IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v13y2022i1d10.1038_s41467-022-34100-3.html
   My bibliography  Save this article

Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform

Author

Listed:
  • Yiding Lin

    (Max Planck Institute of Microstructure Physics)

  • Zheng Yong

    (University of Toronto)

  • Xianshu Luo

    (Advanced Micro Foundry Pte Ltd)

  • Saeed Sharif Azadeh

    (Max Planck Institute of Microstructure Physics)

  • Jared C. Mikkelsen

    (Max Planck Institute of Microstructure Physics)

  • Ankita Sharma

    (Max Planck Institute of Microstructure Physics
    University of Toronto)

  • Hong Chen

    (Max Planck Institute of Microstructure Physics)

  • Jason C. C. Mak

    (University of Toronto)

  • Patrick Guo-Qiang Lo

    (Advanced Micro Foundry Pte Ltd)

  • Wesley D. Sacher

    (Max Planck Institute of Microstructure Physics)

  • Joyce K. S. Poon

    (Max Planck Institute of Microstructure Physics
    University of Toronto)

Abstract

Visible and near-infrared spectrum photonic integrated circuits are quickly becoming a key technology to address the scaling challenges in quantum information and biosensing. Thus far, integrated photonic platforms in this spectral range have lacked integrated photodetectors. Here, we report silicon nitride-on-silicon waveguide photodetectors that are monolithically integrated in a visible light photonic platform on silicon. Owing to a leaky-wave silicon nitride-on-silicon design, the devices achieved a high external quantum efficiency of >60% across a record wavelength span from λ ~ 400 nm to ~640 nm, an opto-electronic bandwidth up to 9 GHz, and an avalanche gain-bandwidth product up to 173 ± 30 GHz. As an example, a photodetector was integrated with a wavelength-tunable microring in a single chip for on-chip power monitoring.

Suggested Citation

  • Yiding Lin & Zheng Yong & Xianshu Luo & Saeed Sharif Azadeh & Jared C. Mikkelsen & Ankita Sharma & Hong Chen & Jason C. C. Mak & Patrick Guo-Qiang Lo & Wesley D. Sacher & Joyce K. S. Poon, 2022. "Monolithically integrated, broadband, high-efficiency silicon nitride-on-silicon waveguide photodetectors in a visible-light integrated photonics platform," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34100-3
    DOI: 10.1038/s41467-022-34100-3
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-022-34100-3
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-022-34100-3?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Karan K. Mehta & Chi Zhang & Maciej Malinowski & Thanh-Long Nguyen & Martin Stadler & Jonathan P. Home, 2020. "Integrated optical multi-ion quantum logic," Nature, Nature, vol. 586(7830), pages 533-537, October.
    2. R. J. Niffenegger & J. Stuart & C. Sorace-Agaskar & D. Kharas & S. Bramhavar & C. D. Bruzewicz & W. Loh & R. T. Maxson & R. McConnell & D. Reens & G. N. West & J. M. Sage & J. Chiaverini, 2020. "Integrated multi-wavelength control of an ion qubit," Nature, Nature, vol. 586(7830), pages 538-542, October.
    3. Salih Yanikgonul & Victor Leong & Jun Rong Ong & Ting Hu & Shawn Yohanes Siew & Ching Eng Png & Leonid Krivitsky, 2021. "Integrated avalanche photodetectors for visible light," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Saeed Sharif Azadeh & Jason C. C. Mak & Hong Chen & Xianshu Luo & Fu-Der Chen & Hongyao Chua & Frank Weiss & Christopher Alexiev & Andrei Stalmashonak & Youngho Jung & John N. Straguzzi & Guo-Qiang Lo, 2023. "Microcantilever-integrated photonic circuits for broadband laser beam scanning," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Joonhyuk Kwon & William J. Setzer & Michael Gehl & Nicholas Karl & Jay Van Der Wall & Ryan Law & Matthew G. Blain & Daniel Stick & Hayden J. McGuinness, 2024. "Multi-site integrated optical addressing of trapped ions," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    2. Saeed Sharif Azadeh & Jason C. C. Mak & Hong Chen & Xianshu Luo & Fu-Der Chen & Hongyao Chua & Frank Weiss & Christopher Alexiev & Andrei Stalmashonak & Youngho Jung & John N. Straguzzi & Guo-Qiang Lo, 2023. "Microcantilever-integrated photonic circuits for broadband laser beam scanning," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    3. Bogdan M. Mihalcea, 2024. "Solutions of the Mathieu–Hill Equation for a Trapped-Ion Harmonic Oscillator—A Qualitative Discussion," Mathematics, MDPI, vol. 12(19), pages 1-21, September.
    4. Zheng Li & Jin Xue & Marc Cea & Jaehwan Kim & Hao Nong & Daniel Chong & Khee Yong Lim & Elgin Quek & Rajeev J. Ram, 2023. "A sub-wavelength Si LED integrated in a CMOS platform," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    5. Spencer D. Fallek & Vikram S. Sandhu & Ryan A. McGill & John M. Gray & Holly N. Tinkey & Craig R. Clark & Kenton R. Brown, 2024. "Rapid exchange cooling with trapped ions," Nature Communications, Nature, vol. 15(1), pages 1-9, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34100-3. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.