IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v14y2023i1d10.1038_s41467-023-37163-y.html
   My bibliography  Save this article

Ultrafast 3D nanofabrication via digital holography

Author

Listed:
  • Wenqi Ouyang

    (The Chinese University of Hong Kong)

  • Xiayi Xu

    (The Chinese University of Hong Kong
    Hong Kong Science Park)

  • Wanping Lu

    (The Chinese University of Hong Kong)

  • Ni Zhao

    (The Chinese University of Hong Kong)

  • Fei Han

    (The Chinese University of Hong Kong
    Hong Kong Science Park)

  • Shih-Chi Chen

    (The Chinese University of Hong Kong
    Hong Kong Science Park
    Hong Kong Science Park)

Abstract

There has been a compelling demand of fabricating high-resolution complex three-dimensional (3D) structures in nanotechnology. While two-photon lithography (TPL) largely satisfies the need since its introduction, its low writing speed and high cost make it impractical for many large-scale applications. We report a digital holography-based TPL platform that realizes parallel printing with up to 2000 individually programmable laser foci to fabricate complex 3D structures with 90 nm resolution. This effectively improves the fabrication rate to 2,000,000 voxels/sec. The promising result is enabled by the polymerization kinetics under a low-repetition-rate regenerative laser amplifier, where the smallest features are defined via a single laser pulse at 1 kHz. We have fabricated large-scale metastructures and optical devices of up to centimeter-scale to validate the predicted writing speed, resolution, and cost. The results confirm our method provides an effective solution for scaling up TPL for applications beyond laboratory prototyping.

