IDEAS home Printed from https://ideas.repec.org/a/eee/appene/v228y2018icp881-890.html
   My bibliography  Save this article

A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

Author

Listed:
  • He, Xianming
  • Wen, Quan
  • Lu, Zhuang
  • Shang, Zhengguo
  • Wen, Zhiyu

Abstract

Piezoelectric vibration-based energy harvesting is a promising alternative for the durable and reliable power supplies for the low-powered wireless sensor networks nodes. However, improving the piezoelectric vibration-based energy harvester’s energy conversion efficiency related closely on the structure parameters and materials become significant and urgent. In this paper, a micro-electromechanical systems (MEMS) cantilever-based aluminum nitride (AlN) vibration energy harvester is presented, modeled, optimized and fabricated. The c-axis oriented AlN piezo thin film is deposited by the pulsed direct-current magnetron sputtering with the optimized process parameters. Furthermore, the coupled distributed parameter model is derived in detailed, verified by using the ANSYS finite element analysis, and applied to the optimization of structural parameters and load resistance. Finally, the prototype of the device is fabricated by the standard bulk-silicon technology. As a result, at 1g and 210.85 Hz, the maximum output root mean square (RMS) voltage can reach to 4.66 V, the output average power and output average power density of the prototype is up to 56.4 μW and 854.55 μW/(cm3·g2) at a load resistance of 146.6 kΩ, respectively. The experimental results agree well with theoretical analysis. The derived CDP model has an important and effective guiding role in cantilever based piezoelectric vibration energy harvester for structural design and performance optimization, especially for the device with long tip mass. The prototype has wide application prospects in the fields of the wireless sensor network node such as the structural health monitoring system.

Suggested Citation

  • He, Xianming & Wen, Quan & Lu, Zhuang & Shang, Zhengguo & Wen, Zhiyu, 2018. "A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering," Applied Energy, Elsevier, vol. 228(C), pages 881-890.
    • Handle: RePEc:eee:appene:v:228:y:2018:i:c:p:881-890
    DOI: 10.1016/j.apenergy.2018.07.001
    as

    Download full text from publisher

    File URL: http://www.sciencedirect.com/science/article/pii/S0306261918310286
    Download Restriction: Full text for ScienceDirect subscribers only
    File URL: https://libkey.io/10.1016/j.apenergy.2018.07.001?utm_source=ideas
    LibKey link: if access is restricted and if your library uses this service, LibKey will redirect you to where you can use your library subscription to access this item
    ---><---

    As the access to this document is restricted, you may want to search for a different version of it.

    References listed on IDEAS

    as
    1. Han, Nuomin & Zhao, Dan & Schluter, Jorg U. & Goh, Ernest Seach & Zhao, He & Jin, Xiao, 2016. "Performance evaluation of 3D printed miniature electromagnetic energy harvesters driven by air flow," Applied Energy, Elsevier, vol. 178(C), pages 672-680.
    2. Ju, Suna & Ji, Chang-Hyeon, 2018. "Impact-based piezoelectric vibration energy harvester," Applied Energy, Elsevier, vol. 214(C), pages 139-151.
    3. Zhang, Yulong & Wang, Tianyang & Luo, Anxin & Hu, Yushen & Li, Xinxin & Wang, Fei, 2018. "Micro electrostatic energy harvester with both broad bandwidth and high normalized power density," Applied Energy, Elsevier, vol. 212(C), pages 362-371.
    Full references (including those not matched with items on IDEAS)

