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Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Author

Listed:
  • Yiding Lin

    (Max Planck Institute of Microstructure Physics)

  • Zheng Yong

    (University of Toronto)

  • Xianshu Luo

    (Advanced Micro Foundry Pte Ltd)

  • Saeed Sharif Azadeh

    (Max Planck Institute of Microstructure Physics)

  • Jared C. Mikkelsen

    (Max Planck Institute of Microstructure Physics)

  • Ankita Sharma

    (Max Planck Institute of Microstructure Physics
    University of Toronto)

  • Hong Chen

    (Max Planck Institute of Microstructure Physics)

  • Jason C. C. Mak

    (University of Toronto)

  • Patrick Guo-Qiang Lo

    (Advanced Micro Foundry Pte Ltd)

  • Wesley D. Sacher

    (Max Planck Institute of Microstructure Physics)

  • Joyce K. S. Poon

    (Max Planck Institute of Microstructure Physics
    University of Toronto)

Abstract

Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of >60% across a record wavelength span from λ ~ 400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 ± 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.

Suggested Citation

  • Yiding Lin & Zheng Yong & Xianshu Luo & Saeed Sharif Azadeh & Jared C. Mikkelsen & Ankita Sharma & Hong Chen & Jason C. C. Mak & Patrick Guo-Qiang Lo & Wesley D. Sacher & Joyce K. S. Poon, 2022. "Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34100-3
    DOI: 10.1038/s41467-022-34100-3
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    References listed on IDEAS

    as
    1. Karan K. Mehta & Chi Zhang & Maciej Malinowski & Thanh-Long Nguyen & Martin Stadler & Jonathan P. Home, 2020. "Integrated optical multi-ion quantum logic," Nature, Nature, vol. 586(7830), pages 533-537, October.
    2. Salih Yanikgonul & Victor Leong & Jun Rong Ong & Ting Hu & Shawn Yohanes Siew & Ching Eng Png & Leonid Krivitsky, 2021. "Integrated avalanche photodetectors for visible light," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    3. R. J. Niffenegger & J. Stuart & C. Sorace-Agaskar & D. Kharas & S. Bramhavar & C. D. Bruzewicz & W. Loh & R. T. Maxson & R. McConnell & D. Reens & G. N. West & J. M. Sage & J. Chiaverini, 2020. "Integrated multi-wavelength control of an ion qubit," Nature, Nature, vol. 586(7830), pages 538-542, October.
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    Cited by:

    1. Saeed Sharif Azadeh & Jason C. C. Mak & Hong Chen & Xianshu Luo & Fu-Der Chen & Hongyao Chua & Frank Weiss & Christopher Alexiev & Andrei Stalmashonak & Youngho Jung & John N. Straguzzi & Guo-Qiang Lo, 2023. "Microcantilever-integrated photonic circuits for broadband laser beam scanning," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

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