Optimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers
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DOI: 10.1007/s10845-022-01993-2
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- Nun Pitalúa-Díaz & Enrique J. Herrera-López & Guillermo Valencia-Palomo & Alvaro González-Angeles & Ricardo A. Rodríguez-Carvajal & Nohe R. Cazarez-Castro, 2015. "Comparative Analysis between Conventional PI and Fuzzy LogicPI Controllers for Indoor Benzene Concentrations," Sustainability, MDPI, vol. 7(5), pages 1-15, May.
- Lu Liu & Siyuan Tian & Dingyu Xue & Tao Zhang & YangQuan Chen, 2019. "Industrial feedforward control technology: a review," Journal of Intelligent Manufacturing, Springer, vol. 30(8), pages 2819-2833, December.
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Keywords
Semiconductor manufacturing; Process control; Intelligent manufacturing; PID; Temperature control; Fuzzy logic controller;All these keywords.
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