    Most related items

    These are the items that most often cite the same works as this one and are cited by the same works as this one.
    1. Aldawood, Ghufran & Nguyen, Hieu Tri & Bardaweel, Hamzeh, 2019. "High power density spring-assisted nonlinear electromagnetic vibration energy harvester for low base-accelerations," Applied Energy, Elsevier, vol. 253(C), pages 1-1.
    2. Luo, Anxin & Zhang, Yulong & Dai, Xiangtian & Wang, Yifan & Xu, Weihan & Lu, Yan & Wang, Min & Fan, Kangqi & Wang, Fei, 2020. "An inertial rotary energy harvester for vibrations at ultra-low frequency with high energy conversion efficiency," Applied Energy, Elsevier, vol. 279(C).
    3. Tri Nguyen, Hieu & Genov, Dentcho A. & Bardaweel, Hamzeh, 2020. "Vibration energy harvesting using magnetic spring based nonlinear oscillators: Design strategies and insights," Applied Energy, Elsevier, vol. 269(C).
    4. Kim, Jae Woo & Salauddin, Md & Cho, Hyunok & Rasel, M. Salauddin & Park, Jae Yeong, 2019. "Electromagnetic energy harvester based on a finger trigger rotational gear module and an array of disc Halbach magnets," Applied Energy, Elsevier, vol. 250(C), pages 776-785.
    5. Li, Zhongjie & Yang, Zhengbao & Naguib, Hani E., 2020. "Introducing revolute joints into piezoelectric energy harvesters," Energy, Elsevier, vol. 192(C).
    6. Wang, Shuai & Wang, Chaohui & Gao, Zhiwei & Cao, Hongyun, 2020. "Design and performance of a cantilever piezoelectric power generation device for real-time road safety warnings," Applied Energy, Elsevier, vol. 276(C).
    7. Zhang, Jinhui & Qin, Lifeng, 2019. "A tunable frequency up-conversion wideband piezoelectric vibration energy harvester for low-frequency variable environment using a novel impact- and rope-driven hybrid mechanism," Applied Energy, Elsevier, vol. 240(C), pages 26-34.
    8. Halim, M.A. & Rantz, R. & Zhang, Q. & Gu, L. & Yang, K. & Roundy, S., 2018. "An electromagnetic rotational energy harvester using sprung eccentric rotor, driven by pseudo-walking motion," Applied Energy, Elsevier, vol. 217(C), pages 66-74.
    9. Philipp Gawron & Thomas M. Wendt & Lukas Stiglmeier & Nikolai Hangst & Urban B. Himmelsbach, 2021. "A Review on Kinetic Energy Harvesting with Focus on 3D Printed Electromagnetic Vibration Harvesters," Energies, MDPI, vol. 14(21), pages 1-24, October.
    10. Zhou, Xu & Wang, Kangda & Li, Siyu & Wang, Yadong & Sun, Daoyu & Wang, Longlong & He, Zhizhu & Tang, Wei & Liu, Huicong & Jin, Xiaoping & Li, Zhen, 2024. "An ultra-compact lightweight electromagnetic generator enhanced with Halbach magnet array and printed triphase windings," Applied Energy, Elsevier, vol. 353(PA).
    11. Khazaee, Majid & Huber, John E. & Rosendahl, Lasse & Rezania, Alireza, 2021. "The investigation of viscous and structural damping for piezoelectric energy harvesters using only time-domain voltage measurements," Applied Energy, Elsevier, vol. 285(C).
    12. Maharjan, Pukar & Salauddin, Md & Cho, Hyunok & Park, Jae Yeong, 2018. "An indoor power line based magnetic field energy harvester for self-powered wireless sensors in smart home applications," Applied Energy, Elsevier, vol. 232(C), pages 398-408.
    13. Zhao, Dong & Liu, Ying, 2020. "A prototype for light-electric harvester based on light sensitive liquid crystal elastomer cantilever," Energy, Elsevier, vol. 198(C).
    14. Rasel, Mohammad Sala Uddin & Park, Jae-Yeong, 2017. "A sandpaper assisted micro-structured polydimethylsiloxane fabrication for human skin based triboelectric energy harvesting application," Applied Energy, Elsevier, vol. 206(C), pages 150-158.
    15. He, Lipeng & Liu, Lei & Zhou, Jianwen & Yu, Gang & Sun, Baoyu & Cheng, Guangming, 2022. "Design and analysis of a double-acting nonlinear wideband piezoelectric energy harvester under plucking and collision," Energy, Elsevier, vol. 239(PD).
    16. Tan, Qinxue & Fan, Kangqi & Tao, Kai & Zhao, Liya & Cai, Meiling, 2020. "A two-degree-of-freedom string-driven rotor for efficient energy harvesting from ultra-low frequency excitations," Energy, Elsevier, vol. 196(C).
    17. Ibrahim, Alwathiqbellah & Hassan, Mostafa, 2023. "Extended bandwidth of 2DOF double impact triboelectric energy harvesting: Theoretical and experimental verification," Applied Energy, Elsevier, vol. 333(C).
    18. Md Maruf Hossain Shuvo & Twisha Titirsha & Nazmul Amin & Syed Kamrul Islam, 2022. "Energy Harvesting in Implantable and Wearable Medical Devices for Enduring Precision Healthcare," Energies, MDPI, vol. 15(20), pages 1-50, October.
    19. Xiaobiao Shan & Haigang Tian & Han Cao & Tao Xie, 2020. "Enhancing Performance of a Piezoelectric Energy Harvester System for Concurrent Flutter and Vortex-Induced Vibration," Energies, MDPI, vol. 13(12), pages 1-19, June.
    20. Trinh, V.L. & Chung, C.K., 2018. "Harvesting mechanical energy, storage, and lighting using a novel PDMS based triboelectric generator with inclined wall arrays and micro-topping structure," Applied Energy, Elsevier, vol. 213(C), pages 353-365.

    Corrections

    All material on this site has been provided by the respective publishers and authors. You can help correct errors and omissions. When requesting a correction, please mention this item's handle: RePEc:eee:appene:v:228:y:2018:i:c:p:881-890. See general information about how to correct material in RePEc.

    If you have authored this item and are not yet registered with RePEc, we encourage you to do it here. This allows to link your profile to this item. It also allows you to accept potential citations to this item that we are uncertain about.

    If CitEc recognized a bibliographic reference but did not link an item in RePEc to it, you can help with this form .

    If you know of missing items citing this one, you can help us creating those links by adding the relevant references in the same way as above, for each refering item. If you are a registered author of this item, you may also want to check the "citations" tab in your RePEc Author Service profile, as there may be some citations waiting for confirmation.

    For technical questions regarding this item, or to correct its authors, title, abstract, bibliographic or download information, contact: Catherine Liu (email available below). General contact details of provider: http://www.elsevier.com/wps/find/journaldescription.cws_home/405891/description#description .

    Please note that corrections may take a couple of weeks to filter through the various RePEc services.

    IDEAS is a RePEc service. RePEc uses bibliographic data supplied by the respective publishers.