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A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Author

Listed:
  • Mikhail Churaev

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Rui Ning Wang

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Annina Riedhauser

    (IBM Research - Europe, Zurich)

  • Viacheslav Snigirev

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Terence Blésin

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Charles Möhl

    (IBM Research - Europe, Zurich)

  • Miles H. Anderson

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Anat Siddharth

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Youri Popoff

    (IBM Research - Europe, Zurich
    Integrated Systems Laboratory, Swiss Federal Institute of Technology Zurich (ETH Zürich))

  • Ute Drechsler

    (IBM Research - Europe, Zurich)

  • Daniele Caimi

    (IBM Research - Europe, Zurich)

  • Simon Hönl

    (IBM Research - Europe, Zurich)

  • Johann Riemensberger

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Junqiu Liu

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

  • Paul Seidler

    (IBM Research - Europe, Zurich)

  • Tobias J. Kippenberg

    (Institute of Physics, Swiss Federal Institute of Technology Lausanne (EPFL)
    EPFL)

Abstract

The availability of thin-film lithium niobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date, LiNbO3 photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partially etched waveguides, that lack the reproducibility achieved in silicon photonics. Widespread application of thin-film LiNbO3 requires a reliable solution with precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform employing wafer-scale bonding of thin-film LiNbO3 to silicon nitride (Si3N4) photonic integrated circuits. The platform maintains the low propagation loss (

Suggested Citation

  • Mikhail Churaev & Rui Ning Wang & Annina Riedhauser & Viacheslav Snigirev & Terence Blésin & Charles Möhl & Miles H. Anderson & Anat Siddharth & Youri Popoff & Ute Drechsler & Daniele Caimi & Simon Hö, 2023. "A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-39047-7
    DOI: 10.1038/s41467-023-39047-7
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    References listed on IDEAS

    as
    1. Qianfan Xu & Bradley Schmidt & Sameer Pradhan & Michal Lipson, 2005. "Micrometre-scale silicon electro-optic modulator," Nature, Nature, vol. 435(7040), pages 325-327, May.
    2. Mian Zhang & Brandon Buscaino & Cheng Wang & Amirhassan Shams-Ansari & Christian Reimer & Rongrong Zhu & Joseph M. Kahn & Marko Lončar, 2019. "Broadband electro-optic frequency comb generation in a lithium niobate microring resonator," Nature, Nature, vol. 568(7752), pages 373-377, April.
    3. Cheng Wang & Mian Zhang & Mengjie Yu & Rongrong Zhu & Han Hu & Marko Loncar, 2019. "Monolithic lithium niobate photonic circuits for Kerr frequency comb generation and modulation," Nature Communications, Nature, vol. 10(1), pages 1-6, December.
    4. Junqiu Liu & Guanhao Huang & Rui Ning Wang & Jijun He & Arslan S. Raja & Tianyi Liu & Nils J. Engelsen & Tobias J. Kippenberg, 2021. "High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits," Nature Communications, Nature, vol. 12(1), pages 1-9, December.
    5. Cheng Wang & Mian Zhang & Xi Chen & Maxime Bertrand & Amirhassan Shams-Ansari & Sethumadhavan Chandrasekhar & Peter Winzer & Marko Lončar, 2018. "Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages," Nature, Nature, vol. 562(7725), pages 101-104, October.
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    Cited by:

    1. Zihan Li & Rui Ning Wang & Grigory Lihachev & Junyin Zhang & Zelin Tan & Mikhail Churaev & Nikolai Kuznetsov & Anat Siddharth & Mohammad J. Bereyhi & Johann Riemensberger & Tobias J. Kippenberg, 2023. "High density lithium niobate photonic integrated circuits," Nature Communications, Nature, vol. 14(1), pages 1-8, December.

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