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High-resolution non-destructive three-dimensional imaging of integrated circuits

Author

Listed:
  • Mirko Holler

    (Paul Scherrer Institut)

  • Manuel Guizar-Sicairos

    (Paul Scherrer Institut)

  • Esther H. R. Tsai

    (Paul Scherrer Institut)

  • Roberto Dinapoli

    (Paul Scherrer Institut)

  • Elisabeth Müller

    (Paul Scherrer Institut)

  • Oliver Bunk

    (Paul Scherrer Institut)

  • Jörg Raabe

    (Paul Scherrer Institut)

  • Gabriel Aeppli

    (Paul Scherrer Institut
    ETH Zürich
    Institut de Physique, EPFL)

Abstract

A recently developed computational imaging technique, X-ray ptychographic tomography, is used to study integrated circuits, and a 3D image of a processor chip with a resolution of 14.6 nm is obtained.

Suggested Citation

  • Mirko Holler & Manuel Guizar-Sicairos & Esther H. R. Tsai & Roberto Dinapoli & Elisabeth Müller & Oliver Bunk & Jörg Raabe & Gabriel Aeppli, 2017. "High-resolution non-destructive three-dimensional imaging of integrated circuits," Nature, Nature, vol. 543(7645), pages 402-406, March.
    • Handle: RePEc:nat:nature:v:543:y:2017:i:7645:d:10.1038_nature21698
    DOI: 10.1038/nature21698
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    Cited by:

    1. Miaoqi Chu & Zhang Jiang & Michael Wojcik & Tao Sun & Michael Sprung & Jin Wang, 2023. "Probing three-dimensional mesoscopic interfacial structures in a single view using multibeam X-ray coherent surface scattering and holography imaging," Nature Communications, Nature, vol. 14(1), pages 1-13, December.
    2. Carles Bosch & Tobias Ackels & Alexandra Pacureanu & Yuxin Zhang & Christopher J. Peddie & Manuel Berning & Norman Rzepka & Marie-Christine Zdora & Isabell Whiteley & Malte Storm & Anne Bonnin & Chris, 2022. "Functional and multiscale 3D structural investigation of brain tissue through correlative in vivo physiology, synchrotron microtomography and volume electron microscopy," Nature Communications, Nature, vol. 13(1), pages 1-16, December.
    3. Zong-Lin Li & Kun Chen & Fei Li & Zhi-Jun Shi & Qi-Li Sun & Peng-Qi Li & Yu-Gui Peng & Lai-Xin Huang & Guang Yang & Hairong Zheng & Xue-Feng Zhu, 2023. "Decorated bacteria-cellulose ultrasonic metasurface," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    4. Saugat Kandel & Tao Zhou & Anakha V. Babu & Zichao Di & Xinxin Li & Xuedan Ma & Martin Holt & Antonino Miceli & Charudatta Phatak & Mathew J. Cherukara, 2023. "Demonstration of an AI-driven workflow for autonomous high-resolution scanning microscopy," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    5. Anakha V. Babu & Tao Zhou & Saugat Kandel & Tekin Bicer & Zhengchun Liu & William Judge & Daniel J. Ching & Yi Jiang & Sinisa Veseli & Steven Henke & Ryan Chard & Yudong Yao & Ekaterina Sirazitdinova , 2023. "Deep learning at the edge enables real-time streaming ptychographic imaging," Nature Communications, Nature, vol. 14(1), pages 1-9, December.

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