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Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency

Author

Listed:
  • Jinhui Zhang

    (Xiamen University)

  • Haimin Yao

    (The Hong Kong Polytechnic University, Hung Hom, Kowloon)

  • Jiaying Mo

    (City University of Hong Kong
    Hong Kong Centre for Cerebro-Caradiovasular Health Engineering (COCHE))

  • Songyue Chen

    (Xiamen University)

  • Yu Xie

    (Xiamen University)

  • Shenglin Ma

    (Xiamen University)

  • Rui Chen

    (Xiamen University)

  • Tao Luo

    (Xiamen University)

  • Weisong Ling

    (Xiamen University)

  • Lifeng Qin

    (Xiamen University)

  • Zuankai Wang

    (City University of Hong Kong)

  • Wei Zhou

    (Xiamen University)

Abstract

Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.

Suggested Citation

  • Jinhui Zhang & Haimin Yao & Jiaying Mo & Songyue Chen & Yu Xie & Shenglin Ma & Rui Chen & Tao Luo & Weisong Ling & Lifeng Qin & Zuankai Wang & Wei Zhou, 2022. "Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-32827-7
    DOI: 10.1038/s41467-022-32827-7
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    References listed on IDEAS

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    Cited by:

    1. Ningning Bai & Yiheng Xue & Shuiqing Chen & Lin Shi & Junli Shi & Yuan Zhang & Xingyu Hou & Yu Cheng & Kaixi Huang & Weidong Wang & Jin Zhang & Yuan Liu & Chuan Fei Guo, 2023. "A robotic sensory system with high spatiotemporal resolution for texture recognition," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    2. Nan Li & Yingxin Zhou & Yuqing Li & Chunwei Li & Wentao Xiang & Xueqing Chen & Pan Zhang & Qi Zhang & Jun Su & Bohao Jin & Huize Song & Cai Cheng & Minghui Guo & Lei Wang & Jing Liu, 2024. "Transformable 3D curved high-density liquid metal coils – an integrated unit for general soft actuation, sensing and communication," Nature Communications, Nature, vol. 15(1), pages 1-13, December.
    3. Rui Chen & Tao Luo & Jincheng Wang & Renpeng Wang & Chen Zhang & Yu Xie & Lifeng Qin & Haimin Yao & Wei Zhou, 2023. "Nonlinearity synergy: An elegant strategy for realizing high-sensitivity and wide-linear-range pressure sensing," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    4. Liuting Shan & Qizhen Chen & Rengjian Yu & Changsong Gao & Lujian Liu & Tailiang Guo & Huipeng Chen, 2023. "A sensory memory processing system with multi-wavelength synaptic-polychromatic light emission for multi-modal information recognition," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    5. Qian Mao & Zijian Liao & Jinfeng Yuan & Rong Zhu, 2024. "Multimodal tactile sensing fused with vision for dexterous robotic housekeeping," Nature Communications, Nature, vol. 15(1), pages 1-12, December.

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