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Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization

Author

Listed:
  • Qiang Geng

    (The Chinese University of Hong Kong)

  • Dien Wang

    (The Chinese University of Hong Kong)

  • Pengfei Chen

    (The Chinese University of Hong Kong)

  • Shih-Chi Chen

    (The Chinese University of Hong Kong)

Abstract

Two-photon polymerization (TPP) is the most precise 3-D printing process that has been used to create many complex structures for advanced photonic and nanoscale applications. However, to date the technology still remains a laboratory tool due to its high operation cost and limited fabrication rate, i.e., serial laser scanning process. Here we present a revolutionary laser nanofabrication process based on TPP and an ultrafast random-access digital micromirror device (DMD) scanner. By exploiting binary holography, the DMD scanner can simultaneously generate and individually control one to tens of laser foci for parallel nanofabrication at 22.7 kHz. Complex 3-D trusses and woodpile structures have been fabricated via single or multi-focus processes, showing a resolution of ~500 nm. The nanofabrication system may be used for largescale nano-prototyping or creation of complex structures, e.g., overhanging structures, that cannot be easily fabricated via conventional raster-scanning-based systems, bringing significant impact to the world of nanomanufacturing.

Suggested Citation

  • Qiang Geng & Dien Wang & Pengfei Chen & Shih-Chi Chen, 2019. "Ultrafast multi-focus 3-D nano-fabrication based on two-photon polymerization," Nature Communications, Nature, vol. 10(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:10:y:2019:i:1:d:10.1038_s41467-019-10249-2
    DOI: 10.1038/s41467-019-10249-2
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    Cited by:

    1. Valentin A. Bobrin & Yin Yao & Xiaobing Shi & Yuan Xiu & Jin Zhang & Nathaniel Corrigan & Cyrille Boyer, 2022. "Nano- to macro-scale control of 3D printed materials via polymerization induced microphase separation," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    2. Wenqi Ouyang & Xiayi Xu & Wanping Lu & Ni Zhao & Fei Han & Shih-Chi Chen, 2023. "Ultrafast 3D nanofabrication via digital holography," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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