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Centimeter-scale nanomechanical resonators with low dissipation

Author

Listed:
  • Andrea Cupertino

    (Delft University of Technology)

  • Dongil Shin

    (Delft University of Technology
    Delft University of Technology)

  • Leo Guo

    (Delft University of Technology)

  • Peter G. Steeneken

    (Delft University of Technology
    Delft University of Technology)

  • Miguel A. Bessa

    (Brown University)

  • Richard A. Norte

    (Delft University of Technology
    Delft University of Technology)

Abstract

High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies – comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.

Suggested Citation

  • Andrea Cupertino & Dongil Shin & Leo Guo & Peter G. Steeneken & Miguel A. Bessa & Richard A. Norte, 2024. "Centimeter-scale nanomechanical resonators with low dissipation," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
  • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-48183-7
    DOI: 10.1038/s41467-024-48183-7
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    References listed on IDEAS

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