IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v12y2021i1d10.1038_s41467-021-26804-9.html
   My bibliography  Save this article

High-performance lasers for fully integrated silicon nitride photonics

Author

Listed:
  • Chao Xiang

    (University of California, Santa Barbara)

  • Joel Guo

    (University of California, Santa Barbara)

  • Warren Jin

    (University of California, Santa Barbara)

  • Lue Wu

    (California Institute of Technology)

  • Jonathan Peters

    (University of California, Santa Barbara)

  • Weiqiang Xie

    (University of California, Santa Barbara)

  • Lin Chang

    (University of California, Santa Barbara)

  • Boqiang Shen

    (California Institute of Technology)

  • Heming Wang

    (California Institute of Technology)

  • Qi-Fan Yang

    (California Institute of Technology)

  • David Kinghorn

    (University of California, Santa Barbara
    Pro Precision Process and Reliability LLC)

  • Mario Paniccia

    (Anello Photonics)

  • Kerry J. Vahala

    (California Institute of Technology)

  • Paul A. Morton

    (Morton Photonics)

  • John E. Bowers

    (University of California, Santa Barbara)

Abstract

Silicon nitride (SiN) waveguides with ultra-low optical loss enable integrated photonic applications including low noise, narrow linewidth lasers, chip-scale nonlinear photonics, and microwave photonics. Lasers are key components to SiN photonic integrated circuits (PICs), but are difficult to fully integrate with low-index SiN waveguides due to their large mismatch with the high-index III-V gain materials. The recent demonstration of multilayer heterogeneous integration provides a practical solution and enabled the first-generation of lasers fully integrated with SiN waveguides. However, a laser with high device yield and high output power at telecommunication wavelengths, where photonics applications are clustered, is still missing, hindered by large mode transition loss, non-optimized cavity design, and a complicated fabrication process. Here, we report high-performance lasers on SiN with tens of milliwatts output power through the SiN waveguide and sub-kHz fundamental linewidth, addressing all the aforementioned issues. We also show Hertz-level fundamental linewidth lasers are achievable with the developed integration techniques. These lasers, together with high-Q SiN resonators, mark a milestone towards a fully integrated low-noise silicon nitride photonics platform. This laser should find potential applications in LIDAR, microwave photonics and coherent optical communications.

Suggested Citation

  • Chao Xiang & Joel Guo & Warren Jin & Lue Wu & Jonathan Peters & Weiqiang Xie & Lin Chang & Boqiang Shen & Heming Wang & Qi-Fan Yang & David Kinghorn & Mario Paniccia & Kerry J. Vahala & Paul A. Morton, 2021. "High-performance lasers for fully integrated silicon nitride photonics," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
  • Handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-26804-9
    DOI: 10.1038/s41467-021-26804-9
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-021-26804-9
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-021-26804-9?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Arslan S. Raja & Andrey S. Voloshin & Hairun Guo & Sofya E. Agafonova & Junqiu Liu & Alexander S. Gorodnitskiy & Maxim Karpov & Nikolay G. Pavlov & Erwan Lucas & Ramzil R. Galiev & Artem E. Shitikov &, 2019. "Electrically pumped photonic integrated soliton microcomb," Nature Communications, Nature, vol. 10(1), pages 1-8, December.
    2. Brian Stern & Xingchen Ji & Yoshitomo Okawachi & Alexander L. Gaeta & Michal Lipson, 2018. "Battery-operated integrated frequency comb generator," Nature, Nature, vol. 562(7727), pages 401-405, October.
    3. Arslan S. Raja & Andrey S. Voloshin & Hairun Guo & Sofya E. Agafonova & Junqiu Liu & Alexander S. Gorodnitskiy & Maxim Karpov & Nikolay G. Pavlov & Erwan Lucas & Ramzil R. Galiev & Artem E. Shitikov &, 2019. "Author Correction: Electrically pumped photonic integrated soliton microcomb," Nature Communications, Nature, vol. 10(1), pages 1-1, December.
    4. Pablo Marin-Palomo & Juned N. Kemal & Maxim Karpov & Arne Kordts & Joerg Pfeifle & Martin H. P. Pfeiffer & Philipp Trocha & Stefan Wolf & Victor Brasch & Miles H. Anderson & Ralf Rosenberger & Kovendh, 2017. "Microresonator-based solitons for massively parallel coherent optical communications," Nature, Nature, vol. 546(7657), pages 274-279, June.
    5. W. Liang & D. Eliyahu & V. S. Ilchenko & A. A. Savchenkov & A. B. Matsko & D. Seidel & L. Maleki, 2015. "High spectral purity Kerr frequency comb radio frequency photonic oscillator," Nature Communications, Nature, vol. 6(1), pages 1-8, November.
    6. Boqiang Shen & Lin Chang & Junqiu Liu & Heming Wang & Qi-Fan Yang & Chao Xiang & Rui Ning Wang & Jijun He & Tianyi Liu & Weiqiang Xie & Joel Guo & David Kinghorn & Lue Wu & Qing-Xin Ji & Tobias J. Kip, 2020. "Integrated turnkey soliton microcombs," Nature, Nature, vol. 582(7812), pages 365-369, June.
    7. Daryl T. Spencer & Tara Drake & Travis C. Briles & Jordan Stone & Laura C. Sinclair & Connor Fredrick & Qing Li & Daron Westly & B. Robert Ilic & Aaron Bluestone & Nicolas Volet & Tin Komljenovic & Li, 2018. "An optical-frequency synthesizer using integrated photonics," Nature, Nature, vol. 557(7703), pages 81-85, May.
    8. Cheng Wang & Mian Zhang & Xi Chen & Maxime Bertrand & Amirhassan Shams-Ansari & Sethumadhavan Chandrasekhar & Peter Winzer & Marko Lončar, 2018. "Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages," Nature, Nature, vol. 562(7725), pages 101-104, October.
    Full references (including those not matched with items on IDEAS)

