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Capacitated qualification management in semiconductor manufacturing

Author

Listed:
  • Rowshannahad, M.
  • Dauzère-Pérès, S.
  • Cassini, B.

Abstract

In semiconductor manufacturing, machines are usually qualified to process a limited number of recipes related to products. It is possible to qualify recipes on machines to better balance the workload on machines in a given toolset. However, all machines of a toolset do not have equal uptimes and may further suffer from scheduled and unscheduled downtimes. This may heavily impact an efficient recipe-to-machine qualification configuration. In this paper, we propose indicators for recipe-to-machine qualification management based on the overall toolset workload balance under capacity constraints. The models, deployed in industry, demonstrate that the toolset capacity must be considered while managing qualifications. Industrial experiments show how capacity consideration leads to an optimal qualification configuration and therefore capacity utilization.

Suggested Citation

  • Rowshannahad, M. & Dauzère-Pérès, S. & Cassini, B., 2015. "Capacitated qualification management in semiconductor manufacturing," Omega, Elsevier, vol. 54(C), pages 50-59.
    • Handle: RePEc:eee:jomega:v:54:y:2015:i:c:p:50-59
    DOI: 10.1016/j.omega.2015.01.012
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    References listed on IDEAS

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    1. Boyer, Kenneth K. & Leong, G. Keong, 1996. "Manufacturing flexibility at the plant level," Omega, Elsevier, vol. 24(5), pages 495-510, October.
    2. Ruiz-Torres, Alex J. & Ho, Johnny C. & Ablanedo-Rosas, José H., 2011. "Makespan and workstation utilization minimization in a flowshop with operations flexibility," Omega, Elsevier, vol. 39(3), pages 273-282, June.
    3. Aubry, A. & Rossi, A. & Espinouse, M.-L. & Jacomino, M., 2008. "Minimizing setup costs for parallel multi-purpose machines under load-balancing constraint," European Journal of Operational Research, Elsevier, vol. 187(3), pages 1115-1125, June.
    4. David G. Luenberger & Yinyu Ye, 2008. "Linear and Nonlinear Programming," International Series in Operations Research and Management Science, Springer, edition 0, number 978-0-387-74503-9, July-Dece.
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    Cited by:

    1. Perraudat, Antoine & Dauzère-Pérès, Stéphane & Vialletelle, Philippe, 2022. "Robust tactical qualification decisions in flexible manufacturing systems," Omega, Elsevier, vol. 106(C).
    2. Bai, Chunguang & Shi, Baofeng & Liu, Feng & Sarkis, Joseph, 2019. "Banking credit worthiness: Evaluating the complex relationships," Omega, Elsevier, vol. 83(C), pages 26-38.
    3. Gabriel Amaro & Diego Jacinto Fiorotto & Washington Alves Oliveira, 2023. "Impact analysis of flexibility on the integrated lot sizing and supplier selection problem," TOP: An Official Journal of the Spanish Society of Statistics and Operations Research, Springer;Sociedad de Estadística e Investigación Operativa, vol. 31(1), pages 236-266, April.
    4. Christ, Quentin & Dauzère-Pérès, Stéphane & Lepelletier, Guillaume, 2019. "An Iterated Min–Max procedure for practical workload balancing on non-identical parallel machines in manufacturing systems," European Journal of Operational Research, Elsevier, vol. 279(2), pages 419-428.
    5. Fiorotto, Diego Jacinto & Jans, Raf & Alexandre de Araujo, Silvio, 2018. "Process flexibility and the chaining principle in lot sizing problems," International Journal of Production Economics, Elsevier, vol. 204(C), pages 244-263.

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