IDEAS home Printed from https://ideas.repec.org/a/spr/joinma/v34y2023i2d10.1007_s10845-021-01810-2.html
   My bibliography  Save this article

A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance

Author

Listed:
  • Youngju Kim

    (Yonsei University)

  • Hoyeop Lee

    (Yonsei University)

  • Chang Ouk Kim

    (Yonsei University)

Abstract

In the semiconductor manufacturing field, few studies on fault detection (FD) models have considered process drift due to incomplete maintenance. Process drift refers to the shift in sensor measurements over time due to tool aging, and it leads to defective production when it is severe. Tool maintenance is conducted regularly to prevent defects. However, when it is performed improperly, tool aging accelerates, and the drift increases. In this paper, we propose an FD model robust to process drift by modeling process drift with a variational autoencoder (VAE). Because process drift is characterized by time-varying information, the proposed model encodes some time-varying information through separate hidden layers. By adopting a strategy that combines information separately encoded in a feature vector, the proposed model successfully models process drift. With actual chemical vapor deposition process data, we were able to generate many virtual datasets that incorporate process drift with various drift characteristics, such as patterns, degrees, and speeds. The proposed model outperformed four comparison FD methods on these datasets.

Suggested Citation

  • Youngju Kim & Hoyeop Lee & Chang Ouk Kim, 2023. "A variational autoencoder for a semiconductor fault detection model robust to process drift due to incomplete maintenance," Journal of Intelligent Manufacturing, Springer, vol. 34(2), pages 529-540, February.
    • Handle: RePEc:spr:joinma:v:34:y:2023:i:2:d:10.1007_s10845-021-01810-2
    DOI: 10.1007/s10845-021-01810-2
    as

    Download full text from publisher

    File URL: http://link.springer.com/10.1007/s10845-021-01810-2
    File Function: Abstract
    Download Restriction: Access to the full text of the articles in this series is restricted.
    File URL: https://libkey.io/10.1007/s10845-021-01810-2?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    References listed on IDEAS

