IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v13y2022i1d10.1038_s41467-022-34734-3.html
   My bibliography  Save this article

Engineering high quality graphene superlattices via ion milled ultra-thin etching masks

Author

Listed:
  • David Barcons Ruiz

    (The Barcelona Institute of Science and Technology)

  • Hanan Herzig Sheinfux

    (The Barcelona Institute of Science and Technology)

  • Rebecca Hoffmann

    (The Barcelona Institute of Science and Technology)

  • Iacopo Torre

    (The Barcelona Institute of Science and Technology)

  • Hitesh Agarwal

    (The Barcelona Institute of Science and Technology)

  • Roshan Krishna Kumar

    (The Barcelona Institute of Science and Technology)

  • Lorenzo Vistoli

    (The Barcelona Institute of Science and Technology)

  • Takashi Taniguchi

    (National Institute for Materials Science
    National Institute for Materials Science)

  • Kenji Watanabe

    (National Institute for Materials Science
    National Institute for Materials Science)

  • Adrian Bachtold

    (The Barcelona Institute of Science and Technology
    ICREA—Institució Catalana de Recerca i Estudis Avançats)

  • Frank H. L. Koppens

    (The Barcelona Institute of Science and Technology
    ICREA—Institució Catalana de Recerca i Estudis Avançats)

Abstract

Nanofabrication research pursues the miniaturization of patterned feature size. In the current state of the art, micron scale areas can be patterned with features down to ~30 nm pitch using electron beam lithography. Here, we demonstrate a nanofabrication technique which allows patterning periodic structures with a pitch down to 16 nm. It is based on focused ion beam milling of suspended membranes, with minimal proximity effects typical to standard electron beam lithography. The membranes are then transferred and used as hard etching masks. We benchmark our technique by electrostatically inducing a superlattice potential in graphene and observe bandstructure modification in electronic transport. Our technique opens the path towards the realization of very short period superlattices in 2D materials, but with the ability to control lattice symmetries and strength. This can pave the way for a versatile solid-state quantum simulator platform and the study of correlated electron phases.

