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Towards high integration and power density: Zigzag-type thin-film thermoelectric generator assisted by rapid pulse laser patterning technique

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  • Yu, Yuedong
  • Zhu, Wei
  • Wang, Yaling
  • Zhu, Pengcheng
  • Peng, Kang
  • Deng, Yuan

Abstract

Cross-plane thin-film thermoelectric generator has become a new hotspot as power supply for microelectronic chips and wearable devices. Nevertheless, the poor incompatibility between thin-film thermoelectric generator with high-density thermoelectric legs and traditional semiconductor processing leads to much difficulty in performance improvement. Herein, a Zigzag-type thermoelectric leg structure is designed assisted by a low-cost rapid pulse laser patterning technique to realize the fabrication of high-density thermoelectric arrays. Furthermore, an investigation of threshold fluences of interaction between laser and materials is conducted to explore the compatibility between pulse laser ablation and thin-film thermoelectric generator fabrication. With the high-property thermoelectric materials achieved by high temperature treatment, the high-density integrated thin-film thermoelectric generator presents a power density of 1.04 mW cm−2 at a temperature difference of 88 K. This high output makes it an excellent micro power source to drive a variety of devices for a self-power system. Moreover, a detailed analysis about the additional thermal resistance is carried out to provide a guide for the practical application.

Suggested Citation

  • Yu, Yuedong & Zhu, Wei & Wang, Yaling & Zhu, Pengcheng & Peng, Kang & Deng, Yuan, 2020. "Towards high integration and power density: Zigzag-type thin-film thermoelectric generator assisted by rapid pulse laser patterning technique," Applied Energy, Elsevier, vol. 275(C).
  • Handle: RePEc:eee:appene:v:275:y:2020:i:c:s0306261920309168
    DOI: 10.1016/j.apenergy.2020.115404
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    Cited by:

    1. Liang, Jia & Huang, Muzhang & Zhang, Xuefei & Wan, Chunlei, 2022. "Structural design for wearable self-powered thermoelectric modules with efficient temperature difference utilization and high normalized maximum power density," Applied Energy, Elsevier, vol. 327(C).
    2. Lv, Jin-Ran & Ma, Jin-Lei & Dai, Lu & Yin, Tao & He, Zhi-Zhu, 2022. "A high-performance wearable thermoelectric generator with comprehensive optimization of thermal resistance and voltage boosting conversion," Applied Energy, Elsevier, vol. 312(C).
    3. Tian, Yu & Ren, Guang-Kun & Wei, Zhijie & Zheng, Zhe & Deng, Shunjie & Ma, Li & Li, Yuansen & Zhou, Zhifang & Chen, Xiaohong & Shi, Yan & Lin, Yuan-Hua, 2024. "Advances of thermoelectric power generation for room temperature: Applications, devices, materials and beyond," Renewable Energy, Elsevier, vol. 226(C).

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