    as
    1. Tian Wang & Meina Qiao & Mengyi Zhang & Yi Yang & Hichem Snoussi, 2020. "Data-driven prognostic method based on self-supervised learning approaches for fault detection," Journal of Intelligent Manufacturing, Springer, vol. 31(7), pages 1611-1619, October.
    2. Wo Jae Lee & Gamini P. Mendis & Matthew J. Triebe & John W. Sutherland, 2020. "Monitoring of a machining process using kernel principal component analysis and kernel density estimation," Journal of Intelligent Manufacturing, Springer, vol. 31(5), pages 1175-1189, June.
    3. Ki Bum Lee & Chang Ouk Kim, 2020. "Recurrent feature-incorporated convolutional neural network for virtual metrology of the chemical mechanical planarization process," Journal of Intelligent Manufacturing, Springer, vol. 31(1), pages 73-86, January.
    4. A. Khatab, 2018. "Maintenance optimization in failure-prone systems under imperfect preventive maintenance," Journal of Intelligent Manufacturing, Springer, vol. 29(3), pages 707-717, March.
    5. Pedro Santos & Jesús Maudes & Andres Bustillo, 2018. "Identifying maximum imbalance in datasets for fault diagnosis of gearboxes," Journal of Intelligent Manufacturing, Springer, vol. 29(2), pages 333-351, February.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Ding, Yifei & Zhuang, Jichao & Ding, Peng & Jia, Minping, 2022. "Self-supervised pretraining via contrast learning for intelligent incipient fault detection of bearings," Reliability Engineering and System Safety, Elsevier, vol. 218(PA).
    2. Sangho Lee & Youngdoo Son, 2021. "Motor Load Balancing with Roll Force Prediction for a Cold-Rolling Setup with Neural Networks," Mathematics, MDPI, vol. 9(12), pages 1-21, June.
    3. Yiping Gao & Liang Gao & Xinyu Li & Yuwei Zheng, 2020. "A zero-shot learning method for fault diagnosis under unknown working loads," Journal of Intelligent Manufacturing, Springer, vol. 31(4), pages 899-909, April.
    4. Yifei Wang & Chun Su & Mingjiang Xie, 2024. "Optimizing inspection plan for corroded pipeline with considering imperfect maintenance," Journal of Risk and Reliability, , vol. 238(2), pages 417-428, April.
    5. Mohammed Majid Abdulrazzaq & Nehad T. A. Ramaha & Alaa Ali Hameed & Mohammad Salman & Dong Keon Yon & Norma Latif Fitriyani & Muhammad Syafrudin & Seung Won Lee, 2024. "Consequential Advancements of Self-Supervised Learning (SSL) in Deep Learning Contexts," Mathematics, MDPI, vol. 12(5), pages 1-42, March.
    6. Sachin Kumar & T. Gopi & N. Harikeerthana & Munish Kumar Gupta & Vidit Gaur & Grzegorz M. Krolczyk & ChuanSong Wu, 2023. "Machine learning techniques in additive manufacturing: a state of the art review on design, processes and production control," Journal of Intelligent Manufacturing, Springer, vol. 34(1), pages 21-55, January.
    7. Xiaofeng Wang & Shu Guo & Jian Shen & Yang Liu, 2020. "Optimization of preventive maintenance for series manufacturing system by differential evolution algorithm," Journal of Intelligent Manufacturing, Springer, vol. 31(3), pages 745-757, March.
    8. Jorge Maldonado-Correa & Marcelo Valdiviezo-Condolo & Estefanía Artigao & Sergio Martín-Martínez & Emilio Gómez-Lázaro, 2024. "Classification of Highly Imbalanced Supervisory Control and Data Acquisition Data for Fault Detection of Wind Turbine Generators," Energies, MDPI, vol. 17(7), pages 1-20, March.
    9. Abdellatif Elmouatamid & Brian Fricke & Jian Sun & Philip W. T. Pong, 2023. "Air Conditioning Systems Fault Detection and Diagnosis-Based Sensing and Data-Driven Approaches," Energies, MDPI, vol. 16(12), pages 1-20, June.
    10. Xiaohui Chen & Lin Zhang & Ze Zhang, 2020. "An integrated model for maintenance policies and production scheduling based on immune–culture algorithm," Journal of Risk and Reliability, , vol. 234(5), pages 651-663, October.
    11. Yupeng Wei & Dazhong Wu, 2024. "Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning," Journal of Intelligent Manufacturing, Springer, vol. 35(1), pages 115-127, January.
    12. An, Youjun & Chen, Xiaohui & Hu, Jiawen & Zhang, Lin & Li, Yinghe & Jiang, Junwei, 2022. "Joint optimization of preventive maintenance and production rescheduling with new machine insertion and processing speed selection," Reliability Engineering and System Safety, Elsevier, vol. 220(C).
    13. Xuejun Zhao & Yong Qin & Changbo He & Limin Jia, 2022. "Underdetermined blind source extraction of early vehicle bearing faults based on EMD and kernelized correlation maximization," Journal of Intelligent Manufacturing, Springer, vol. 33(1), pages 185-201, January.
    14. Lu-jun Cui & Man-ying Sun & Yan-long Cao & Qi-jian Zhao & Wen-han Zeng & Shi-rui Guo, 2021. "A novel tolerance geometric method based on machine learning," Journal of Intelligent Manufacturing, Springer, vol. 32(3), pages 799-821, March.
    15. Jeongsub Choi & Mengmeng Zhu & Jihoon Kang & Myong K. Jeong, 2024. "Convolutional neural network based multi-input multi-output model for multi-sensor multivariate virtual metrology in semiconductor manufacturing," Annals of Operations Research, Springer, vol. 339(1), pages 185-201, August.
    16. Wang, Yifei & Xie, Mingjiang & Su, Chun, 2024. "Multi-objective maintenance strategy for corroded pipelines considering the correlation of different failure modes," Reliability Engineering and System Safety, Elsevier, vol. 243(C).
    17. Chia-Yen Lee & Chen-Fu Chien, 2022. "Pitfalls and protocols of data science in manufacturing practice," Journal of Intelligent Manufacturing, Springer, vol. 33(5), pages 1189-1207, June.
    18. Tian, Jilun & Jiang, Yuchen & Zhang, Jiusi & Luo, Hao & Yin, Shen, 2024. "A novel data augmentation approach to fault diagnosis with class-imbalance problem," Reliability Engineering and System Safety, Elsevier, vol. 243(C).
    19. Andres Bustillo & Danil Yu. Pimenov & Mozammel Mia & Wojciech Kapłonek, 2021. "Machine-learning for automatic prediction of flatness deviation considering the wear of the face mill teeth," Journal of Intelligent Manufacturing, Springer, vol. 32(3), pages 895-912, March.
    20. Liu, Gehui & Chen, Shaokuan & Jin, Hua & Liu, Shuang, 2021. "Optimum opportunistic maintenance schedule incorporating delay time theory with imperfect maintenance," Reliability Engineering and System Safety, Elsevier, vol. 213(C).

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:spr:joinma:v:34:y:2023:i:2:d:10.1007_s10845-021-01810-2. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.springer.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.