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Silicone engineered anisotropic lithography for ultrahigh-density OLEDs

Author

Listed:
  • Hyukmin Kweon

    (Hanyang University)

  • Keun-Yeong Choi

    (Soongsil University)

  • Han Wool Park

    (Hanyang University)

  • Ryungyu Lee

    (Soongsil University)

  • Ukjin Jeong

    (Hanyang University)

  • Min Jung Kim

    (Dongguk University)

  • Hyunmin Hong

    (Dongguk University)

  • Borina Ha

    (Hanyang University)

  • Sein Lee

    (Yonsei University)

  • Jang-Yeon Kwon

    (Yonsei University)

  • Kwun-Bum Chung

    (Dongguk University)

  • Moon Sung Kang

    (Sogang University
    Sogang University)

  • Hojin Lee

    (Soongsil University
    Soongsil University)

  • Do Hwan Kim

    (Hanyang University
    Hanyang University)

Abstract

Ultrahigh-resolution patterning with high-throughput and high-fidelity is highly in demand for expanding the potential of organic light-emitting diodes (OLEDs) from mobile and TV displays into near-to-eye microdisplays. However, current patterning techniques so far suffer from low resolution, consecutive pattern for RGB pixelation, low pattern fidelity, and throughput issue. Here, we present a silicone engineered anisotropic lithography of the organic light-emitting semiconductor (OLES) that in-situ forms a non-volatile etch-blocking layer during reactive ion etching. This unique feature not only slows the etch rate but also enhances the anisotropy of etch direction, leading to gain delicate control in forming ultrahigh-density multicolor OLES patterns (up to 4500 pixels per inch) through photolithography. This patterning strategy inspired by silicon etching chemistry is expected to provide new insights into ultrahigh-density OLED microdisplays.

Suggested Citation

  • Hyukmin Kweon & Keun-Yeong Choi & Han Wool Park & Ryungyu Lee & Ukjin Jeong & Min Jung Kim & Hyunmin Hong & Borina Ha & Sein Lee & Jang-Yeon Kwon & Kwun-Bum Chung & Moon Sung Kang & Hojin Lee & Do Hwa, 2022. "Silicone engineered anisotropic lithography for ultrahigh-density OLEDs," Nature Communications, Nature, vol. 13(1), pages 1-10, December.
    • Handle: RePEc:nat:natcom:v:13:y:2022:i:1:d:10.1038_s41467-022-34531-y
    DOI: 10.1038/s41467-022-34531-y
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    References listed on IDEAS

    as
    1. Min Je Kim & Myeongjae Lee & Honggi Min & Seunghan Kim & Jeehye Yang & Hyukmin Kweon & Wooseop Lee & Do Hwan Kim & Jong-Ho Choi & Du Yeol Ryu & Moon Sung Kang & BongSoo Kim & Jeong Ho Cho, 2020. "Universal three-dimensional crosslinker for all-photopatterned electronics," Nature Communications, Nature, vol. 11(1), pages 1-11, December.
    2. C. David Müller & Aurélie Falcou & Nina Reckefuss & Markus Rojahn & Valèrie Wiederhirn & Paula Rudati & Holger Frohne & Oskar Nuyken & Heinrich Becker & Klaus Meerholz, 2003. "Multi-colour organic light-emitting displays by solution processing," Nature, Nature, vol. 421(6925), pages 829-833, February.
    3. Zhitao Zhang & Weichen Wang & Yuanwen Jiang & Yi-Xuan Wang & Yilei Wu & Jian-Cheng Lai & Simiao Niu & Chengyi Xu & Chien-Chung Shih & Cheng Wang & Hongping Yan & Luke Galuska & Nathaniel Prine & Hung-, 2022. "High-brightness all-polymer stretchable LED with charge-trapping dilution," Nature, Nature, vol. 603(7902), pages 624-630, March.
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