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Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures

Author

Listed:
  • Mariusz Zubert

    (Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland)

  • Zbigniew Kulesza

    (Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland)

  • Mariusz Jankowski

    (Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland)

  • Andrzej Napieralski

    (Department of Microelectronics and Computer Science—DMCS, Lodz University of Technology, 90-924 Lodz, Poland)

Abstract

This paper presents the methodology of material parameters’ estimation for the dual-phase-lag (DPL) model at the nanoscale in modern integration circuit (IC) structures. The analyses and measurements performed were used in the unique dedicated micro-electro-mechanical system (MEMS) test structure. The electric and thermal domain of this structure was analysed. Finally, the silicon dioxide (SiO 2 ) temperature time-lag estimation procedure is presented based on the scattering parameters measured by a vector network analyser for the considered MEMS structure together with the 2-omega method. The proposed methodology has the ability to estimate the time-lag parameter with high accuracy and is also suitable for the temperature time-lag estimation for other manufacturing process technologies of ICs and other insulation materials used for integrated circuits such as silicon nitride (Si 3 N 4 ), titanium nitride (TiN), and hafnium dioxide (HfO 2 ).

Suggested Citation

  • Mariusz Zubert & Zbigniew Kulesza & Mariusz Jankowski & Andrzej Napieralski, 2021. "Application of Scattering Parameters to DPL Time-Lag Parameter Estimation at Nanoscale in Modern Integration Circuit Structures," Energies, MDPI, vol. 14(15), pages 1-14, July.
    • Handle: RePEc:gam:jeners:v:14:y:2021:i:15:p:4425-:d:599328
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    References listed on IDEAS

    as
    1. Fournier, D. & Boccara, A.C., 1989. "Heterogeneous media and rough surfaces: A fractal approach for heat diffusion studies," Physica A: Statistical Mechanics and its Applications, Elsevier, vol. 157(1), pages 587-592.
    2. Tomasz Raszkowski & Mariusz Zubert, 2020. "Investigation of Heat Diffusion at Nanoscale Based on Thermal Analysis of Real Test Structure," Energies, MDPI, vol. 13(9), pages 1-18, May.
    3. Tomasz Raszkowski & Mariusz Zubert, 2020. "Analysis of Algorithm Efficiency for Heat Diffusion at Nanoscale Based on a MEMS Structure Investigation," Energies, MDPI, vol. 13(10), pages 1-15, May.
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