A sequential resampling approach for imbalanced batch process fault detection in semiconductor manufacturing
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DOI: 10.1007/s10845-020-01716-5
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- Maroua Said & Khaoula ben Abdellafou & Okba Taouali, 2020. "Machine learning technique for data-driven fault detection of nonlinear processes," Journal of Intelligent Manufacturing, Springer, vol. 31(4), pages 865-884, April.
- Qifa Xu & Shixiang Lu & Weiyin Jia & Cuixia Jiang, 2020. "Imbalanced fault diagnosis of rotating machinery via multi-domain feature extraction and cost-sensitive learning," Journal of Intelligent Manufacturing, Springer, vol. 31(6), pages 1467-1481, August.
- Qianhui Wu & Keqin Ding & Biqing Huang, 2020. "Approach for fault prognosis using recurrent neural network," Journal of Intelligent Manufacturing, Springer, vol. 31(7), pages 1621-1633, October.
- Durga Prasad Penumuru & Sreekumar Muthuswamy & Premkumar Karumbu, 2020. "Identification and classification of materials using machine vision and machine learning in the context of industry 4.0," Journal of Intelligent Manufacturing, Springer, vol. 31(5), pages 1229-1241, June.
- Zhenyu Liu & Donghao Zhang & Weiqiang Jia & Xianke Lin & Hui Liu, 2020. "An adversarial bidirectional serial–parallel LSTM-based QTD framework for product quality prediction," Journal of Intelligent Manufacturing, Springer, vol. 31(6), pages 1511-1529, August.
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Keywords
Fault detection; Imbalanced classification; Variational auto-encoders (VAEs); Batch process monitoring; Semiconductor manufacturing;All these keywords.
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