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A large-scale microelectromechanical-systems-based silicon photonics LiDAR

Author

Listed:
  • Xiaosheng Zhang

    (University of California, Berkeley)

  • Kyungmok Kwon

    (University of California, Berkeley)

  • Johannes Henriksson

    (University of California, Berkeley)

  • Jianheng Luo

    (University of California, Berkeley)

  • Ming C. Wu

    (University of California, Berkeley)

Abstract

Three-dimensional (3D) imaging sensors allow machines to perceive, map and interact with the surrounding world1. The size of light detection and ranging (LiDAR) devices is often limited by mechanical scanners. Focal plane array-based 3D sensors are promising candidates for solid-state LiDARs because they allow electronic scanning without mechanical moving parts. However, their resolutions have been limited to 512 pixels or smaller2. In this paper, we report on a 16,384-pixel LiDAR with a wide field of view (FoV, 70° × 70°), a fine addressing resolution (0.6° × 0.6°), a narrow beam divergence (0.050° × 0.049°) and a random-access beam addressing with sub-MHz operation speed. The 128 × 128-element focal plane switch array (FPSA) of grating antennas and microelectromechanical systems (MEMS)-actuated optical switches are monolithically integrated on a 10 × 11-mm2 silicon photonic chip, where a 128 × 96 subarray is wire bonded and tested in experiments. 3D imaging with a distance resolution of 1.7 cm is achieved with frequency-modulated continuous-wave (FMCW) ranging in monostatic configuration. The FPSA can be mass-produced in complementary metal–oxide–semiconductor (CMOS) foundries, which will allow ubiquitous 3D sensors for use in autonomous cars, drones, robots and smartphones.

Suggested Citation

  • Xiaosheng Zhang & Kyungmok Kwon & Johannes Henriksson & Jianheng Luo & Ming C. Wu, 2022. "A large-scale microelectromechanical-systems-based silicon photonics LiDAR," Nature, Nature, vol. 603(7900), pages 253-258, March.
    • Handle: RePEc:nat:nature:v:603:y:2022:i:7900:d:10.1038_s41586-022-04415-8
    DOI: 10.1038/s41586-022-04415-8
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    Cited by:

    1. Saeed Sharif Azadeh & Jason C. C. Mak & Hong Chen & Xianshu Luo & Fu-Der Chen & Hongyao Chua & Frank Weiss & Christopher Alexiev & Andrei Stalmashonak & Youngho Jung & John N. Straguzzi & Guo-Qiang Lo, 2023. "Microcantilever-integrated photonic circuits for broadband laser beam scanning," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    2. Bing Chang & Teng Tan & Junting Du & Xinyue He & Yupei Liang & Zihan Liu & Chun Wang & Handing Xia & Zhaohui Wu & Jindong Wang & Kenneth K. Y. Wong & Tao Zhu & Lingjiang Kong & Bowen Li & Yunjiang Rao, 2024. "Dispersive Fourier transform based dual-comb ranging," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    3. Daniel Pérez-López & Ana Gutierrez & David Sánchez & Aitor López-Hernández & Mikel Gutierrez & Erica Sánchez-Gomáriz & Juan Fernández & Alejandro Cruz & Alberto Quirós & Zhenyun Xie & Jesús Benitez & , 2024. "General-purpose programmable photonic processor for advanced radiofrequency applications," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    4. Dong Liang & Cheng Zhang & Pengfei Zhang & Song Liu & Huijie Li & Shouzhu Niu & Ryan Z. Rao & Li Zhao & Xiaochi Chen & Hanxuan Li & Yijie Huo, 2024. "Evolution of laser technology for automotive LiDAR, an industrial viewpoint," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    5. Joel Siegel & Shinho Kim & Margaret Fortman & Chenghao Wan & Mikhail A. Kats & Philip W. C. Hon & Luke Sweatlock & Min Seok Jang & Victor Watson Brar, 2024. "Electrostatic steering of thermal emission with active metasurface control of delocalized modes," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    6. Sudip Shekhar & Wim Bogaerts & Lukas Chrostowski & John E. Bowers & Michael Hochberg & Richard Soref & Bhavin J. Shastri, 2024. "Roadmapping the next generation of silicon photonics," Nature Communications, Nature, vol. 15(1), pages 1-15, December.

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