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Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays

Author

Listed:
  • Lei Han

    (Shanghai Jiao Tong University
    Shanghai Jiao Tong University)

  • Simon Ogier

    (Thomas Wright Way)

  • Jun Li

    (Shanghai Jiao Tong University
    Shanghai Jiao Tong University)

  • Dan Sharkey

    (Thomas Wright Way)

  • Xiaokuan Yin

    (Shanghai Jiao Tong University
    Shanghai Jiao Tong University)

  • Andrew Baker

    (Thomas Wright Way)

  • Alejandro Carreras

    (Thomas Wright Way)

  • Fangyuan Chang

    (Shanghai Jiao Tong University)

  • Kai Cheng

    (Nanopolis Suzhou, 99 Jinji Avenue)

  • Xiaojun Guo

    (Shanghai Jiao Tong University
    Shanghai Jiao Tong University)

Abstract

The organic thin-film transistor is advantageous for monolithic three-dimensional integration attributed to low temperature and facile solution processing. However, the electrical properties of solution deposited organic semiconductor channels are very sensitive to the substrate surface and processing conditions. An organic-last integration technology is developed for wafer-scale heterogeneous integration of a multi-layer organic material stack from solution onto the non-even substrate surface of a III-V micro light emitting diode plane. A via process is proposed to make the via interconnection after fabrication of the organic thin-film transistor. Low-defect uniform organic semiconductor and dielectric layers can then be formed on top to achieve high-quality interfaces. The resulting organic thin-film transistors exhibit superior performance for driving micro light emitting diode displays, in terms of milliampere driving current, and large ON/OFF current ratio approaching 1010 with excellent uniformity and reliability. Active-matrix micro light emitting diode displays are demonstrated with highest brightness of 150,000 nits and highest resolution of 254 pixels-per-inch.

Suggested Citation

  • Lei Han & Simon Ogier & Jun Li & Dan Sharkey & Xiaokuan Yin & Andrew Baker & Alejandro Carreras & Fangyuan Chang & Kai Cheng & Xiaojun Guo, 2023. "Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays," Nature Communications, Nature, vol. 14(1), pages 1-9, December.
    • Handle: RePEc:nat:natcom:v:14:y:2023:i:1:d:10.1038_s41467-023-42443-8
    DOI: 10.1038/s41467-023-42443-8
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    1. Jiho Shin & Hyunseok Kim & Suresh Sundaram & Junseok Jeong & Bo-In Park & Celesta S. Chang & Joonghoon Choi & Taemin Kim & Mayuran Saravanapavanantham & Kuangye Lu & Sungkyu Kim & Jun Min Suh & Ki Seo, 2023. "Vertical full-colour micro-LEDs via 2D materials-based layer transfer," Nature, Nature, vol. 614(7946), pages 81-87, February.
    2. Muhammad R. Niazi & Ruipeng Li & Er Qiang Li & Ahmad R. Kirmani & Maged Abdelsamie & Qingxiao Wang & Wenyang Pan & Marcia M. Payne & John E. Anthony & Detlef-M. Smilgies & Sigurdur T. Thoroddsen & Emm, 2015. "Solution-printed organic semiconductor blends exhibiting transport properties on par with single crystals," Nature Communications, Nature, vol. 6(1), pages 1-10, December.
    3. Deepak Venkateshvaran & Mark Nikolka & Aditya Sadhanala & Vincent Lemaur & Mateusz Zelazny & Michal Kepa & Michael Hurhangee & Auke Jisk Kronemeijer & Vincenzo Pecunia & Iyad Nasrallah & Igor Romanov , 2014. "Approaching disorder-free transport in high-mobility conjugated polymers," Nature, Nature, vol. 515(7527), pages 384-388, November.
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