains into continuous, centimetre-scale films. Fabricated field-effect transistor (FET) devices based on bilayer MoS2 channels show substantial improvements in mobility (up to 122.6 cm2 V−1 s−1) and variation compared with FETs based on monolayer films. Furthermore, short-channel FETs exhibit an on-state current of 1.27 mA μm−1, which exceeds the 2028 roadmap target for high-performance FETs16.

Suggested Citation

  • Lei Liu & Taotao Li & Liang Ma & Weisheng Li & Si Gao & Wenjie Sun & Ruikang Dong & Xilu Zou & Dongxu Fan & Liangwei Shao & Chenyi Gu & Ningxuan Dai & Zhihao Yu & Xiaoqing Chen & Xuecou Tu & Yuefeng N, 2022. "Uniform nucleation and epitaxy of bilayer molybdenum disulfide on sapphire," Nature, Nature, vol. 605(7908), pages 69-75, May.
  • Handle: RePEc:nat:nature:v:605:y:2022:i:7908:d:10.1038_s41586-022-04523-5
    DOI: 10.1038/s41586-022-04523-5
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41586-022-04523-5
    File Function: Abstract
    Download Restriction: Access to the full text of the articles in this series is restricted.

    File URL: https://libkey.io/10.1038/s41586-022-04523-5?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Manzhang Xu & Hongjia Ji & Lu Zheng & Weiwei Li & Jing Wang & Hanxin Wang & Lei Luo & Qianbo Lu & Xuetao Gan & Zheng Liu & Xuewen Wang & Wei Huang, 2024. "Reconfiguring nucleation for CVD growth of twisted bilayer MoS2 with a wide range of twist angles," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    2. Lutao Li & Junjie Yao & Juntong Zhu & Yuan Chen & Chen Wang & Zhicheng Zhou & Guoxiang Zhao & Sihan Zhang & Ruonan Wang & Jiating Li & Xiangyi Wang & Zheng Lu & Lingbo Xiao & Qiang Zhang & Guifu Zou, 2023. "Colloid driven low supersaturation crystallization for atomically thin Bismuth halide perovskite," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    3. Zijing Zhao & Zhi Fang & Xiaocang Han & Shiqi Yang & Cong Zhou & Yi Zeng & Biao Zhang & Wei Li & Zhan Wang & Ying Zhang & Jian Zhou & Jiadong Zhou & Yu Ye & Xinmei Hou & Xiaoxu Zhao & Song Gao & Yangl, 2023. "A general thermodynamics-triggered competitive growth model to guide the synthesis of two-dimensional nonlayered materials," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    4. Kunpeng Si & Yifan Zhao & Peng Zhang & Xingguo Wang & Qianqian He & Juntian Wei & Bixuan Li & Yongxi Wang & Aiping Cao & Zhigao Hu & Peizhe Tang & Feng Ding & Yongji Gong, 2024. "Quasi-equilibrium growth of inch-scale single-crystal monolayer α-In2Se3 on fluor-phlogopite," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    5. Xingchen Pang & Yang Wang & Yuyan Zhu & Zhenhan Zhang & Du Xiang & Xun Ge & Haoqi Wu & Yongbo Jiang & Zizheng Liu & Xiaoxian Liu & Chunsen Liu & Weida Hu & Peng Zhou, 2024. "Non-volatile rippled-assisted optoelectronic array for all-day motion detection and recognition," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    6. Jun Zhou & Guitao Zhang & Wenhui Wang & Qian Chen & Weiwei Zhao & Hongwei Liu & Bei Zhao & Zhenhua Ni & Junpeng Lu, 2024. "Phase-engineered synthesis of atomically thin te single crystals with high on-state currents," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    7. Chao Chang & Xiaowen Zhang & Weixuan Li & Quanlin Guo & Zuo Feng & Chen Huang & Yunlong Ren & Yingying Cai & Xu Zhou & Jinhuan Wang & Zhilie Tang & Feng Ding & Wenya Wei & Kaihui Liu & Xiaozhi Xu, 2024. "Remote epitaxy of single-crystal rhombohedral WS2 bilayers," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    8. Luying Song & Ying Zhao & Bingqian Xu & Ruofan Du & Hui Li & Wang Feng & Junbo Yang & Xiaohui Li & Zijia Liu & Xia Wen & Yanan Peng & Yuzhu Wang & Hang Sun & Ling Huang & Yulin Jiang & Yao Cai & Xue J, 2024. "Robust multiferroic in interfacial modulation synthesized wafer-scale one-unit-cell of chromium sulfide," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    9. Xiang Xu & Yunxin Chen & Pengbin Liu & Hao Luo & Zexin Li & Dongyan Li & Haoyun Wang & Xingyu Song & Jinsong Wu & Xing Zhou & Tianyou Zhai, 2024. "General synthesis of ionic-electronic coupled two-dimensional materials," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    10. Mengshi Yu & Congwei Tan & Yuling Yin & Junchuan Tang & Xiaoyin Gao & Hongtao Liu & Feng Ding & Hailin Peng, 2024. "Integrated 2D multi-fin field-effect transistors," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    11. Lu Li & Qinqin Wang & Fanfan Wu & Qiaoling Xu & Jinpeng Tian & Zhiheng Huang & Qinghe Wang & Xuan Zhao & Qinghua Zhang & Qinkai Fan & Xiuzhen Li & Yalin Peng & Yangkun Zhang & Kunshan Ji & Aomiao Zhi , 2024. "Epitaxy of wafer-scale single-crystal MoS2 monolayer via buffer layer control," Nature Communications, Nature, vol. 15(1), pages 1-9, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:nature:v:605:y:2022:i:7908:d:10.1038_s41586-022-04523-5. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    We have no bibliographic references for this item. You can help adding them by using this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.