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Demonstration of an AI-driven workflow for autonomous high-resolution scanning microscopy

Author

Listed:
  • Saugat Kandel

    (Argonne National Laboratory)

  • Tao Zhou

    (Argonne National Laboratory)

  • Anakha V. Babu

    (KLA Corporation)

  • Zichao Di

    (Argonne National Laboratory)

  • Xinxin Li

    (Argonne National Laboratory
    University of Chicago)

  • Xuedan Ma

    (Argonne National Laboratory
    University of Chicago)

  • Martin Holt

    (Argonne National Laboratory)

  • Antonino Miceli

    (Argonne National Laboratory)

  • Charudatta Phatak

    (Argonne National Laboratory)

  • Mathew J. Cherukara

    (Argonne National Laboratory)

Abstract

Modern scanning microscopes can image materials with up to sub-atomic spatial and sub-picosecond time resolutions, but these capabilities come with large volumes of data, which can be difficult to store and analyze. We report the Fast Autonomous Scanning Toolkit (FAST) that addresses this challenge by combining a neural network, route optimization, and efficient hardware controls to enable a self-driving experiment that actively identifies and measures a sparse but representative data subset in lieu of the full dataset. FAST requires no prior information about the sample, is computationally efficient, and uses generic hardware controls with minimal experiment-specific wrapping. We test FAST in simulations and a dark-field X-ray microscopy experiment of a WSe2 film. Our studies show that a FAST scan of

Suggested Citation

  • Saugat Kandel & Tao Zhou & Anakha V. Babu & Zichao Di & Xinxin Li & Xuedan Ma & Martin Holt & Antonino Miceli & Charudatta Phatak & Mathew J. Cherukara, 2023. "Demonstration of an AI-driven workflow for autonomous high-resolution scanning microscopy," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-40339-1
    DOI: 10.1038/s41467-023-40339-1
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    References listed on IDEAS

    as
    1. S. B. Damelin & N. S. Hoang, 2018. "On Surface Completion and Image Inpainting by Biharmonic Functions: Numerical Aspects," International Journal of Mathematics and Mathematical Sciences, Hindawi, vol. 2018, pages 1-8, February.
    2. Mirko Holler & Manuel Guizar-Sicairos & Esther H. R. Tsai & Roberto Dinapoli & Elisabeth Müller & Oliver Bunk & Jörg Raabe & Gabriel Aeppli, 2017. "High-resolution non-destructive three-dimensional imaging of integrated circuits," Nature, Nature, vol. 543(7645), pages 402-406, March.
    3. Benjamin Burger & Phillip M. Maffettone & Vladimir V. Gusev & Catherine M. Aitchison & Yang Bai & Xiaoyan Wang & Xiaobo Li & Ben M. Alston & Buyi Li & Rob Clowes & Nicola Rankin & Brandon Harris & Rei, 2020. "A mobile robotic chemist," Nature, Nature, vol. 583(7815), pages 237-241, July.
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