IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v13y2022i1d10.1038_s41467-022-34288-4.html
   My bibliography  Save this article

Defect free strain relaxation of microcrystals on mesoporous patterned silicon

Author

Listed:
  • Alexandre Heintz

    (Université de Sherbrooke
    Université de Sherbrooke)

  • Bouraoui Ilahi

    (Université de Sherbrooke
    Université de Sherbrooke)

  • Alexandre Pofelski

    (McMaster University)

  • Gianluigi Botton

    (McMaster University
    Canadian Light Source)

  • Gilles Patriarche

    (Centre de Nanosciences et de Nanotechnologies – C2N, CNRS, Univ. Paris-Sud, Université Paris-Saclay)

  • Andrea Barzaghi

    (L-NESS and Dipartimento di Fisica, Politecnico di Milano)

  • Simon Fafard

    (Université de Sherbrooke
    Université de Sherbrooke)

  • Richard Arès

    (Université de Sherbrooke
    Université de Sherbrooke)

  • Giovanni Isella

    (L-NESS and Dipartimento di Fisica, Politecnico di Milano)

  • Abderraouf Boucherif

    (Université de Sherbrooke
    Université de Sherbrooke)

Abstract

A perfectly compliant substrate would allow the monolithic integration of high-quality semiconductor materials such as Ge and III-V on Silicon (Si) substrate, enabling novel functionalities on the well-established low-cost Si technology platform. Here, we demonstrate a compliant Si substrate allowing defect-free epitaxial growth of lattice mismatched materials. The method is based on the deep patterning of the Si substrate to form micrometer-scale pillars and subsequent electrochemical porosification. The investigation of the epitaxial Ge crystalline quality by X-ray diffraction, transmission electron microscopy and etch-pits counting demonstrates the full elastic relaxation of defect-free microcrystals. The achievement of dislocation free heteroepitaxy relies on the interplay between elastic deformation of the porous micropillars, set under stress by the lattice mismatch between Ge and Si, and on the diffusion of Ge into the mesoporous patterned substrate attenuating the mismatch strain at the Ge/Si interface.