Suggested Citation

  • Wenqi Ouyang & Xiayi Xu & Wanping Lu & Ni Zhao & Fei Han & Shih-Chi Chen, 2023. "Ultrafast 3D nanofabrication via digital holography," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-37163-y
    DOI: 10.1038/s41467-023-37163-y
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-023-37163-y
    File Function: Abstract
    Download Restriction: no
    File URL: https://libkey.io/10.1038/s41467-023-37163-y?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Cameron Crook & Jens Bauer & Anna Guell Izard & Cristine Santos de Oliveira & Juliana Martins de Souza e Silva & Jonathan B. Berger & Lorenzo Valdevit, 2020. "Plate-nanolattices at the theoretical limit of stiffness and strength," Nature Communications, Nature, vol. 11(1), pages 1-11, December.
    2. Qiang Geng & Dien Wang & Pengfei Chen & Shih-Chi Chen, 2019. "Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization," Nature Communications, Nature, vol. 10(1), pages 1-7, December.
    3. Yejing Liu & Hao Wang & Jinfa Ho & Ryan C. Ng & Ray J. H. Ng & Valerian H. Hall-Chen & Eleen H. H. Koay & Zhaogang Dong & Hailong Liu & Cheng-Wei Qiu & Julia R. Greer & Joel K. W. Yang, 2019. "Structural color three-dimensional printing by shrinking photonic crystals," Nature Communications, Nature, vol. 10(1), pages 1-8, December.
    4. John H. Martin & Brennan D. Yahata & Jacob M. Hundley & Justin A. Mayer & Tobias A. Schaedler & Tresa M. Pollock, 2017. "3D printing of high-strength aluminium alloys," Nature, Nature, vol. 549(7672), pages 365-369, September.
    5. Martin Regehly & Yves Garmshausen & Marcus Reuter & Niklas F. König & Eric Israel & Damien P. Kelly & Chun-Yu Chou & Klaas Koch & Baraa Asfari & Stefan Hecht, 2020. "Xolography for linear volumetric 3D printing," Nature, Nature, vol. 588(7839), pages 620-624, December.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Maria Isabel Álvarez-Castaño & Andreas Gejl Madsen & Jorge Madrid-Wolff & Viola Sgarminato & Antoine Boniface & Jesper Glückstad & Christophe Moser, 2025. "Holographic tomographic volumetric additive manufacturing," Nature Communications, Nature, vol. 16(1), pages 1-15, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Anyu Shang & Benjamin Stegman & Kenyi Choy & Tongjun Niu & Chao Shen & Zhongxia Shang & Xuanyu Sheng & Jack Lopez & Luke Hoppenrath & Bohua Peter Zhang & Haiyan Wang & Pascal Bellon & Xinghang Zhang, 2024. "Additive manufacturing of an ultrastrong, deformable Al alloy with nanoscale intermetallics," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    2. Akane Wakai & Jenniffer Bustillos & Noah Sargent & Jamesa L. Stokes & Wei Xiong & Timothy M. Smith & Atieh Moridi, 2025. "Harnessing metastability for grain size control in multiprincipal element alloys during additive manufacturing," Nature Communications, Nature, vol. 16(1), pages 1-10, December.
    3. Yannick Naunheim & Christopher A. Schuh, 2024. "Multicomponent alloys designed to sinter," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    4. Keliang Liu & Haibo Ding & Sen Li & Yanfang Niu & Yi Zeng & Junning Zhang & Xin Du & Zhongze Gu, 2022. "3D printing colloidal crystal microstructures via sacrificial-scaffold-mediated two-photon lithography," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    5. Sarah L. Walden & Leona L. Rodrigues & Jessica Alves & James P. Blinco & Vinh X. Truong & Christopher Barner-Kowollik, 2022. "Two-colour light activated covalent bond formation," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    6. Marloes H. Bistervels & Balázs Antalicz & Marko Kamp & Hinco Schoenmaker & Willem L. Noorduin, 2023. "Light-driven nucleation, growth, and patterning of biorelevant crystals using resonant near-infrared laser heating," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    7. Antony Orth & Daniel Webber & Yujie Zhang & Kathleen L. Sampson & Hendrick W. Haan & Thomas Lacelle & Rene Lam & Daphene Solis & Shyamaleeswari Dayanandan & Taylor Waddell & Tasha Lewis & Hayden K. Ta, 2023. "Deconvolution volumetric additive manufacturing," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    8. Feng Jin & Jie Liu & Yuan-Yuan Zhao & Xian-Zi Dong & Mei-Ling Zheng & Xuan-Ming Duan, 2022. "λ/30 inorganic features achieved by multi-photon 3D lithography," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    9. Zhang, Jingjing & Wang, Biao & Jin, Junhong & Yang, Shenglin & Li, Guang, 2022. "A review of the microporous layer in proton exchange membrane fuel cells: Materials and structural designs based on water transport mechanism," Renewable and Sustainable Energy Reviews, Elsevier, vol. 156(C).
    10. Yuze Huang & Tristan G. Fleming & Samuel J. Clark & Sebastian Marussi & Kamel Fezzaa & Jeyan Thiyagalingam & Chu Lun Alex Leung & Peter D. Lee, 2022. "Keyhole fluctuation and pore formation mechanisms during laser powder bed fusion additive manufacturing," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    11. Geon Yeong Kim & Shinho Kim & Ki Hyun Park & Hanhwi Jang & Moohyun Kim & Tae Won Nam & Kyeong Min Song & Hongjoo Shin & Yemin Park & Yeongin Cho & Jihyeon Yeom & Min-Jae Choi & Min Seok Jang & Yeon Si, 2024. "Chiral 3D structures through multi-dimensional transfer printing of multilayer quantum dot patterns," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    12. Jingqi Zhang & Yingang Liu & Gang Sha & Shenbao Jin & Ziyong Hou & Mohamad Bayat & Nan Yang & Qiyang Tan & Yu Yin & Shiyang Liu & Jesper Henri Hattel & Matthew Dargusch & Xiaoxu Huang & Ming-Xing Zhan, 2022. "Designing against phase and property heterogeneities in additively manufactured titanium alloys," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    13. Zhongyuan Li & Ayush Bhardwaj & Jinlong He & Wenxin Zhang & Thomas T. Tran & Ying Li & Andrew McClung & Sravya Nuguri & James J. Watkins & Seok-Woo Lee, 2024. "Nanoporous amorphous carbon nanopillars with lightweight, ultrahigh strength, large fracture strain, and high damping capability," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    14. Michael G. Taylor & Daniel J. Burrill & Jan Janssen & Enrique R. Batista & Danny Perez & Ping Yang, 2023. "Architector for high-throughput cross-periodic table 3D complex building," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    15. Valentin A. Bobrin & Yin Yao & Xiaobing Shi & Yuan Xiu & Jin Zhang & Nathaniel Corrigan & Cyrille Boyer, 2022. "Nano- to macro-scale control of 3D printed materials via polymerization induced microphase separation," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    16. Mahdi Derayatifar & Mohsen Habibi & Rama Bhat & Muthukumaran Packirisamy, 2024. "Holographic direct sound printing," Nature Communications, Nature, vol. 15(1), pages 1-14, December.
    17. Zhongji Sun & Yan Ma & Dirk Ponge & Stefan Zaefferer & Eric A. Jägle & Baptiste Gault & Anthony D. Rollett & Dierk Raabe, 2022. "Thermodynamics-guided alloy and process design for additive manufacturing," Nature Communications, Nature, vol. 13(1), pages 1-12, December.
    18. Ashkenazi, Dana, 2019. "How aluminum changed the world: A metallurgical revolution through technological and cultural perspectives," Technological Forecasting and Social Change, Elsevier, vol. 143(C), pages 101-113.
    19. Xianglong Lyu & Zhiqiang Zheng & Anitha Shiva & Mertcan Han & Cem Balda Dayan & Mingchao Zhang & Metin Sitti, 2024. "Capillary trapping of various nanomaterials on additively manufactured scaffolds for 3D micro-/nanofabrication," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    20. Yu Zhang & Lidian Zhang & Chengqi Zhang & Jingxia Wang & Junchao Liu & Changqing Ye & Zhichao Dong & Lei Wu & Yanlin Song, 2022. "Continuous resin refilling and hydrogen bond synergistically assisted 3D structural color printing," Nature Communications, Nature, vol. 13(1), pages 1-11, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-37163-y. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.