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A zinc oxide resonant nano-accelerometer with ultra-high sensitivity

Author

Listed:
  • Pengfei Xu

    (Dalian University of Technology)

  • Dazhi Wang

    (Dalian University of Technology
    Dalian University of Technology
    Ningbo Institute of Dalian University of Technology
    Dalian University of Technology)

  • Jianqiao He

    (Dalian University of Technology)

  • Yichang Cui

    (Dalian University of Technology)

  • Liangkun Lu

    (Dalian University of Technology)

  • Yikang Li

    (Dalian University of Technology)

  • Xiangji Chen

    (Dalian University of Technology)

  • Chang Liu

    (Dalian University of Technology)

  • Liujia Suo

    (Dalian University of Technology)

  • Tongqun Ren

    (Dalian University of Technology)

  • Tiesheng Wang

    (Dalian University of Technology)

  • Yan Cui

    (Dalian University of Technology
    Dalian University of Technology)

Abstract

Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 μg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements.

Suggested Citation

  • Pengfei Xu & Dazhi Wang & Jianqiao He & Yichang Cui & Liangkun Lu & Yikang Li & Xiangji Chen & Chang Liu & Liujia Suo & Tongqun Ren & Tiesheng Wang & Yan Cui, 2024. "A zinc oxide resonant nano-accelerometer with ultra-high sensitivity," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-49145-9
    DOI: 10.1038/s41467-024-49145-9
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