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Microcantilever-integrated photonic circuits for broadband laser beam scanning

Author

Listed:
  • Saeed Sharif Azadeh

    (Max Planck Institute of Microstructure Physics)

  • Jason C. C. Mak

    (University of Toronto, Department of Electrical and Computer Engineering)

  • Hong Chen

    (Max Planck Institute of Microstructure Physics)

  • Xianshu Luo

    (Advanced Micro Foundry Pte. Ltd.)

  • Fu-Der Chen

    (Max Planck Institute of Microstructure Physics
    University of Toronto, Department of Electrical and Computer Engineering)

  • Hongyao Chua

    (Advanced Micro Foundry Pte. Ltd.)

  • Frank Weiss

    (Max Planck Institute of Microstructure Physics)

  • Christopher Alexiev

    (University of Toronto, Department of Electrical and Computer Engineering)

  • Andrei Stalmashonak

    (Max Planck Institute of Microstructure Physics)

  • Youngho Jung

    (Max Planck Institute of Microstructure Physics)

  • John N. Straguzzi

    (Max Planck Institute of Microstructure Physics)

  • Guo-Qiang Lo

    (Advanced Micro Foundry Pte. Ltd.)

  • Wesley D. Sacher

    (Max Planck Institute of Microstructure Physics)

  • Joyce K. S. Poon

    (Max Planck Institute of Microstructure Physics
    University of Toronto, Department of Electrical and Computer Engineering)

Abstract

Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm2 areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.

Suggested Citation

  • Saeed Sharif Azadeh & Jason C. C. Mak & Hong Chen & Xianshu Luo & Fu-Der Chen & Hongyao Chua & Frank Weiss & Christopher Alexiev & Andrei Stalmashonak & Youngho Jung & John N. Straguzzi & Guo-Qiang Lo, 2023. "Microcantilever-integrated photonic circuits for broadband laser beam scanning," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
  • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-38260-8
    DOI: 10.1038/s41467-023-38260-8
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    References listed on IDEAS

    as
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    Cited by:

    1. Mark Dong & Julia M. Boyle & Kevin J. Palm & Matthew Zimmermann & Alex Witte & Andrew J. Leenheer & Daniel Dominguez & Gerald Gilbert & Matt Eichenfield & Dirk Englund, 2023. "Synchronous micromechanically resonant programmable photonic circuits," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

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