    Citations

    Citations are extracted by the CitEc Project, subscribe to its RSS feed for this item.
    as


    Cited by:

    1. Thibault Wildi & Alexander E. Ulanov & Thibault Voumard & Bastian Ruhnke & Tobias Herr, 2024. "Phase-stabilised self-injection-locked microcomb," Nature Communications, Nature, vol. 15(1), pages 1-7, December.

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Jingwei Ling & Zhengdong Gao & Shixin Xue & Qili Hu & Mingxiao Li & Kaibo Zhang & Usman A. Javid & Raymond Lopez-Rios & Jeremy Staffa & Qiang Lin, 2024. "Electrically empowered microcomb laser," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    2. Yong Geng & Heng Zhou & Xinjie Han & Wenwen Cui & Qiang Zhang & Boyuan Liu & Guangwei Deng & Qiang Zhou & Kun Qiu, 2022. "Coherent optical communications using coherence-cloned Kerr soliton microcombs," Nature Communications, Nature, vol. 13(1), pages 1-8, December.
    3. Thibault Wildi & Alexander E. Ulanov & Thibault Voumard & Bastian Ruhnke & Tobias Herr, 2024. "Phase-stabilised self-injection-locked microcomb," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    4. Chengying Bao & Zhiquan Yuan & Lue Wu & Myoung-Gyun Suh & Heming Wang & Qiang Lin & Kerry J. Vahala, 2021. "Architecture for microcomb-based GHz-mid-infrared dual-comb spectroscopy," Nature Communications, Nature, vol. 12(1), pages 1-8, December.
    5. Xuguang Zhang & Zixuan Zhou & Yijun Guo & Minxue Zhuang & Warren Jin & Bitao Shen & Yujun Chen & Jiahui Huang & Zihan Tao & Ming Jin & Ruixuan Chen & Zhangfeng Ge & Zhou Fang & Ning Zhang & Yadong Liu, 2024. "High-coherence parallelization in integrated photonics," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    6. Arslan Sajid Raja & Sophie Lange & Maxim Karpov & Kai Shi & Xin Fu & Raphael Behrendt & Daniel Cletheroe & Anton Lukashchuk & Istvan Haller & Fotini Karinou & Benn Thomsen & Krzysztof Jozwik & Junqiu , 2021. "Ultrafast optical circuit switching for data centers using integrated soliton microcombs," Nature Communications, Nature, vol. 12(1), pages 1-7, December.
    7. Yuanbin Liu & Hongyi Zhang & Jiacheng Liu & Liangjun Lu & Jiangbing Du & Yu Li & Zuyuan He & Jianping Chen & Linjie Zhou & Andrew W. Poon, 2024. "Parallel wavelength-division-multiplexed signal transmission and dispersion compensation enabled by soliton microcombs and microrings," Nature Communications, Nature, vol. 15(1), pages 1-12, December.
    8. Gregory Moille & Edgar F. Perez & Jordan R. Stone & Ashutosh Rao & Xiyuan Lu & Tahmid Sami Rahman & Yanne K. Chembo & Kartik Srinivasan, 2021. "Ultra-broadband Kerr microcomb through soliton spectral translation," Nature Communications, Nature, vol. 12(1), pages 1-9, December.