Suggested Citation

  • Alexandre Heintz & Bouraoui Ilahi & Alexandre Pofelski & Gianluigi Botton & Gilles Patriarche & Andrea Barzaghi & Simon Fafard & Richard Arès & Giovanni Isella & Abderraouf Boucherif, 2022. "Defect free strain relaxation of microcrystals on mesoporous patterned silicon," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
  • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34288-4
    DOI: 10.1038/s41467-022-34288-4
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-022-34288-4
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-022-34288-4?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Daryl T. Spencer & Tara Drake & Travis C. Briles & Jordan Stone & Laura C. Sinclair & Connor Fredrick & Qing Li & Daron Westly & B. Robert Ilic & Aaron Bluestone & Nicolas Volet & Tin Komljenovic & Li, 2018. "An optical-frequency synthesizer using integrated photonics," Nature, Nature, vol. 557(7703), pages 81-85, May.
    2. Youcef A. Bioud & Abderraouf Boucherif & Maksym Myronov & Ali Soltani & Gilles Patriarche & Nadi Braidy & Mourad Jellite & Dominique Drouin & Richard Arès, 2019. "Uprooting defects to enable high-performance III–V optoelectronic devices on silicon," Nature Communications, Nature, vol. 10(1), pages 1-12, December.
    3. Yunjo Kim & Samuel S. Cruz & Kyusang Lee & Babatunde O. Alawode & Chanyeol Choi & Yi Song & Jared M. Johnson & Christopher Heidelberger & Wei Kong & Shinhyun Choi & Kuan Qiao & Ibraheem Almansouri & E, 2017. "Remote epitaxy through graphene enables two-dimensional material-based layer transfer," Nature, Nature, vol. 544(7650), pages 340-343, April.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Lin-Ding Yuan & Shu-Shen Li & Jun-Wei Luo, 2024. "Direct bandgap emission from strain-doped germanium," Nature Communications, Nature, vol. 15(1), pages 1-7, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Mingming Nie & Kunpeng Jia & Yijun Xie & Shining Zhu & Zhenda Xie & Shu-Wei Huang, 2022. "Synthesized spatiotemporal mode-locking and photonic flywheel in multimode mesoresonators," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    2. Wenting Wang & Ping-Keng Lu & Abhinav Kumar Vinod & Deniz Turan & James F. McMillan & Hao Liu & Mingbin Yu & Dim-Lee Kwong & Mona Jarrahi & Chee Wei Wong, 2022. "Coherent terahertz radiation with 2.8-octave tunability through chip-scale photomixed microresonator optical parametric oscillation," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    3. Seyed Danial Hashemi & Sunil Mittal, 2024. "Floquet topological dissipative Kerr solitons and incommensurate frequency combs," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    4. Dong-Chel Shin & Byung Soo Kim & Heesuk Jang & Young-Jin Kim & Seung-Woo Kim, 2023. "Photonic comb-rooted synthesis of ultra-stable terahertz frequencies," Nature Communications, Nature, vol. 14(1), pages 1-10, December.
    5. Chengying Bao & Zhiquan Yuan & Lue Wu & Myoung-Gyun Suh & Heming Wang & Qiang Lin & Kerry J. Vahala, 2021. "Architecture for microcomb-based GHz-mid-infrared dual-comb spectroscopy," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    6. Baheej Bathish & Raanan Gad & Fan Cheng & Kristoffer Karlsson & Ramgopal Madugani & Mark Douvidzon & Síle Nic Chormaic & Tal Carmon, 2023. "Absorption-induced transmission in plasma microphotonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    7. Robert M. Gray & Mingchen Liu & Selina Zhou & Arkadev Roy & Luis Ledezma & Alireza Marandi, 2024. "Quadratic-soliton-enhanced mid-IR molecular sensing," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    8. Chao Xiang & Joel Guo & Warren Jin & Lue Wu & Jonathan Peters & Weiqiang Xie & Lin Chang & Boqiang Shen & Heming Wang & Qi-Fan Yang & David Kinghorn & Mario Paniccia & Kerry J. Vahala & Paul A. Morton, 2021. "High-performance lasers for fully integrated silicon nitride photonics," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    9. Xuguang Zhang & Zixuan Zhou & Yijun Guo & Minxue Zhuang & Warren Jin & Bitao Shen & Yujun Chen & Jiahui Huang & Zihan Tao & Ming Jin & Ruixuan Chen & Zhangfeng Ge & Zhou Fang & Ning Zhang & Yadong Liu, 2024. "High-coherence parallelization in integrated photonics," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    10. Jingwei Ling & Zhengdong Gao & Shixin Xue & Qili Hu & Mingxiao Li & Kaibo Zhang & Usman A. Javid & Raymond Lopez-Rios & Jeremy Staffa & Qiang Lin, 2024. "Electrically empowered microcomb laser," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    11. Miles H. Anderson & Wenle Weng & Grigory Lihachev & Alexey Tikan & Junqiu Liu & Tobias J. Kippenberg, 2022. "Zero dispersion Kerr solitons in optical microresonators," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    12. Su-Peng Yu & Erwan Lucas & Jizhao Zang & Scott B. Papp, 2022. "A continuum of bright and dark-pulse states in a photonic-crystal resonator," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    13. Chenghao Lao & Xing Jin & Lin Chang & Heming Wang & Zhe Lv & Weiqiang Xie & Haowen Shu & Xingjun Wang & John E. Bowers & Qi-Fan Yang, 2023. "Quantum decoherence of dark pulses in optical microresonators," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    14. Grigory Lihachev & Wenle Weng & Junqiu Liu & Lin Chang & Joel Guo & Jijun He & Rui Ning Wang & Miles H. Anderson & Yang Liu & John E. Bowers & Tobias J. Kippenberg, 2022. "Platicon microcomb generation using laser self-injection locking," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    15. Sebastian Manzo & Patrick J. Strohbeen & Zheng Hui Lim & Vivek Saraswat & Dongxue Du & Shining Xu & Nikhil Pokharel & Luke J. Mawst & Michael S. Arnold & Jason K. Kawasaki, 2022. "Pinhole-seeded lateral epitaxy and exfoliation of GaSb films on graphene-terminated surfaces," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    16. Harry Apostoleris & Marco Stefancich & Matteo Chiesa, 2021. "The CPV “Toolbox”: New Approaches to Maximizing Solar Resource Utilization with Application-Oriented Concentrator Photovoltaics," Energies, MDPI, vol. 14(4), pages 1-15, February.
    17. Xiao Wang & Brandon Redding & Nicholas Karl & Christopher Long & Zheyuan Zhu & James Skowronek & Shuo Pang & David Brady & Raktim Sarma, 2024. "Integrated photonic encoder for low power and high-speed image processing," Nature Communications, Nature, vol. 15(1), pages 1-13, December.
    18. Dmitry Kazakov & Theodore P. Letsou & Maximilian Beiser & Yiyang Zhi & Nikola Opačak & Marco Piccardo & Benedikt Schwarz & Federico Capasso, 2024. "Active mid-infrared ring resonators," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    19. Gregory Moille & Edgar F. Perez & Jordan R. Stone & Ashutosh Rao & Xiyuan Lu & Tahmid Sami Rahman & Yanne K. Chembo & Kartik Srinivasan, 2021. "Ultra-broadband Kerr microcomb through soliton spectral translation," Nature Communications, Nature, vol. 12(1), pages 1-9, December.
    20. Sung Bum Kang & Rahul Sharma & Minhyeok Jo & Su In Kim & Jeongwoo Hwang & Sang Hyuk Won & Jae Cheol Shin & Kyoung Jin Choi, 2022. "Catalysis-Free Growth of III-V Core-Shell Nanowires on p -Si for Efficient Heterojunction Solar Cells with Optimized Window Layer," Energies, MDPI, vol. 15(5), pages 1-10, February.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34288-4. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.