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Light and matter co-confined multi-photon lithography

Author

Listed:
  • Lingling Guan

    (Zhejiang Lab)

  • Chun Cao

    (Zhejiang University
    Hangzhou Dianzi University)

  • Xi Liu

    (Zhejiang Lab)

  • Qiulan Liu

    (Zhejiang Lab)

  • Yiwei Qiu

    (Zhejiang Lab)

  • Xiaobing Wang

    (Zhejiang Lab)

  • Zhenyao Yang

    (Zhejiang Lab)

  • Huiying Lai

    (Zhejiang Lab)

  • Qiuyuan Sun

    (Zhejiang Lab)

  • Chenliang Ding

    (Zhejiang Lab)

  • Dazhao Zhu

    (Zhejiang Lab)

  • Cuifang Kuang

    (Zhejiang University
    ZJU-Hangzhou Global Scientific and Technological Innovation Center)

  • Xu Liu

    (Zhejiang University
    ZJU-Hangzhou Global Scientific and Technological Innovation Center)

Abstract

Mask-free multi-photon lithography enables the fabrication of arbitrary nanostructures low cost and more accessible than conventional lithography. A major challenge for multi-photon lithography is to achieve ultra-high precision and desirable lateral resolution due to the inevitable optical diffraction barrier and proximity effect. Here, we show a strategy, light and matter co-confined multi-photon lithography, to overcome the issues via combining photo-inhibition and chemical quenchers. We deeply explore the quenching mechanism and photoinhibition mechanism for light and matter co-confined multiphoton lithography. Besides, mathematical modeling helps us better understand that the synergy of quencher and photo-inhibition can gain a narrowest distribution of free radicals. By using light and matter co-confined multiphoton lithography, we gain a 30 nm critical dimension and 100 nm lateral resolution, which further decrease the gap with conventional lithography.

Suggested Citation

  • Lingling Guan & Chun Cao & Xi Liu & Qiulan Liu & Yiwei Qiu & Xiaobing Wang & Zhenyao Yang & Huiying Lai & Qiuyuan Sun & Chenliang Ding & Dazhao Zhu & Cuifang Kuang & Xu Liu, 2024. "Light and matter co-confined multi-photon lithography," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-46743-5
    DOI: 10.1038/s41467-024-46743-5
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    References listed on IDEAS

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    1. Satoshi Kawata & Hong-Bo Sun & Tomokazu Tanaka & Kenji Takada, 2001. "Finer features for functional microdevices," Nature, Nature, vol. 412(6848), pages 697-698, August.
    2. Yejing Liu & Hao Wang & Jinfa Ho & Ryan C. Ng & Ray J. H. Ng & Valerian H. Hall-Chen & Eleen H. H. Koay & Zhaogang Dong & Hailong Liu & Cheng-Wei Qiu & Julia R. Greer & Joel K. W. Yang, 2019. "Structural color three-dimensional printing by shrinking photonic crystals," Nature Communications, Nature, vol. 10(1), pages 1-8, December.
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