    9. Mingming Nie & Jonathan Musgrave & Kunpeng Jia & Jan Bartos & Shining Zhu & Zhenda Xie & Shu-Wei Huang, 2024. "Turnkey photonic flywheel in a microresonator-filtered laser," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    10. Yang He & Raymond Lopez-Rios & Usman A. Javid & Jingwei Ling & Mingxiao Li & Shixin Xue & Kerry Vahala & Qiang Lin, 2023. "High-speed tunable microwave-rate soliton microcomb," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    11. Mingming Nie & Kunpeng Jia & Yijun Xie & Shining Zhu & Zhenda Xie & Shu-Wei Huang, 2022. "Synthesized spatiotemporal mode-locking and photonic flywheel in multimode mesoresonators," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    12. Baheej Bathish & Raanan Gad & Fan Cheng & Kristoffer Karlsson & Ramgopal Madugani & Mark Douvidzon & Síle Nic Chormaic & Tal Carmon, 2023. "Absorption-induced transmission in plasma microphotonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    13. Rui Niu & Ming Li & Shuai Wan & Yu Robert Sun & Shui-Ming Hu & Chang-Ling Zou & Guang-Can Guo & Chun-Hua Dong, 2023. "kHz-precision wavemeter based on reconfigurable microsoliton," Nature Communications, Nature, vol. 14(1), pages 1-6, December.
    14. Arkadev Roy & Luis Ledezma & Luis Costa & Robert Gray & Ryoto Sekine & Qiushi Guo & Mingchen Liu & Ryan M. Briggs & Alireza Marandi, 2023. "Visible-to-mid-IR tunable frequency comb in nanophotonics," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    15. Timothy P. McKenna & Hubert S. Stokowski & Vahid Ansari & Jatadhari Mishra & Marc Jankowski & Christopher J. Sarabalis & Jason F. Herrmann & Carsten Langrock & Martin M. Fejer & Amir H. Safavi-Naeini, 2022. "Ultra-low-power second-order nonlinear optics on a chip," Nature Communications, Nature, vol. 13(1), pages 1-11, December.
    16. Grigory Lihachev & Wenle Weng & Junqiu Liu & Lin Chang & Joel Guo & Jijun He & Rui Ning Wang & Miles H. Anderson & Yang Liu & John E. Bowers & Tobias J. Kippenberg, 2022. "Platicon microcomb generation using laser self-injection locking," Nature Communications, Nature, vol. 13(1), pages 1-9, December.
    17. Pedro Tovar & Jean Pierre von der Weid & Yuan Wang & Liang Chen & Xiaoyi Bao, 2023. "A random optical parametric oscillator," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    18. Mingxiao Li & Lin Chang & Lue Wu & Jeremy Staffa & Jingwei Ling & Usman A. Javid & Shixin Xue & Yang He & Raymond Lopez-rios & Theodore J. Morin & Heming Wang & Boqiang Shen & Siwei Zeng & Lin Zhu & K, 2022. "Integrated Pockels laser," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    19. Chen-Guang Wang & Wuyue Xu & Chong Li & Lili Shi & Junliang Jiang & Tingting Guo & Wen-Cheng Yue & Tianyu Li & Ping Zhang & Yang-Yang Lyu & Jiazheng Pan & Xiuhao Deng & Ying Dong & Xuecou Tu & Sining , 2024. "Integrated and DC-powered superconducting microcomb," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    20. Miles H. Anderson & Wenle Weng & Grigory Lihachev & Alexey Tikan & Junqiu Liu & Tobias J. Kippenberg, 2022. "Zero dispersion Kerr solitons in optical microresonators," Nature Communications, Nature, vol. 13(1), pages 1-10, December.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:12:y:2021:i:1:d:10.1038_s41467-021-26804-9. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.