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Electrostatic in-plane structural superlubric actuator

Author

Listed:
  • Xuanyu Huang

    (Tsinghua University
    Research Institute of Tsinghua University in Shenzhen)

  • Xiaojian Xiang

    (Research Institute of Tsinghua University in Shenzhen)

  • Chuang Li

    (Tsinghua University
    Tsinghua University)

  • Jinhui Nie

    (Research Institute of Tsinghua University in Shenzhen)

  • Yifan Shao

    (Tsinghua University
    Tsinghua University)

  • Zhiping Xu

    (Research Institute of Tsinghua University in Shenzhen
    Tsinghua University
    Tsinghua University)

  • Quanshui Zheng

    (Tsinghua University
    Research Institute of Tsinghua University in Shenzhen
    Tsinghua University
    Tsinghua University)

Abstract

Micro actuators are widely used in NEMS/MEMS for control and sensing. However, most are designed with suspended beams anchored at fixed points, causing two main issues: restricted actuated stroke and movement modes, and reduced lifespan due to fatigue from repeated beam deformation, contact wear and stiction. Here, we develop an electrostatic in-plane actuator leveraging structural superlubric sliding interfaces, characterized by zero wear, ultralow friction, and no fixed anchor. The actuator features a micro-scale graphite flake in structural superlubric contact with silicon dioxide tracks, reducing friction from edge defects. Using the charge injection method, the structural superlubric actuator not only achieves a maximum relative actuation stroke of 82.3% of the flake size by applying voltage to buried electrodes—3.4 times larger than previously reported, but also enables controllable reciprocating actuation by adjusting the form of the bias voltage. Additionally, no visible wear was observed at the structural superlubric interface after over 10,000 sliding cycles, indicating robust reliability. Our work presents a design concept for micro actuators with high performance and durability, potentially guiding the development of many structural superlubric micro-devices.

Suggested Citation

  • Xuanyu Huang & Xiaojian Xiang & Chuang Li & Jinhui Nie & Yifan Shao & Zhiping Xu & Quanshui Zheng, 2025. "Electrostatic in-plane structural superlubric actuator," Nature Communications, Nature, vol. 16(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-024-55078-0
    DOI: 10.1038/s41467-024-55078-0
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    References listed on IDEAS

    as
    1. Shu-Wei Liu & Hua-Ping Wang & Qiang Xu & Tian-Bao Ma & Gui Yu & Chenhui Zhang & Dechao Geng & Zhiwei Yu & Shengguang Zhang & Wenzhong Wang & Yuan-Zhong Hu & Hui Wang & Jianbin Luo, 2017. "Robust microscale superlubricity under high contact pressure enabled by graphene-coated microsphere," Nature Communications, Nature, vol. 8(1), pages 1-8, April.
    2. Xuanyu Huang & Xiaojian Xiang & Jinhui Nie & Deli Peng & Fuwei Yang & Zhanghui Wu & Haiyang Jiang & Zhiping Xu & Quanshui Zheng, 2021. "Microscale Schottky superlubric generator with high direct-current density and ultralong life," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
    3. Xuanyu Huang & Tengfei Li & Jin Wang & Kai Xia & Zipei Tan & Deli Peng & Xiaojian Xiang & Bin Liu & Ming Ma & Quanshui Zheng, 2023. "Robust microscale structural superlubricity between graphite and nanostructured surface," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    4. Xuanyu Huang & Xiaojian Xiang & Jinhui Nie & Deli Peng & Fuwei Yang & Zhanghui Wu & Haiyang Jiang & Zhiping Xu & Quanshui Zheng, 2021. "Author Correction: Microscale Schottky superlubric generator with high direct-current density and ultralong life," Nature Communications, Nature, vol. 12(1), pages 1-1, December.
    5. Oded Hod & Ernst Meyer & Quanshui Zheng & Michael Urbakh, 2018. "Structural superlubricity and ultralow friction across the length scales," Nature, Nature, vol. 563(7732), pages 485-492, November.
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