A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering
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DOI: 10.1016/j.apenergy.2018.07.001
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Keywords
MEMS; Vibration energy harvester; Aluminum nitride thin film; Magnetron sputtering; Coupled distributed parameter model;All these keywords.
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