IDEAS home Printed from https://ideas.repec.org/a/nat/natcom/v15y2024i1d10.1038_s41467-024-45130-4.html
   My bibliography  Save this article

Sub-volt high-speed silicon MOSCAP microring modulator driven by high-mobility conductive oxide

Author

Listed:
  • Wei-Che Hsu

    (Oregon State University
    Baylor University)

  • Nabila Nujhat

    (Oregon State University)

  • Benjamin Kupp

    (Oregon State University)

  • John F. Conley

    (Oregon State University)

  • Haisheng Rong

    (Intel Corporation, 3600 Juliette Ln)

  • Ranjeet Kumar

    (Intel Corporation, 3600 Juliette Ln)

  • Alan X. Wang

    (Oregon State University
    Baylor University)

Abstract

Silicon microring modulator plays a critical role in energy-efficient optical interconnect and optical computing owing to its ultra-compact footprint and capability for on-chip wavelength-division multiplexing. However, existing silicon microring modulators usually require more than 2 V of driving voltage (Vpp), which is limited by both material properties and device structures. Here, we present a metal-oxide-semiconductor capacitor microring modulator through heterogeneous integration between silicon photonics and titanium-doped indium oxide, which is a high-mobility transparent conductive oxide (TCO) with a strong plasma dispersion effect. The device is co-fabricated by Intel’s photonics fab and our in-house TCO patterning processes, which exhibits a high modulation efficiency of 117 pm/V and consequently can be driven by a very low Vpp of 0.8 V. At a 11 GHz modulation bandwidth where the modulator is limited by the RC bandwidth, we obtained 25 Gb/s clear eye diagrams with energy efficiency of 53 fJ/bit.

Suggested Citation

  • Wei-Che Hsu & Nabila Nujhat & Benjamin Kupp & John F. Conley & Haisheng Rong & Ranjeet Kumar & Alan X. Wang, 2024. "Sub-volt high-speed silicon MOSCAP microring modulator driven by high-mobility conductive oxide," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
  • Handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-45130-4
    DOI: 10.1038/s41467-024-45130-4
    as

    Download full text from publisher

    File URL: https://www.nature.com/articles/s41467-024-45130-4
    File Function: Abstract
    Download Restriction: no

    File URL: https://libkey.io/10.1038/s41467-024-45130-4?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    References listed on IDEAS

    as
    1. Qianfan Xu & Bradley Schmidt & Sameer Pradhan & Michal Lipson, 2005. "Micrometre-scale silicon electro-optic modulator," Nature, Nature, vol. 435(7040), pages 325-327, May.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Yuan Yuan & Yiwei Peng & Wayne V. Sorin & Stanley Cheung & Zhihong Huang & Di Liang & Marco Fiorentino & Raymond G. Beausoleil, 2024. "A 5 × 200 Gbps microring modulator silicon chip empowered by two-segment Z-shape junctions," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    2. Mikhail Churaev & Rui Ning Wang & Annina Riedhauser & Viacheslav Snigirev & Terence Blésin & Charles Möhl & Miles H. Anderson & Anat Siddharth & Youri Popoff & Ute Drechsler & Daniele Caimi & Simon Hö, 2023. "A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    3. Claudio U. Hail & Morgan Foley & Ruzan Sokhoyan & Lior Michaeli & Harry A. Atwater, 2023. "High quality factor metasurfaces for two-dimensional wavefront manipulation," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    4. Seong Won Lee & Jong Seok Lee & Woo Hun Choi & Daegwang Choi & Su-Hyun Gong, 2024. "Ultra-compact exciton polariton modulator based on van der Waals semiconductors," Nature Communications, Nature, vol. 15(1), pages 1-7, December.
    5. Emma Lomonte & Martin A. Wolff & Fabian Beutel & Simone Ferrari & Carsten Schuck & Wolfram H. P. Pernice & Francesco Lenzini, 2021. "Single-photon detection and cryogenic reconfigurability in lithium niobate nanophotonic circuits," Nature Communications, Nature, vol. 12(1), pages 1-10, December.
    6. I-Tung Chen & Bingzhao Li & Seokhyeong Lee & Srivatsa Chakravarthi & Kai-Mei Fu & Mo Li, 2023. "Optomechanical ring resonator for efficient microwave-optical frequency conversion," Nature Communications, Nature, vol. 14(1), pages 1-8, December.
    7. Dmitry Kazakov & Theodore P. Letsou & Maximilian Beiser & Yiyang Zhi & Nikola Opačak & Marco Piccardo & Benedikt Schwarz & Federico Capasso, 2024. "Active mid-infrared ring resonators," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    8. Michael Dubrovsky & Marshall Ball & Bogdan Penkovsky, 2019. "Optical Proof of Work," Papers 1911.05193, arXiv.org, revised Feb 2020.

    More about this item

    Statistics

    Access and download statistics

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:nat:natcom:v:15:y:2024:i:1:d:10.1038_s41467-024-45130-4. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Sonal Shukla or Springer Nature Abstracting and Indexing (email available below). General contact details of provider: http://www.nature.com .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.