IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v12y2021i1d10.1038_s41467-021-26353-1.html
   My bibliography  Save this article

Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators

Author

Listed:
  • Stefano Stassi

    (Politecnico di Torino)

  • Ido Cooperstein

    (Casali Center for Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem)

  • Mauro Tortello

    (Politecnico di Torino)

  • Candido Fabrizio Pirri

    (Politecnico di Torino)

  • Shlomo Magdassi

    (Casali Center for Applied Chemistry, Institute of Chemistry, The Hebrew University of Jerusalem)

  • Carlo Ricciardi

    (Politecnico di Torino)

Abstract

The extreme miniaturization in NEMS resonators offers the possibility to reach an unprecedented resolution in high-performance mass sensing. These very low limits of detection are related to the combination of two factors: a small resonator mass and a high quality factor. The main drawback of NEMS is represented by the highly complex, multi-steps, and expensive fabrication processes. Several alternatives fabrication processes have been exploited, but they are still limited to MEMS range and very low-quality factor. Here we report the fabrication of rigid NEMS resonators with high-quality factors by a 3D printing approach. After a thermal step, we reach complex geometry printed devices composed of ceramic structures with high Young’s modulus and low damping showing performances in line with silicon-based NEMS resonators ones. We demonstrate the possibility of rapid fabrication of NEMS devices that present an effective alternative to semiconducting resonators as highly sensitive mass and force sensors.

