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A μGal MOEMS gravimeter designed with free-form anti-springs

Author

Listed:
  • Shuang Wu

    (Northwestern Polytechnical University
    Northwestern Polytechnical University)

  • Wenhui Yan

    (Northwestern Polytechnical University)

  • Xiaoxu Wang

    (Northwestern Polytechnical University)

  • Qingxiong Xiao

    (Northwestern Polytechnical University)

  • Zhenshan Wang

    (Northwestern Polytechnical University)

  • Jiaxin Sun

    (Northwestern Polytechnical University)

  • Xinlong Yu

    (Northwestern Polytechnical University)

  • Yaoxian Yang

    (Northwestern Polytechnical University)

  • Qixuan Zhu

    (Northwestern Polytechnical University)

  • Guantai Yang

    (Northwestern Polytechnical University)

  • Zhongyang Yao

    (Hunan University, Yuelu District)

  • Pengfei Li

    (Northwestern Polytechnical University)

  • Chao Jiang

    (Hunan University, Yuelu District)

  • Wei Huang

    (Northwestern Polytechnical University
    Ningbo Institute of Northwestern Polytechnical University)

  • Qianbo Lu

    (Northwestern Polytechnical University
    Ningbo Institute of Northwestern Polytechnical University)

Abstract

Gravimeter measures gravitational acceleration, which is valuable for geophysical applications such as hazard forecasting and prospecting. Gravimeters have historically been large and expensive instruments. Micro-Electro-Mechanical-System gravimeters feature small size and low cost through scaling and integration, which may allow large-scale deployment. However, current Micro-Electro-Mechanical-System gravimeters face challenges in achieving ultra-high sensitivity under fabrication tolerance and limited size. Here, we demonstrate a μGal-level Micro-Opto-Electro-Mechanical-System gravimeter by combining a freeform anti-spring design and an optical readout. A multi-stage algorithmic design approach is proposed to achieve high acceleration sensitivity without making high-aspect ratio springs. An optical grating-based readout is integrated, offering pm-level displacement sensitivity. Measurements reveal that the chip-scale sensing unit achieves a resonant frequency of 1.71 Hz and acceleration-displacement sensitivity of over 95 μm/Gal with an etching aspect ratio of smaller than 400:30. The benchmark with a commercial gravimeter PET demonstrates a self-noise of 1.1 μGal Hz−1/2 at 0.5 Hz, sub-1 μGal Hz−1/2 at 0.45 Hz, and a drift rate down to 153 μGal/day. The high performance and small size of the Micro-Opto-Electro-Mechanical-System gravimeter suggest potential applications in industrial, defense, and geophysics.

Suggested Citation

  • Shuang Wu & Wenhui Yan & Xiaoxu Wang & Qingxiong Xiao & Zhenshan Wang & Jiaxin Sun & Xinlong Yu & Yaoxian Yang & Qixuan Zhu & Guantai Yang & Zhongyang Yao & Pengfei Li & Chao Jiang & Wei Huang & Qianb, 2025. "A μGal MOEMS gravimeter designed with free-form anti-springs," Nature Communications, Nature, vol. 16(1), pages 1-12, December.
  • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-57176-z
    DOI: 10.1038/s41467-025-57176-z
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    References listed on IDEAS

    as
    1. Hazel Rymer, 2016. "Gravity measurements on chips," Nature, Nature, vol. 531(7596), pages 585-586, March.
    2. Tianran Liu & Francesco Pagliano & René Veldhoven & Vadim Pogoretskiy & Yuqing Jiao & Andrea Fiore, 2020. "Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth," Nature Communications, Nature, vol. 11(1), pages 1-7, December.
    3. R. P. Middlemiss & A. Samarelli & D. J. Paul & J. Hough & S. Rowan & G. D. Hammond, 2016. "Measurement of the Earth tides with a MEMS gravimeter," Nature, Nature, vol. 531(7596), pages 614-617, March.
    4. Y. Bidel & N. Zahzam & C. Blanchard & A. Bonnin & M. Cadoret & A. Bresson & D. Rouxel & M. F. Lequentrec-Lalancette, 2018. "Absolute marine gravimetry with matter-wave interferometry," Nature Communications, Nature, vol. 9(1), pages 1-9, December.
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