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Theoretical and Experimental Studies of a PDMS Pneumatic Microactuator for Microfluidic Systems

Author

Listed:
  • Xuling Liu

    (School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China)

  • Huafeng Song

    (Henan Xixi Highway Construction Co., Ltd., Nanyang 474450, China)

  • Wensi Zuo

    (School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China)

  • Guoyong Ye

    (School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China)

  • Shaobo Jin

    (School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China)

  • Liangwen Wang

    (School of Mechanical and Electronic Engineering, Zhengzhou University of Light Industry, Zhengzhou 450002, China)

  • Songjing Li

    (Department of Fluid Control and Automation, Harbin Institute of Technology, Harbin 150001, China)

Abstract

The compact, simple, and fast-reaction pneumatic microactuator is significant for the integration and high efficiency of pneumatic systems. In this work, the structure, working principle, and multiphysical model of an on-chip pneumatic microactuator are presented. The on-chip pneumatic microactuator is mainly composed of two parts: a polydimethylsiloxane (PDMS) thin membrane and an actuated chamber. The air pressure in the actuated chamber drives the thin elastic membrane to deformation. Dynamic response mathematical models of the actuated chamber for charging and exhaust with variable volume are established, and the deformation characteristics of the polydimethylsiloxane (PDMS) actuated membrane, the capacity of the actuated chamber, and the valve opening of the on-off membrane microvalve are simulated and analyzed to explore the response characteristics of the proposed pneumatic microactuator. Samples valving analysis of the on-chip membrane microvalve and mixing performance of the micromixer integrated with the pneumatic microactuator are tested to evaluate the driving capability of the pneumatic microactuator, and the results show that the response performance of the actuated time fully satisfies the needs of a pneumatic microfluidic chip for most applications.

Suggested Citation

  • Xuling Liu & Huafeng Song & Wensi Zuo & Guoyong Ye & Shaobo Jin & Liangwen Wang & Songjing Li, 2022. "Theoretical and Experimental Studies of a PDMS Pneumatic Microactuator for Microfluidic Systems," Energies, MDPI, vol. 15(22), pages 1-19, November.
    • Handle: RePEc:gam:jeners:v:15:y:2022:i:22:p:8731-:d:978529
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    References listed on IDEAS

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    2. George M. Whitesides, 2006. "The origins and the future of microfluidics," Nature, Nature, vol. 442(7101), pages 368-373, July.
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