Suggested Citation

  • Stefano Stassi & Ido Cooperstein & Mauro Tortello & Candido Fabrizio Pirri & Shlomo Magdassi & Carlo Ricciardi, 2021. "Reaching silicon-based NEMS performances with 3D printed nanomechanical resonators," Nature Communications, Nature, vol. 12(1), pages 1-9, December.
  • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-26353-1
    DOI: 10.1038/s41467-021-26353-1
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-021-26353-1
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-021-26353-1?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Tomoe Kusama & Toshihiro Omori & Takashi Saito & Sumio Kise & Toyonobu Tanaka & Yoshikazu Araki & Ryosuke Kainuma, 2017. "Ultra-large single crystals by abnormal grain growth," Nature Communications, Nature, vol. 8(1), pages 1-9, December.
    2. Stefano Stassi & Monica Marini & Marco Allione & Sergei Lopatin & Domenico Marson & Erik Laurini & Sabrina Pricl & Candido Fabrizio Pirri & Carlo Ricciardi & Enzo Fabrizio, 2019. "Nanomechanical DNA resonators for sensing and structural analysis of DNA-ligand complexes," Nature Communications, Nature, vol. 10(1), pages 1-10, December.
    3. Stefano Stassi & Giulia De Laurentis & Debadi Chakraborty & Katarzyna Bejtka & Angelica Chiodoni & John E. Sader & Carlo Ricciardi, 2019. "Large-scale parallelization of nanomechanical mass spectrometry with weakly-coupled resonators," Nature Communications, Nature, vol. 10(1), pages 1-11, December.
    4. Massimiliano Rossi & David Mason & Junxin Chen & Yeghishe Tsaturyan & Albert Schliesser, 2018. "Measurement-based quantum control of mechanical motion," Nature, Nature, vol. 563(7729), pages 53-58, November.
    5. Thomas P. Burg & Michel Godin & Scott M. Knudsen & Wenjiang Shen & Greg Carlson & John S. Foster & Ken Babcock & Scott R. Manalis, 2007. "Weighing of biomolecules, single cells and single nanoparticles in fluid," Nature, Nature, vol. 446(7139), pages 1066-1069, April.
    6. Marc Sansa & Marta Fernández-Regúlez & Jordi Llobet & Álvaro San Paulo & Francesc Pérez-Murano, 2014. "High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators," Nature Communications, Nature, vol. 5(1), pages 1-9, September.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Mingchao Zhang & Yohan Lee & Zhiqiang Zheng & Muhammad Turab Ali Khan & Xianglong Lyu & Junghwan Byun & Harald Giessen & Metin Sitti, 2023. "Micro- and nanofabrication of dynamic hydrogels with multichannel information," Nature Communications, Nature, vol. 14(1), pages 1-10, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Jingkun Guo & Jin Chang & Xiong Yao & Simon Gröblacher, 2023. "Active-feedback quantum control of an integrated low-frequency mechanical resonator," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    2. Yannick Seis & Thibault Capelle & Eric Langman & Sampo Saarinen & Eric Planz & Albert Schliesser, 2022. "Ground state cooling of an ultracoherent electromechanical system," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    3. M. J. Bereyhi & A. Beccari & R. Groth & S. A. Fedorov & A. Arabmoheghi & T. J. Kippenberg & N. J. Engelsen, 2022. "Hierarchical tensile structures with ultralow mechanical dissipation," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    4. Peipei Pan & Aixi Chen & Li Deng, 2023. "Improving Mechanical Oscillator Cooling in a Double-Coupled Cavity Optomechanical System with an Optical Parametric Amplifier," Mathematics, MDPI, vol. 11(9), pages 1-12, May.
    5. Sheng Xu & Takumi Odaira & Shunsuke Sato & Xiao Xu & Toshihiro Omori & Stefanus Harjo & Takuro Kawasaki & Hanuš Seiner & Kristýna Zoubková & Yasukazu Murakami & Ryosuke Kainuma, 2022. "Non-Hookean large elastic deformation in bulk crystalline metals," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    6. Hosseini-Ara, Reza & Mokhtarian, Ali & Karamrezaei, Amir Hossein & Toghraie, Davood, 2022. "Computational analysis of high precision nano-sensors for diagnosis of viruses: Effects of partial antibody layer," Mathematics and Computers in Simulation (MATCOM), Elsevier, vol. 192(C), pages 384-398.
    7. Christian Bærentsen & Sergey A. Fedorov & Christoffer Østfeldt & Mikhail V. Balabas & Emil Zeuthen & Eugene S. Polzik, 2024. "Squeezed light from an oscillator measured at the rate of oscillation," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    8. Andreas P. Cuny & K. Tanuj Sapra & David Martinez-Martin & Gotthold Fläschner & Jonathan D. Adams & Sascha Martin & Christoph Gerber & Fabian Rudolf & Daniel J. Müller, 2022. "High-resolution mass measurements of single budding yeast reveal linear growth segments," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    9. Seunguk Song & Aram Yoon & Sora Jang & Jason Lynch & Jihoon Yang & Juwon Han & Myeonggi Choe & Young Ho Jin & Cindy Yueli Chen & Yeryun Cheon & Jinsung Kwak & Changwook Jeong & Hyeonsik Cheong & Deep , 2023. "Fabrication of p-type 2D single-crystalline transistor arrays with Fermi-level-tuned van der Waals semimetal electrodes," Nature Communications, Nature, vol. 14(1), pages 1-14, December.
    10. Chuan He & Jingzhuo Zhou & Rui Zhou & Cong Chen & Siyi Jing & Kaiyu Mu & Yu-Ting Huang & Chih-Chun Chung & Sheng-Jye Cherng & Yang Lu & King-Ning Tu & Shien-Ping Feng, 2024. "Nanocrystalline copper for direct copper-to-copper bonding with improved cross-interface formation at low thermal budget," Nature Communications, Nature, vol. 15(1), pages 1-11, December.
    11. John E. Sader & Alfredo Gomez & Adam P. Neumann & Alex Nunn & Michael L. Roukes, 2024. "Data-driven fingerprint nanoelectromechanical mass spectrometry," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    12. Andrea Cupertino & Dongil Shin & Leo Guo & Peter G. Steeneken & Miguel A. Bessa & Richard A. Norte, 2024. "Centimeter-scale nanomechanical resonators with low dissipation," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    13. Fabrizio Berritta & Torbjørn Rasmussen & Jan A. Krzywda & Joost Heijden & Federico Fedele & Saeed Fallahi & Geoffrey C. Gardner & Michael J. Manfra & Evert Nieuwenburg & Jeroen Danon & Anasua Chatterj, 2024. "Real-time two-axis control of a spin qubit," Nature Communications, Nature, vol. 15(1), pages 1-9, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-26353-1. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.