Author
Listed:
- Jiho Shin
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Hyunseok Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Suresh Sundaram
(CNRS, IRL 2958, GT−CNRS, Georgia Tech-Lorraine)
- Junseok Jeong
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Sejong University)
- Bo-In Park
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Celesta S. Chang
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Joonghoon Choi
(Sejong University)
- Taemin Kim
(Yonsei University)
- Mayuran Saravanapavanantham
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Kuangye Lu
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Sungkyu Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Sejong University)
- Jun Min Suh
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Ki Seok Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Min-Kyu Song
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Yunpeng Liu
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Kuan Qiao
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Jae Hwan Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Yeongin Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
University of Cincinnati)
- Ji-Hoon Kang
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Jekyung Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Doeon Lee
(University of Virginia)
- Jaeyong Lee
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Justin S. Kim
(Washington University in Saint Louis)
- Han Eol Lee
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Division of Advanced Materials Engineering, Jeonbuk National University)
- Hanwool Yeon
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Gwangju Institute of Science and Technology)
- Hyun S. Kum
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Yonsei University)
- Sang-Hoon Bae
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Washington University in Saint Louis)
- Vladimir Bulovic
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Ki Jun Yu
(Yonsei University)
- Kyusang Lee
(University of Virginia)
- Kwanghun Chung
(Massachusetts Institute of Technology
Massachusetts Institute of Technology)
- Young Joon Hong
(Sejong University)
- Abdallah Ougazzaden
(CNRS, IRL 2958, GT−CNRS, Georgia Tech-Lorraine
Georgia Institute of Technology)
- Jeehwan Kim
(Massachusetts Institute of Technology
Massachusetts Institute of Technology
Massachusetts Institute of Technology)
Abstract
Micro-LEDs (µLEDs) have been explored for augmented and virtual reality display applications that require extremely high pixels per inch and luminance1,2. However, conventional manufacturing processes based on the lateral assembly of red, green and blue (RGB) µLEDs have limitations in enhancing pixel density3–6. Recent demonstrations of vertical µLED displays have attempted to address this issue by stacking freestanding RGB LED membranes and fabricating top-down7–14, but minimization of the lateral dimensions of stacked µLEDs has been difficult. Here we report full-colour, vertically stacked µLEDs that achieve, to our knowledge, the highest array density (5,100 pixels per inch) and the smallest size (4 µm) reported to date. This is enabled by a two-dimensional materials-based layer transfer technique15–18 that allows the growth of RGB LEDs of near-submicron thickness on two-dimensional material-coated substrates via remote or van der Waals epitaxy, mechanical release and stacking of LEDs, followed by top-down fabrication. The smallest-ever stack height of around 9 µm is the key enabler for record high µLED array density. We also demonstrate vertical integration of blue µLEDs with silicon membrane transistors for active matrix operation. These results establish routes to creating full-colour µLED displays for augmented and virtual reality, while also offering a generalizable platform for broader classes of three-dimensional integrated devices.
Suggested Citation
Jiho Shin & Hyunseok Kim & Suresh Sundaram & Junseok Jeong & Bo-In Park & Celesta S. Chang & Joonghoon Choi & Taemin Kim & Mayuran Saravanapavanantham & Kuangye Lu & Sungkyu Kim & Jun Min Suh & Ki Seo, 2023.
"Vertical full-colour micro-LEDs via 2D materials-based layer transfer,"
Nature, Nature, vol. 614(7946), pages 81-87, February.
Handle:
RePEc:nat:nature:v:614:y:2023:i:7946:d:10.1038_s41586-022-05612-1
DOI: 10.1038/s41586-022-05612-1
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Citations
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Cited by:
- Jiaming Wang & Chen Ji & Jing Lang & Fujun Xu & Lisheng Zhang & Xiangning Kang & Zhixin Qin & Xuelin Yang & Ning Tang & Xinqiang Wang & Weikun Ge & Bo Shen, 2024.
"Wafer-scale vertical injection III-nitride deep-ultraviolet light emitters,"
Nature Communications, Nature, vol. 15(1), pages 1-9, December.
- Sang Hyun Park & Tae Jin Kim & Han Eol Lee & Boo Soo Ma & Myoung Song & Min Seo Kim & Jung Ho Shin & Seung Hyung Lee & Jae Hee Lee & Young Bin Kim & Ki Yun Nam & Hong-Jin Park & Taek-Soo Kim & Keon Ja, 2023.
"Universal selective transfer printing via micro-vacuum force,"
Nature Communications, Nature, vol. 14(1), pages 1-11, December.
- Jing Wang & Deshan Liang & Jing Ma & Yuanyuan Fan & Ji Ma & Hasnain Mehdi Jafri & Huayu Yang & Qinghua Zhang & Yue Wang & Changqing Guo & Shouzhe Dong & Di Liu & Xueyun Wang & Jiawang Hong & Nan Zhang, 2023.
"Polar Solomon rings in ferroelectric nanocrystals,"
Nature Communications, Nature, vol. 14(1), pages 1-9, December.
- Jiawei Lv & Jeong Hyun Han & Geonho Han & Seongmin An & Seung Ju Kim & Ryeong Myeong Kim & Jung‐El Ryu & Rena Oh & Hyuckjin Choi & In Han Ha & Yoon Ho Lee & Minje Kim & Gyeong-Su Park & Ho Won Jang & , 2024.
"Spatiotemporally modulated full-polarized light emission for multiplexed optical encryption,"
Nature Communications, Nature, vol. 15(1), pages 1-10, December.
- Lei Han & Simon Ogier & Jun Li & Dan Sharkey & Xiaokuan Yin & Andrew Baker & Alejandro Carreras & Fangyuan Chang & Kai Cheng & Xiaojun Guo, 2023.
"Wafer-scale organic-on-III-V monolithic heterogeneous integration for active-matrix micro-LED displays,"
Nature Communications, Nature, vol. 14(1), pages 1-9, December.
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