Suggested Citation

  • David Barcons Ruiz & Hanan Herzig Sheinfux & Rebecca Hoffmann & Iacopo Torre & Hitesh Agarwal & Roshan Krishna Kumar & Lorenzo Vistoli & Takashi Taniguchi & Kenji Watanabe & Adrian Bachtold & Frank H., 2022. "Engineering high quality graphene superlattices via ion milled ultra-thin etching masks," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
  • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34734-3
    DOI: 10.1038/s41467-022-34734-3
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-022-34734-3
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-022-34734-3?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Yuan Cao & Valla Fatemi & Shiang Fang & Kenji Watanabe & Takashi Taniguchi & Efthimios Kaxiras & Pablo Jarillo-Herrero, 2018. "Unconventional superconductivity in magic-angle graphene superlattices," Nature, Nature, vol. 556(7699), pages 43-50, April.
    2. Filippo Pizzocchero & Lene Gammelgaard & Bjarke S. Jessen & José M. Caridad & Lei Wang & James Hone & Peter Bøggild & Timothy J. Booth, 2016. "The hot pick-up technique for batch assembly of van der Waals heterostructures," Nature Communications, Nature, vol. 7(1), pages 1-10, September.
    3. L. A. Ponomarenko & R. V. Gorbachev & G. L. Yu & D. C. Elias & R. Jalil & A. A. Patel & A. Mishchenko & A. S. Mayorov & C. R. Woods & J. R. Wallbank & M. Mucha-Kruczynski & B. A. Piot & M. Potemski & , 2013. "Cloning of Dirac fermions in graphene superlattices," Nature, Nature, vol. 497(7451), pages 594-597, May.
    4. Max C. Lemme & Deji Akinwande & Cedric Huyghebaert & Christoph Stampfer, 2022. "2D materials for future heterogeneous electronics," Nature Communications, Nature, vol. 13(1), pages 1-5, December.
    5. Robin Huber & Max-Niklas Steffen & Martin Drienovsky & Andreas Sandner & Kenji Watanabe & Takashi Taniguchi & Daniela Pfannkuche & Dieter Weiss & Jonathan Eroms, 2022. "Band conductivity oscillations in a gate-tunable graphene superlattice," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    6. T. Hensgens & T. Fujita & L. Janssen & Xiao Li & C. J. Van Diepen & C. Reichl & W. Wegscheider & S. Das Sarma & L. M. K. Vandersypen, 2017. "Quantum simulation of a Fermi–Hubbard model using a semiconductor quantum dot array," Nature, Nature, vol. 548(7665), pages 70-73, August.
    7. Tingxin Li & Shengwei Jiang & Lizhong Li & Yang Zhang & Kaifei Kang & Jiacheng Zhu & Kenji Watanabe & Takashi Taniguchi & Debanjan Chowdhury & Liang Fu & Jie Shan & Kin Fai Mak, 2021. "Continuous Mott transition in semiconductor moiré superlattices," Nature, Nature, vol. 597(7876), pages 350-354, September.
    8. D. G. Purdie & N. M. Pugno & T. Taniguchi & K. Watanabe & A. C. Ferrari & A. Lombardo, 2018. "Cleaning interfaces in layered materials heterostructures," Nature Communications, Nature, vol. 9(1), pages 1-12, December.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Robin Huber & Max-Niklas Steffen & Martin Drienovsky & Andreas Sandner & Kenji Watanabe & Takashi Taniguchi & Daniela Pfannkuche & Dieter Weiss & Jonathan Eroms, 2022. "Band conductivity oscillations in a gate-tunable graphene superlattice," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    2. Mohit Kumar Jat & Priya Tiwari & Robin Bajaj & Ishita Shitut & Shinjan Mandal & Kenji Watanabe & Takashi Taniguchi & H. R. Krishnamurthy & Manish Jain & Aveek Bid, 2024. "Higher order gaps in the renormalized band structure of doubly aligned hBN/bilayer graphene moiré superlattice," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    3. Guowen Yuan & Weilin Liu & Xianlei Huang & Zihao Wan & Chao Wang & Bing Yao & Wenjie Sun & Hang Zheng & Kehan Yang & Zhenjia Zhou & Yuefeng Nie & Jie Xu & Libo Gao, 2023. "Stacking transfer of wafer-scale graphene-based van der Waals superlattices," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    4. Aaron H. Barajas-Aguilar & Jasen Zion & Ian Sequeira & Andrew Z. Barabas & Takashi Taniguchi & Kenji Watanabe & Eric B. Barrett & Thomas Scaffidi & Javier D. Sanchez-Yamagishi, 2024. "Electrically driven amplification of terahertz acoustic waves in graphene," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    5. Jubin Nathawat & Ishiaka Mansaray & Kohei Sakanashi & Naoto Wada & Michael D. Randle & Shenchu Yin & Keke He & Nargess Arabchigavkani & Ripudaman Dixit & Bilal Barut & Miao Zhao & Harihara Ramamoorthy, 2023. "Signatures of hot carriers and hot phonons in the re-entrant metallic and semiconducting states of Moiré-gapped graphene," Nature Communications, Nature, vol. 14(1), pages 1-11, December.
