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Investigation of Heat Diffusion at Nanoscale Based on Thermal Analysis of Real Test Structure

Author

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  • Tomasz Raszkowski

    (Department of Microelectronics and Computer Science, Faculty of Electrical, Electronic, Computer and Control Engineering, Lodz University of Technology, 90-924 Lodz, Poland)

  • Mariusz Zubert

    (Department of Microelectronics and Computer Science, Faculty of Electrical, Electronic, Computer and Control Engineering, Lodz University of Technology, 90-924 Lodz, Poland)

Abstract

This paper presents an analysis related to thermal simulation of the test structure dedicated to heat-diffusion investigation at the nanoscale. The test structure consists of thin platinum resistors mounted on wafer made of silicon dioxide. A bottom part of the structure contains the silicon layer. Simulations were carried out based on the thermal simulator prepared by the authors. Simulation results were compared with real measurement outputs yielded for the mentioned test structure. The authors also propose the Grünwald–Letnikov fractional space-derivative Dual-Phase-Lag heat transfer model as a more accurate model than the classical Fourier–Kirchhoff (F–K) heat transfer model. The approximation schema of proposed model is also proposed. The accuracy and computational properties of both numerical algorithms are presented in detail.

Suggested Citation

  • Tomasz Raszkowski & Mariusz Zubert, 2020. "Investigation of Heat Diffusion at Nanoscale Based on Thermal Analysis of Real Test Structure," Energies, MDPI, vol. 13(9), pages 1-18, May.
    • Handle: RePEc:gam:jeners:v:13:y:2020:i:9:p:2379-:d:355990
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    References listed on IDEAS

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    1. Changpin Li & Deliang Qian & YangQuan Chen, 2011. "On Riemann-Liouville and Caputo Derivatives," Discrete Dynamics in Nature and Society, Hindawi, vol. 2011, pages 1-15, March.
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    Cited by:

    1. Tomasz Raszkowski & Mariusz Zubert, 2020. "Analysis of Algorithm Efficiency for Heat Diffusion at Nanoscale Based on a MEMS Structure Investigation," Energies, MDPI, vol. 13(10), pages 1-15, May.
    2. Krzysztof Górecki & Krzysztof Posobkiewicz, 2022. "Cooling Systems of Power Semiconductor Devices—A Review," Energies, MDPI, vol. 15(13), pages 1-29, June.
    3. Mariusz Zubert & Zbigniew Kulesza & Mariusz Jankowski & Andrzej Napieralski, 2021. "Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures," Energies, MDPI, vol. 14(15), pages 1-14, July.

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