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Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project

Author

Listed:
  • Bárbara Canto

    (AMO GmbH)

  • Martin Otto

    (AMO GmbH)

  • Arantxa Maestre

    (Graphenea S.A.
    ASM International)

  • Alba Centeno

    (Graphenea S.A.)

  • Amaia Zurutuza

    (Graphenea S.A.)

  • Bianca Robertz

    (AMO GmbH)

  • Eros Reato

    (Chair of Electronic Devices)

  • Bartos Chmielak

    (AMO GmbH)

  • Stefanie L. Stoll

    (AMO GmbH)

  • Andreas Hemmetter

    (AMO GmbH
    Chair of Electronic Devices)

  • Florian Schlachter

    (AMO GmbH)

  • Lisa Ehlert

    (AMO GmbH)

  • Sha Li

    (AMO GmbH
    Heraeus Precious Metals GmbH & Co. KG Herauesstr. 12-14)

  • Daniel Neumaier

    (AMO GmbH
    Chair of Smart Sensor Systems)

  • Gordon Rinke

    (AMO GmbH)

  • Zhenxing Wang

    (AMO GmbH)

  • Max C. Lemme

    (AMO GmbH
    Chair of Electronic Devices)

Abstract

The commercialization of electronic devices based on graphene has not yet been successful, even 20 years after its first isolation. To this end, the European Commission is supporting research toward establishing a European experimental pilot line for electronic and optoelectronic devices based on graphene and related two-dimensional (2D) materials, namely the Experimental Pilot Line (2D-EPL) project. Here, we report the results obtained during the first and third multi-project wafer (MPW) runs completed at the end of 2022 (MPW run 1) and 2023 (MPW run 3) as an outcome of the 2D-EPL. Test devices were measured across the wafers to assess the device quality and variability before delivering the fabricated dies to the customers. Raman spectroscopy confirmed minimal structural changes in the graphene caused by the fabrication process, while electrical measurements of two different device types verified the device specifications defined in the process design kit.

Suggested Citation

  • Bárbara Canto & Martin Otto & Arantxa Maestre & Alba Centeno & Amaia Zurutuza & Bianca Robertz & Eros Reato & Bartos Chmielak & Stefanie L. Stoll & Andreas Hemmetter & Florian Schlachter & Lisa Ehlert, 2025. "Multi-project wafer runs for electronic graphene devices in the European 2D-Experimental Pilot Line project," Nature Communications, Nature, vol. 16(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-56357-0
    DOI: 10.1038/s41467-025-56357-0
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    References listed on IDEAS

    as
    1. Arne Quellmalz & Xiaojing Wang & Simon Sawallich & Burkay Uzlu & Martin Otto & Stefan Wagner & Zhenxing Wang & Maximilian Prechtl & Oliver Hartwig & Siwei Luo & Georg S. Duesberg & Max C. Lemme & Kris, 2021. "Large-area integration of two-dimensional materials and their heterostructures by wafer bonding," Nature Communications, Nature, vol. 12(1), pages 1-11, December.
    2. Max C. Lemme & Deji Akinwande & Cedric Huyghebaert & Christoph Stampfer, 2022. "2D materials for future heterogeneous electronics," Nature Communications, Nature, vol. 13(1), pages 1-5, December.
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