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Epitaxial single-crystal hexagonal boron nitride multilayers on Ni (111)

Author

Listed:
  • Kyung Yeol Ma

    (Ulsan National Institute of Science and Technology (UNIST)
    Institute for Basic Science (IBS))

  • Leining Zhang

    (Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST))

  • Sunghwan Jin

    (Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST))

  • Yan Wang

    (University of Cambridge)

  • Seong In Yoon

    (Ulsan National Institute of Science and Technology (UNIST))

  • Hyuntae Hwang

    (Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST))

  • Juseung Oh

    (Pohang University of Science and Technology (POSTECH))

  • Da Sol Jeong

    (Ulsan National Institute of Science and Technology (UNIST))

  • Meihui Wang

    (Ulsan National Institute of Science and Technology (UNIST)
    Institute for Basic Science (IBS))

  • Shahana Chatterjee

    (Institute for Basic Science (IBS))

  • Gwangwoo Kim

    (Ulsan National Institute of Science and Technology (UNIST))

  • A-Rang Jang

    (Semyung University)

  • Jieun Yang

    (Kyung Hee University)

  • Sunmin Ryu

    (Pohang University of Science and Technology (POSTECH))

  • Hu Young Jeong

    (Ulsan National Institute of Science and Technology (UNIST))

  • Rodney S. Ruoff

    (Ulsan National Institute of Science and Technology (UNIST)
    Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST)
    Ulsan National Institute of Science and Technology (UNIST))

  • Manish Chhowalla

    (University of Cambridge)

  • Feng Ding

    (Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST))

  • Hyeon Suk Shin

    (Ulsan National Institute of Science and Technology (UNIST)
    Institute for Basic Science (IBS)
    Ulsan National Institute of Science and Technology (UNIST)
    Ulsan National Institute of Science and Technology (UNIST))

Abstract

Large-area single-crystal monolayers of two-dimensional (2D) materials such as graphene1–3, hexagonal boron nitride (hBN)4–6 and transition metal dichalcogenides7,8 have been grown. hBN is considered to be the ‘ideal’ dielectric for 2D-materials-based field-effect transistors (FETs), offering the potential for extending Moore’s law9,10. Although hBN thicker than a monolayer is more desirable as substrate for 2D semiconductors11,12, highly uniform and single-crystal multilayer hBN growth has yet to be demonstrated. Here we report the epitaxial growth of wafer-scale single-crystal trilayer hBN by a chemical vapour deposition (CVD) method. Uniformly aligned hBN islands are found to grow on single-crystal Ni (111) at early stage and finally to coalesce into a single-crystal film. Cross-sectional transmission electron microscopy (TEM) results show that a Ni23B6 interlayer is formed (during cooling) between the single-crystal hBN film and Ni substrate by boron dissolution in Ni. There are epitaxial relationships between hBN and Ni23B6 and between Ni23B6 and Ni. We also find that the hBN film acts as a protective layer that remains intact during catalytic evolution of hydrogen, suggesting continuous single-crystal hBN. This hBN transferred onto the SiO2 (300 nm)/Si wafer acts as a dielectric layer to reduce electron doping from the SiO2 substrate in MoS2 FETs. Our results demonstrate high-quality single-crystal multilayered hBN over large areas, which should open up new pathways for making it a ubiquitous substrate for 2D semiconductors.

Suggested Citation

  • Kyung Yeol Ma & Leining Zhang & Sunghwan Jin & Yan Wang & Seong In Yoon & Hyuntae Hwang & Juseung Oh & Da Sol Jeong & Meihui Wang & Shahana Chatterjee & Gwangwoo Kim & A-Rang Jang & Jieun Yang & Sunmi, 2022. "Epitaxial single-crystal hexagonal boron nitride multilayers on Ni (111)," Nature, Nature, vol. 606(7912), pages 88-93, June.
  • Handle: RePEc:nat:nature:v:606:y:2022:i:7912:d:10.1038_s41586-022-04745-7
    DOI: 10.1038/s41586-022-04745-7
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    Cited by:

    1. Junzhu Li & Abdus Samad & Yue Yuan & Qingxiao Wang & Mohamed Nejib Hedhili & Mario Lanza & Udo Schwingenschlögl & Iwnetim Abate & Deji Akinwande & Zheng Liu & Bo Tian & Xixiang Zhang, 2024. "Single-crystal hBN Monolayers from Aligned Hexagonal Islands," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    2. Alberto Montanaro & Giulia Piccinini & Vaidotas Mišeikis & Vito Sorianello & Marco A. Giambra & Stefano Soresi & Luca Giorgi & Antonio D’Errico & K. Watanabe & T. Taniguchi & Sergio Pezzini & Camilla , 2023. "Sub-THz wireless transmission based on graphene-integrated optoelectronic mixer," Nature Communications, Nature, vol. 14(1), pages 1-14, December.
    3. Jun Zhou & Guitao Zhang & Wenhui Wang & Qian Chen & Weiwei Zhao & Hongwei Liu & Bei Zhao & Zhenhua Ni & Junpeng Lu, 2024. "Phase-engineered synthesis of atomically thin te single crystals with high on-state currents," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    4. Jingxian Zhong & Dawei Zhou & Qi Bai & Chao Liu & Xinlian Fan & Hehe Zhang & Congzhou Li & Ran Jiang & Peiyi Zhao & Jiaxiao Yuan & Xiaojiao Li & Guixiang Zhan & Hongyu Yang & Jing Liu & Xuefen Song & , 2024. "Growth of millimeter-sized 2D metal iodide crystals induced by ion-specific preference at water-air interfaces," Nature Communications, Nature, vol. 15(1), pages 1-10, December.
    5. Bo Tian & Junzhu Li & Qingxiao Wang & Abdus Samad & Yue Yuan & Mohamed Nejib Hedhili & Arun Jangir & Marco Gruenewald & Mario Lanza & Udo Schwingenschlögl & Torsten Fritz & Xixiang Zhang & Zheng Liu, 2024. "Ultraflat Cu(111) foils by surface acoustic wave-assisted annealing," Nature Communications, Nature, vol. 15(1), pages 1-9, December.
    6. Ye-Heng Song & M. U. Muzaffar & Qi Wang & Yunhui Wang & Yu Jia & Ping Cui & Weifeng Zhang & Xue-Sen Wang & Zhenyu Zhang, 2024. "Realization of large-area ultraflat chiral blue phosphorene," Nature Communications, Nature, vol. 15(1), pages 1-8, December.
    7. Fankai Zeng & Ran Wang & Wenya Wei & Zuo Feng & Quanlin Guo & Yunlong Ren & Guoliang Cui & Dingxin Zou & Zhensheng Zhang & Song Liu & Kehai Liu & Ying Fu & Jinzong Kou & Li Wang & Xu Zhou & Zhilie Tan, 2023. "Stamped production of single-crystal hexagonal boron nitride monolayers on various insulating substrates," Nature Communications, Nature, vol. 14(1), pages 1-7, December.
    8. Lu Li & Qinqin Wang & Fanfan Wu & Qiaoling Xu & Jinpeng Tian & Zhiheng Huang & Qinghe Wang & Xuan Zhao & Qinghua Zhang & Qinkai Fan & Xiuzhen Li & Yalin Peng & Yangkun Zhang & Kunshan Ji & Aomiao Zhi , 2024. "Epitaxy of wafer-scale single-crystal MoS2 monolayer via buffer layer control," Nature Communications, Nature, vol. 15(1), pages 1-9, December.

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