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Probing three-dimensional mesoscopic interfacial structures in a single view using multibeam X-ray coherent surface scattering and holography imaging

Author

Listed:
  • Miaoqi Chu

    (X-ray Science Division, Argonne National Laboratory)

  • Zhang Jiang

    (X-ray Science Division, Argonne National Laboratory)

  • Michael Wojcik

    (X-ray Science Division, Argonne National Laboratory)

  • Tao Sun

    (X-ray Science Division, Argonne National Laboratory
    University of Virginia)

  • Michael Sprung

    (Deutsches Elektronen-Synchrotron (DESY))

  • Jin Wang

    (X-ray Science Division, Argonne National Laboratory)

Abstract

Visualizing surface-supported and buried planar mesoscale structures, such as nanoelectronics, ultrathin-film quantum dots, photovoltaics, and heterogeneous catalysts, often requires high-resolution X-ray imaging and scattering. Here, we discovered that multibeam scattering in grazing-incident reflection geometry is sensitive to three-dimensional (3D) structures in a single view, which is difficult in conventional scattering or imaging approaches. We developed a 3D finite-element-based multibeam-scattering analysis to decode the heterogeneous electric-field distribution and to faithfully reproduce the complex scattering and surface features. This approach further leads to the demonstration of hard-X-ray Lloyd’s mirror interference of scattering waves, resembling dark-field, high-contrast surface holography under the grazing-angle scattering conditions. A first-principles calculation of the single-view holographic images resolves the surface patterns’ 3D morphology with nanometer resolutions, which is critical for ultrafine nanocircuit metrology. The holographic method and simulations pave the way for single-shot structural characterization for visualizing irreversible and morphology-transforming physical and chemical processes in situ or operando.

Suggested Citation

  • Miaoqi Chu & Zhang Jiang & Michael Wojcik & Tao Sun & Michael Sprung & Jin Wang, 2023. "Probing three-dimensional mesoscopic interfacial structures in a single view using multibeam X-ray coherent surface scattering and holography imaging," Nature Communications, Nature, vol. 14(1), pages 1-13, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-39984-3
    DOI: 10.1038/s41467-023-39984-3
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