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Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference

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  • Yuan, Tao
  • Kuo, Way

Abstract

Defects on semiconductor wafers tend to cluster and the spatial defect patterns contain useful information about potential problems in the manufacturing process. This study proposes to use model-based clustering algorithms via Bayesian inferences for spatial defect pattern recognition on semiconductor wafers. These new algorithms can find the number of defect clusters as well as identify the pattern of each cluster automatically. They are capable of detecting curvilinear patterns, ellipsoidal patterns and nonuniform global defect patterns. Promising results have been obtained from simulation studies.

Suggested Citation

  • Yuan, Tao & Kuo, Way, 2008. "Spatial defect pattern recognition on semiconductor wafers using model-based clustering and Bayesian inference," European Journal of Operational Research, Elsevier, vol. 190(1), pages 228-240, October.
    • Handle: RePEc:eee:ejores:v:190:y:2008:i:1:p:228-240
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    References listed on IDEAS

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    1. Hwang, Jung Yoon & Kuo, Way, 2007. "Model-based clustering for integrated circuit yield enhancement," European Journal of Operational Research, Elsevier, vol. 178(1), pages 143-153, April.
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    Cited by:

    1. Parag Parashar & Chun Han Chen & Chandni Akbar & Sze Ming Fu & Tejender S Rawat & Sparsh Pratik & Rajat Butola & Shih Han Chen & Albert S Lin, 2019. "Analytics-statistics mixed training and its fitness to semisupervised manufacturing," PLOS ONE, Public Library of Science, vol. 14(8), pages 1-18, August.
    2. Chia-Yu Hsu & Ju-Chien Chien, 2022. "Ensemble convolutional neural networks with weighted majority for wafer bin map pattern classification," Journal of Intelligent Manufacturing, Springer, vol. 33(3), pages 831-844, March.

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    1. Chia-Yu Hsu & Ju-Chien Chien, 2022. "Ensemble convolutional neural networks with weighted majority for wafer bin map pattern classification," Journal of Intelligent Manufacturing, Springer, vol. 33(3), pages 831-844, March.
    2. Haijun Li & Susan Xu & Way Kuo, 2014. "Asymptotic analysis of simultaneous damages in spatial Boolean models," Annals of Operations Research, Springer, vol. 212(1), pages 139-154, January.

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