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Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

Author

Listed:
  • Daehun Lee

    (University of Texas at Austin)

  • Shahin Jahanbani

    (University of Texas at Austin)

  • Jack Kramer

    (University of Texas at Austin)

  • Ruochen Lu

    (University of Texas at Austin)

  • Keji Lai

    (University of Texas at Austin)

Abstract

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.

Suggested Citation

  • Daehun Lee & Shahin Jahanbani & Jack Kramer & Ruochen Lu & Keji Lai, 2023. "Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-36936-9
    DOI: 10.1038/s41467-023-36936-9
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    References listed on IDEAS

    as
    1. Yiwen Chu & Prashanta Kharel & Taekwan Yoon & Luigi Frunzio & Peter T. Rakich & Robert J. Schoelkopf, 2018. "Creation and control of multi-phonon Fock states in a bulk acoustic-wave resonator," Nature, Nature, vol. 563(7733), pages 666-670, November.
    2. Lei Shao & Vikrant J. Gokhale & Bo Peng & Penghui Song & Jingjie Cheng & Justin Kuo & Amit Lal & Wen-Ming Zhang & Jason J. Gorman, 2022. "Femtometer-amplitude imaging of coherent super high frequency vibrations in micromechanical resonators," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    3. Vikrant J. Gokhale & Brian P. Downey & D. Scott Katzer & Neeraj Nepal & Andrew C. Lang & Rhonda M. Stroud & David J. Meyer, 2020. "Epitaxial bulk acoustic wave resonators as highly coherent multi-phonon sources for quantum acoustodynamics," Nature Communications, Nature, vol. 11(1), pages 1-9, December.
    4. Qingnan Xie & Sylvain Mezil & Paul H. Otsuka & Motonobu Tomoda & Jérôme Laurent & Osamu Matsuda & Zhonghua Shen & Oliver B. Wright, 2019. "Imaging gigahertz zero-group-velocity Lamb waves," Nature Communications, Nature, vol. 10(1), pages 1-7, December.
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