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Enabling ultra-flexible inorganic thin-film-based thermoelectric devices by introducing nanoscale titanium layers

Author

Listed:
  • Ming Tan

    (Tiangong University
    Queensland University of Technology)

  • Xiao-Lei Shi

    (Queensland University of Technology)

  • Wei-Di Liu

    (Queensland University of Technology)

  • Yong Jiang

    (Tiangong University)

  • Si-Qi Liu

    (Queensland University of Technology)

  • Tianyi Cao

    (Queensland University of Technology)

  • Wenyi Chen

    (Queensland University of Technology)

  • Meng Li

    (Queensland University of Technology)

  • Tong Lin

    (Tiangong University)

  • Yuan Deng

    (Hangzhou Innovation Institute of Beihang University)

  • Shaomin Liu

    (Great Bay University)

  • Zhi-Gang Chen

    (Queensland University of Technology)

Abstract

Here, we design exotic interfaces within a flexible thermoelectric device, incorporating a polyimide substrate, Ti contact layer, Cu electrode, Ti barrier layer, and thermoelectric thin film. The device features 162 pairs of thin-film legs with high room-temperature performance, using p-Bi0.5Sb1.5Te3 and n-Bi2Te2.7Se0.3, with figure-of-merit values of 1.39 and 1.44, respectively. The 10 nm Ti contact layer creates a strong bond between the substrate and the Cu electrode, while the 10 nm Ti barrier layer significantly reduces internal resistance and enhances the tightness between thermoelectric thin films and Cu electrodes. This enables both exceptional flexibility and an impressive power density of 108 μW cm−2 under a temperature difference of just 5 K, with a normalized power density exceeding 4 μW cm−2 K−2. When attached to a 50 °C irregular heat source, three series-connected devices generate 1.85 V, powering a light-emitting diode without the need for an additional heat sink or booster.

Suggested Citation

  • Ming Tan & Xiao-Lei Shi & Wei-Di Liu & Yong Jiang & Si-Qi Liu & Tianyi Cao & Wenyi Chen & Meng Li & Tong Lin & Yuan Deng & Shaomin Liu & Zhi-Gang Chen, 2025. "Enabling ultra-flexible inorganic thin-film-based thermoelectric devices by introducing nanoscale titanium layers," Nature Communications, Nature, vol. 16(1), pages 1-12, December.
    • Handle: RePEc:nat:natcom:v:16:y:2025:i:1:d:10.1038_s41467-025-56015-5
    DOI: 10.1038/s41467-025-56015-5
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