    6. Junxiong Hu & Junyou Tan & Mohammed M. Al Ezzi & Udvas Chattopadhyay & Jian Gou & Yuntian Zheng & Zihao Wang & Jiayu Chen & Reshmi Thottathil & Jiangbo Luo & Kenji Watanabe & Takashi Taniguchi & Andre, 2023. "Controlled alignment of supermoiré lattice in double-aligned graphene heterostructures," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    7. Yuting Tan & Pak Ki Henry Tsang & Vladimir Dobrosavljević, 2022. "Disorder-dominated quantum criticality in moiré bilayers," Nature Communications, Nature, vol. 13(1), pages 1-6, December.
    8. Ravi Kumar & Saurabh Kumar Srivastav & Ujjal Roy & Jinhong Park & Christian Spånslätt & K. Watanabe & T. Taniguchi & Yuval Gefen & Alexander D. Mirlin & Anindya Das, 2024. "Electrical noise spectroscopy of magnons in a quantum Hall ferromagnet," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    9. Xingdan Sun & Shihao Zhang & Zhiyong Liu & Honglei Zhu & Jinqiang Huang & Kai Yuan & Zhenhua Wang & Kenji Watanabe & Takashi Taniguchi & Xiaoxi Li & Mengjian Zhu & Jinhai Mao & Teng Yang & Jun Kang & , 2021. "Correlated states in doubly-aligned hBN/graphene/hBN heterostructures," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    10. Andrei Bylinkin & Sebastián Castilla & Tetiana M. Slipchenko & Kateryna Domina & Francesco Calavalle & Varun-Varma Pusapati & Marta Autore & Fèlix Casanova & Luis E. Hueso & Luis Martín-Moreno & Alexe, 2024. "On-chip phonon-enhanced IR near-field detection of molecular vibrations," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    11. Daniel Shaffer & Jian Wang & Luiz H. Santos, 2022. "Unconventional self-similar Hofstadter superconductivity from repulsive interactions," Nature Communications, Nature, vol. 13(1), pages 1-12, December.
    12. He Wang & Yanzhao Liu & Ming Gong & Hua Jiang & Xiaoyue Gao & Wenlong Ma & Jiawei Luo & Haoran Ji & Jun Ge & Shuang Jia & Peng Gao & Ziqiang Wang & X. C. Xie & Jian Wang, 2023. "Emergent superconductivity in topological-kagome-magnet/metal heterostructures," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    13. J. Díez-Mérida & A. Díez-Carlón & S. Y. Yang & Y.-M. Xie & X.-J. Gao & J. Senior & K. Watanabe & T. Taniguchi & X. Lu & A. P. Higginbotham & K. T. Law & Dmitri K. Efetov, 2023. "Symmetry-broken Josephson junctions and superconducting diodes in magic-angle twisted bilayer graphene," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    14. Li Chen & Cong Lin & Diwei Shi & Xuanyu Huang & Quanshui Zheng & Jinhui Nie & Ming Ma, 2023. "Fully automatic transfer and measurement system for structural superlubric materials," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    15. Xinyu Wang & Jinghua Jiang & Juan Chen & Zhawure Asilehan & Wentao Tang & Chenhui Peng & Rui Zhang, 2024. "Moiré effect enables versatile design of topological defects in nematic liquid crystals," Nature Communications, Nature, vol. 15(1), pages 1-14, December.
    16. Alejandro Ruiz & Brandon Gunn & Yi Lu & Kalyan Sasmal & Camilla M. Moir & Rourav Basak & Hai Huang & Jun-Sik Lee & Fanny Rodolakis & Timothy J. Boyle & Morgan Walker & Yu He & Santiago Blanco-Canosa &, 2022. "Stabilization of three-dimensional charge order through interplanar orbital hybridization in PrxY1−xBa2Cu3O6+δ," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    17. Sami Dzsaber & Diego A. Zocco & Alix McCollam & Franziska Weickert & Ross McDonald & Mathieu Taupin & Gaku Eguchi & Xinlin Yan & Andrey Prokofiev & Lucas M. K. Tang & Bryan Vlaar & Laurel E. Winter & , 2022. "Control of electronic topology in a strongly correlated electron system," Nature Communications, Nature, vol. 13(1), pages 1-7, December.
    18. Sahar Pakdel & Asbjørn Rasmussen & Alireza Taghizadeh & Mads Kruse & Thomas Olsen & Kristian S. Thygesen, 2024. "High-throughput computational stacking reveals emergent properties in natural van der Waals bilayers," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    19. Kaijie Yang & Zian Xu & Yanjie Feng & Frank Schindler & Yuanfeng Xu & Zhen Bi & B. Andrei Bernevig & Peizhe Tang & Chao-Xing Liu, 2024. "Topological minibands and interaction driven quantum anomalous Hall state in topological insulator based moiré heterostructures," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    20. Josef Schätz & Navin Nayi & Jonas Weber & Christoph Metzke & Sebastian Lukas & Jürgen Walter & Tim Schaffus & Fabian Streb & Eros Reato & Agata Piacentini & Annika Grundmann & Holger Kalisch & Michael, 2024. "Button shear testing for adhesion measurements of 2D materials," Nature Communications, Nature, vol. 15(1), pages 1-11, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34734-3. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.