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Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions

Author

Listed:
  • Maxim R. Shcherbakov

    (University of California
    University of California)

  • Giovanni Sartorello

    (Cornell University
    Cornell University)

  • Simin Zhang

    (The Ohio State University)

  • Joshua Bocanegra

    (University of California
    University of California)

  • Melissa Bosch

    (Cornell University
    Cornell University)

  • Michael Tripepi

    (Hillsdale College
    The Ohio State University)

  • Noah Talisa

    (The Ohio State University
    Johns Hopkins University Applied Physics Laboratory)

  • Abdallah AlShafey

    (The Ohio State University)

  • Joseph Smith

    (Marietta College)

  • Stephen Londo

    (Advanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique)

  • François Légaré

    (Advanced Laser Light Source (ALLS) at Centre Énergie Matériaux Télécommunications, Institut national de la recherche scientifique)

  • Enam Chowdhury

    (The Ohio State University
    The Ohio State University
    The Ohio State University)

  • Gennady Shvets

    (Cornell University)

Abstract

Femtosecond-laser-assisted material restructuring employs extreme optical intensities to localize the ablation regions. To overcome the minimum feature size limit set by the wave nature of photons, there is a need for new approaches to tailored material processing at the nanoscale. Here, we report the formation of deeply-subwavelength features in silicon, enabled by localized laser-induced phase explosions in prefabricated silicon resonators. Using short trains of mid-infrared laser pulses, we demonstrate the controllable formation of high aspect ratio (>10:1) nanotrenches as narrow as $${\sim }{{{{{\boldsymbol{\lambda }}}}}}{{{{{\boldsymbol{/}}}}}}{{{{{\boldsymbol{80}}}}}}$$ ~ λ / 80 . The trench geometry is shown to be scalable with wavelength, and controlled by multiple parameters of the laser pulse train, such as the intensity and polarization of each laser pulse and their total number. Particle-in-cell simulations reveal localized heating of silicon beyond its boiling point and suggest its subsequent phase explosion on the nanoscale commensurate with the experimental data. The observed femtosecond-laser assisted nanostructuring of engineered microstructures (FLANEM) expands the nanofabrication toolbox and opens exciting opportunities for high-throughput optical methods of nanoscale structuring of solid materials.

Suggested Citation

  • Maxim R. Shcherbakov & Giovanni Sartorello & Simin Zhang & Joshua Bocanegra & Melissa Bosch & Michael Tripepi & Noah Talisa & Abdallah AlShafey & Joseph Smith & Stephen Londo & François Légaré & Enam , 2023. "Nanoscale reshaping of resonant dielectric microstructures by light-driven explosions," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
  • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-42263-w
    DOI: 10.1038/s41467-023-42263-w
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    References listed on IDEAS

    as
    1. Satoshi Kawata & Hong-Bo Sun & Tomokazu Tanaka & Kenji Takada, 2001. "Finer features for functional microdevices," Nature, Nature, vol. 412(6848), pages 697-698, August.
    2. Maxim R. Shcherbakov & Kevin Werner & Zhiyuan Fan & Noah Talisa & Enam Chowdhury & Gennady Shvets, 2019. "Photon acceleration and tunable broadband harmonics generation in nonlinear time-dependent metasurfaces," Nature Communications, Nature, vol. 10(1), pages 1-9, December.
    3. A. Rousse & C. Rischel & S. Fourmaux & I. Uschmann & S. Sebban & G. Grillon & Ph. Balcou & E. Förster & J.P. Geindre & P. Audebert & J.C. Gauthier & D. Hulin, 2001. "Non-thermal melting in semiconductors measured at femtosecond resolution," Nature, Nature, vol. 410(6824), pages 65-68, March.
    4. Mehmet Fatih Yanik & Hulusi Cinar & Hediye Nese Cinar & Andrew D. Chisholm & Yishi Jin & Adela Ben-Yakar, 2004. "Functional regeneration after laser axotomy," Nature, Nature, vol. 432(7019), pages 822-822, December.
    5. Maxim R. Shcherbakov & Haizhong Zhang & Michael Tripepi & Giovanni Sartorello & Noah Talisa & Abdallah AlShafey & Zhiyuan Fan & Justin Twardowski & Leonid A. Krivitsky & Arseniy I. Kuznetsov & Enam Ch, 2021. "Generation of even and odd high harmonics in resonant metasurfaces using single and multiple ultra-intense laser pulses," Nature Communications, Nature, vol. 12(1), pages 1-6, December.
    6. Urs Zywietz & Andrey B. Evlyukhin & Carsten Reinhardt & Boris N. Chichkov, 2014. "Laser printing of silicon nanoparticles with resonant optical electric and magnetic responses," Nature Communications, Nature, vol. 5(1), pages 1-7, May.
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