Natural language processing (NLP) and association rules (AR)-based knowledge extraction for intelligent fault analysis: a case study in semiconductor industry
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DOI: 10.1007/s10845-023-02245-7
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- Hahsler, Michael & Grün, Bettina & Hornik, Kurt, 2005. "arules - A Computational Environment for Mining Association Rules and Frequent Item Sets," Journal of Statistical Software, Foundation for Open Access Statistics, vol. 14(i15).
- Chia-Yu Hsu & Wei-Chen Liu, 2021. "Multiple time-series convolutional neural network for fault detection and diagnosis and empirical study in semiconductor manufacturing," Journal of Intelligent Manufacturing, Springer, vol. 32(3), pages 823-836, March.
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Keywords
Fault analysis; Natural language processing; GCVAE; GMM; Association rules;All these keywords.
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